GB987371A - Charged particle generator - Google Patents

Charged particle generator

Info

Publication number
GB987371A
GB987371A GB6095/63A GB609563A GB987371A GB 987371 A GB987371 A GB 987371A GB 6095/63 A GB6095/63 A GB 6095/63A GB 609563 A GB609563 A GB 609563A GB 987371 A GB987371 A GB 987371A
Authority
GB
United Kingdom
Prior art keywords
box
plasma
arc
generator
charged particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB6095/63A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of GB987371A publication Critical patent/GB987371A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

987,371. Ion sources. KABUSHIKI KAISHA HITACHI SEISAKUSHO. Feb. 14, 1963 [Feb. 15, 1962], No. 6095/63. Heading H1D. A generator for either ions or electrons comprises a vacuum cleaner 1 having an axial magnetic field e.g. from electromagnets 3, 20, an arc discharge box 10 adjoining a plasma chamber 12, and means for making the plasma box positive, or negative, with respect to a collector or control electrode so as to extract ions, or electrons, from the plasma box. To support the discharge a gas, e.g. hydrogen or argon, may be admitted at 9, the chamber 1 being continuously evacuated. The plasma chamber may be electrically isolated from the arc box, or may be replaced by a long narrow hole in the head of the arc box. The generator may be used in an electron microscope or in a charged particle accelerator.
GB6095/63A 1962-02-15 1963-02-14 Charged particle generator Expired GB987371A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP520762 1962-02-15

Publications (1)

Publication Number Publication Date
GB987371A true GB987371A (en) 1965-03-31

Family

ID=11604729

Family Applications (1)

Application Number Title Priority Date Filing Date
GB6095/63A Expired GB987371A (en) 1962-02-15 1963-02-14 Charged particle generator

Country Status (2)

Country Link
US (1) US3275867A (en)
GB (1) GB987371A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2169131A (en) * 1984-12-22 1986-07-02 English Electric Valve Co Ltd Gas discharge devices
GB2212655A (en) * 1987-11-13 1989-07-26 Vg Instr Group Ion source for a high sensitivity mass spectrometor

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE26192C (en) * 1964-10-14 R. THIEL, Theilhaber der Firma tremser Eisenwerk, Carl Thiel & Co. in Lübeck Heating and cooling device for liquids
CH448303A (en) * 1965-05-25 1967-12-15 Asea Ab Arrangement for generating a continuous flow of electrons between an anode and a cathode
US3500077A (en) * 1967-12-19 1970-03-10 Atomic Energy Commission Method and apparatus for accelerating ions out of a hot plasma region
US4695773A (en) * 1981-12-18 1987-09-22 The Perkin-Elmer Corporation Field emission gun electrode geometry for improved focus stability
US4471224A (en) * 1982-03-08 1984-09-11 International Business Machines Corporation Apparatus and method for generating high current negative ions
GB2411763B (en) * 2004-03-05 2009-02-18 Thermo Electron Corp Flood gun for charge neutralization

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2463545A (en) * 1943-04-30 1949-03-08 Cons Eng Corp Mass spectrometry

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2169131A (en) * 1984-12-22 1986-07-02 English Electric Valve Co Ltd Gas discharge devices
US4758766A (en) * 1984-12-22 1988-07-19 English Electric Valve Company Limited Gas discharge devices utilizing electron injection for gas ionization
GB2212655A (en) * 1987-11-13 1989-07-26 Vg Instr Group Ion source for a high sensitivity mass spectrometor

Also Published As

Publication number Publication date
US3275867A (en) 1966-09-27

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