GB939275A - Device for producing thin metal layers by ion neutralization - Google Patents
Device for producing thin metal layers by ion neutralizationInfo
- Publication number
- GB939275A GB939275A GB2439661A GB2439661A GB939275A GB 939275 A GB939275 A GB 939275A GB 2439661 A GB2439661 A GB 2439661A GB 2439661 A GB2439661 A GB 2439661A GB 939275 A GB939275 A GB 939275A
- Authority
- GB
- United Kingdom
- Prior art keywords
- cathode
- thin metal
- ions
- metal layers
- july
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Physical Vapour Deposition (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
939,275. Vapour deposition of metals. CESKOSLOVENSKA AKADEMIE VED. July 6, 1961 [July 8, 1960], No. 24396/61. Class 82. [Also in Group XL (a)] A thin metal layer is formed on the body 7 by ions produced in a plasma within a cylindrical hollow cathode 4 from particles released by sputtering from the cathode surface. The plasma is formed by an electric discharge set up in a gaseous atmosphere, e.g. hydrogen or an inert gas at a pressure of the order 10-2 mm. Hg., between the cathode and an anode 2. The energy of the ions bombarding the body 7 is controlled by a grid 6 which is spaced from the body 7 a distance less than, or comparable with, the mean free path of the ions. Screening 3, 9, 8 is provided for the cathode 4 and the body 7.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CS438860 | 1960-07-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB939275A true GB939275A (en) | 1963-10-09 |
Family
ID=5386503
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB2439661A Expired GB939275A (en) | 1960-07-08 | 1961-07-06 | Device for producing thin metal layers by ion neutralization |
Country Status (4)
Country | Link |
---|---|
DE (1) | DE1142262B (en) |
FR (1) | FR1294562A (en) |
GB (1) | GB939275A (en) |
NL (2) | NL124459C (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3314873A (en) * | 1962-11-28 | 1967-04-18 | Western Electric Co | Method and apparatus for cathode sputtering using a cylindrical cathode |
US3318790A (en) * | 1964-04-29 | 1967-05-09 | Texas Instruments Inc | Production of thin organic polymer by screened glow discharge |
US3344055A (en) * | 1964-04-29 | 1967-09-26 | Texas Instruments Inc | Apparatus for polymerizing and forming thin continuous films using a glow discharge |
US3351543A (en) * | 1964-05-28 | 1967-11-07 | Gen Electric | Process of coating diamond with an adherent metal coating using cathode sputtering |
US3361659A (en) * | 1967-08-14 | 1968-01-02 | Ibm | Process of depositing thin films by cathode sputtering using a controlled grid |
US3507774A (en) * | 1967-06-02 | 1970-04-21 | Nat Res Corp | Low energy sputtering apparatus for operation below one micron pressure |
US3526584A (en) * | 1964-09-25 | 1970-09-01 | Western Electric Co | Method of providing a field free region above a substrate during sputter-depositing thereon |
US3530055A (en) * | 1968-08-26 | 1970-09-22 | Ibm | Formation of layers of solids on substrates |
US4116794A (en) * | 1974-12-23 | 1978-09-26 | Telic Corporation | Glow discharge method and apparatus |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1039691A (en) * | 1964-03-17 | 1966-08-17 | Gen Precision Inc | Vacuum coating and ion bombardment apparatus |
US3325393A (en) * | 1964-05-28 | 1967-06-13 | Gen Electric | Electrical discharge cleaning and coating process |
ATE2909T1 (en) * | 1978-07-08 | 1983-04-15 | Wolfgang Kieferle | METHOD OF LAYING A METAL OR ALLOY LAYER ON AN ELECTRICALLY CONDUCTIVE WORKPIECE AND APPARATUS FOR CARRYING OUT THE SAME. |
-
0
- NL NL266760D patent/NL266760A/xx unknown
- NL NL124459D patent/NL124459C/xx active
-
1961
- 1961-07-06 GB GB2439661A patent/GB939275A/en not_active Expired
- 1961-07-07 DE DEC24617A patent/DE1142262B/en active Pending
- 1961-07-08 FR FR867429A patent/FR1294562A/en not_active Expired
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3314873A (en) * | 1962-11-28 | 1967-04-18 | Western Electric Co | Method and apparatus for cathode sputtering using a cylindrical cathode |
US3318790A (en) * | 1964-04-29 | 1967-05-09 | Texas Instruments Inc | Production of thin organic polymer by screened glow discharge |
US3344055A (en) * | 1964-04-29 | 1967-09-26 | Texas Instruments Inc | Apparatus for polymerizing and forming thin continuous films using a glow discharge |
US3351543A (en) * | 1964-05-28 | 1967-11-07 | Gen Electric | Process of coating diamond with an adherent metal coating using cathode sputtering |
US3526584A (en) * | 1964-09-25 | 1970-09-01 | Western Electric Co | Method of providing a field free region above a substrate during sputter-depositing thereon |
US3507774A (en) * | 1967-06-02 | 1970-04-21 | Nat Res Corp | Low energy sputtering apparatus for operation below one micron pressure |
US3361659A (en) * | 1967-08-14 | 1968-01-02 | Ibm | Process of depositing thin films by cathode sputtering using a controlled grid |
US3530055A (en) * | 1968-08-26 | 1970-09-22 | Ibm | Formation of layers of solids on substrates |
US4116794A (en) * | 1974-12-23 | 1978-09-26 | Telic Corporation | Glow discharge method and apparatus |
Also Published As
Publication number | Publication date |
---|---|
DE1142262B (en) | 1963-01-10 |
FR1294562A (en) | 1962-05-26 |
NL266760A (en) | |
NL124459C (en) |
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