GB1064101A - Improvements in or relating to ion sources - Google Patents

Improvements in or relating to ion sources

Info

Publication number
GB1064101A
GB1064101A GB28900/64A GB2890064A GB1064101A GB 1064101 A GB1064101 A GB 1064101A GB 28900/64 A GB28900/64 A GB 28900/64A GB 2890064 A GB2890064 A GB 2890064A GB 1064101 A GB1064101 A GB 1064101A
Authority
GB
United Kingdom
Prior art keywords
ions
july
gas
ion source
desired ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB28900/64A
Inventor
Richard Stuart Nelson
Kenneth Jeffery Hill
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Atomic Energy Authority
Original Assignee
UK Atomic Energy Authority
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Atomic Energy Authority filed Critical UK Atomic Energy Authority
Priority to GB28900/64A priority Critical patent/GB1064101A/en
Priority to US470441A priority patent/US3393339A/en
Priority to DE19651514972 priority patent/DE1514972B2/en
Priority to FR24391A priority patent/FR1441903A/en
Priority to NL6508972A priority patent/NL6508972A/xx
Priority to CH980165A priority patent/CH430891A/en
Publication of GB1064101A publication Critical patent/GB1064101A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/14—Other arc discharge ion sources using an applied magnetic field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns

Abstract

1,064,101. Ion source. UNITED KINGDOM ATOMIC ENERGY AUTHORITY. July 6, 1965 [July 13, 1964], No. 28900/64. Heading H1D. An ion source in which the desired ions are sputtered from a cylindrical electrode 4 by bombardment with gas ions, the gas e.g. xenon, which is supplied through the bore 7 is ionized by electrons emitted from a D.C. energized coiled filament 5 which also sets up a magnetic field to concentrate the electrons in the region of the axis of the filament. The desired ions are extracted through the aperture 8 by the accelerating electrode 10. The desired ions may be copper, tungsten or gold ions and the initial gas pressure may be 10<SP>-3</SP> mm. Hg.
GB28900/64A 1964-07-13 1964-07-13 Improvements in or relating to ion sources Expired GB1064101A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GB28900/64A GB1064101A (en) 1964-07-13 1964-07-13 Improvements in or relating to ion sources
US470441A US3393339A (en) 1964-07-13 1965-07-08 Sputtering ion source for producing an ion beam comprising ions of a solid material
DE19651514972 DE1514972B2 (en) 1964-07-13 1965-07-10 Ion impact ion source
FR24391A FR1441903A (en) 1964-07-13 1965-07-12 Ion source
NL6508972A NL6508972A (en) 1964-07-13 1965-07-12
CH980165A CH430891A (en) 1964-07-13 1965-07-13 Atomizing ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB28900/64A GB1064101A (en) 1964-07-13 1964-07-13 Improvements in or relating to ion sources

Publications (1)

Publication Number Publication Date
GB1064101A true GB1064101A (en) 1967-04-05

Family

ID=10282997

Family Applications (1)

Application Number Title Priority Date Filing Date
GB28900/64A Expired GB1064101A (en) 1964-07-13 1964-07-13 Improvements in or relating to ion sources

Country Status (5)

Country Link
US (1) US3393339A (en)
CH (1) CH430891A (en)
DE (1) DE1514972B2 (en)
GB (1) GB1064101A (en)
NL (1) NL6508972A (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3555332A (en) * 1967-10-25 1971-01-12 Perkin Elmer Corp Apparatus for producing a high energy beam of selected metallic ions
US3610986A (en) * 1970-05-01 1971-10-05 Union Carbide Corp Electron beam source including a pilot nonthermionic, electron source
NL7407254A (en) * 1974-05-30 1975-12-02 Philips Nv REFILLABLE COLD CATHOD IN A GAS DISCHARGE ELECTRONIC ION CANNON.
US3898496A (en) * 1974-08-12 1975-08-05 Us Energy Means for obtaining a metal ion beam from a heavy-ion cyclotron source
DE2610165C2 (en) * 1976-03-11 1983-11-10 Gesellschaft für Schwerionenforschung mbH, 6100 Darmstadt Duoplasmatron ion source for generating multiply charged ions
US4135094A (en) * 1977-07-27 1979-01-16 E. I. Du Pont De Nemours And Company Method and apparatus for rejuvenating ion sources
US4166952A (en) * 1978-02-24 1979-09-04 E. I. Du Pont De Nemours And Company Method and apparatus for the elemental analysis of solids
US4755344A (en) * 1980-04-11 1988-07-05 The United States Of America As Represented By The United States Department Of Energy Method and apparatus for the production of cluster ions
FR2613897B1 (en) * 1987-04-10 1990-11-09 Realisations Nucleaires Et DEVICE FOR SUPPRESSING MICRO PROJECTIONS IN A VACUUM ARC ION SOURCE

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2964634A (en) * 1960-12-13 Apparatus for producing neutrons
US2772363A (en) * 1952-03-21 1956-11-27 Cons Electrodynamics Corp Method and apparatus for ionization of solids
US2947868A (en) * 1959-07-27 1960-08-02 Geophysics Corp Of America Mass spectrometer

Also Published As

Publication number Publication date
US3393339A (en) 1968-07-16
CH430891A (en) 1967-02-28
DE1514972B2 (en) 1970-11-26
DE1514972A1 (en) 1970-03-05
NL6508972A (en) 1966-01-14

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