GB1263043A - Ion source generating an ion beam having a substantially uniform radial density - Google Patents

Ion source generating an ion beam having a substantially uniform radial density

Info

Publication number
GB1263043A
GB1263043A GB03554/70A GB1355470A GB1263043A GB 1263043 A GB1263043 A GB 1263043A GB 03554/70 A GB03554/70 A GB 03554/70A GB 1355470 A GB1355470 A GB 1355470A GB 1263043 A GB1263043 A GB 1263043A
Authority
GB
United Kingdom
Prior art keywords
electrode
anode
ion
uniform radial
source generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB03554/70A
Inventor
Lucien Bex
Jean Faure
Roger Vienet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of GB1263043A publication Critical patent/GB1263043A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/10—Duoplasmatrons ; Duopigatrons
    • H01J27/12—Duoplasmatrons ; Duopigatrons provided with an expansion cup

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

1,263,043. Ion sources. COMMISSARIAT A L'ENERGIE ATOMIQUE. 20 March, 1970 [4 April, 1969], No. 13554/70. Heading H1D. An ion source generating an ion beam having a practically uniform radial density comprises an ionization chamber 15 into which the gas to be ionized is introduced, a cathode 2 located on the axis of an intermediate cylindrical electrode 4 defining a chamber 1 and provided with an orifice 5 for the passage of electrons, an anode 7 provided with a hole 8 for the passage of ions, a plasma-expansion control electrode 10 which is electrically insulated from the anode and brought to a negative potential with respect to the anode potential, and an ion extractor electrode 13. The electrode 10, which has an internal coating of gold film to prevent oxidation and surface polarization, is separated from the anode 7 by a layer of insulation and has a connecting lead 12. Hydrogen is introduced into the chambers 1 and 15 through an orifice (not shown). Intermediate electrode 4, which is surrounded by a magnetic coil 6, is insulated from the anode 7 by a seal 9. An electrode member 14 is connected to the electrode 10. The portion of the source downstream of the anode 7 is evacuated by a vacuum pump (not shown).
GB03554/70A 1969-04-04 1970-03-20 Ion source generating an ion beam having a substantially uniform radial density Expired GB1263043A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR6910569A FR2061809A5 (en) 1969-04-04 1969-04-04

Publications (1)

Publication Number Publication Date
GB1263043A true GB1263043A (en) 1972-02-09

Family

ID=9031993

Family Applications (1)

Application Number Title Priority Date Filing Date
GB03554/70A Expired GB1263043A (en) 1969-04-04 1970-03-20 Ion source generating an ion beam having a substantially uniform radial density

Country Status (8)

Country Link
US (1) US3702416A (en)
BE (1) BE747725A (en)
CH (1) CH508979A (en)
DE (1) DE2016038B2 (en)
ES (1) ES378259A1 (en)
FR (1) FR2061809A5 (en)
GB (1) GB1263043A (en)
NL (1) NL7004792A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0145120A1 (en) * 1983-08-15 1985-06-19 Applied Materials, Inc. Apparatus for ion implantation

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3845300A (en) * 1973-04-18 1974-10-29 Atomic Energy Commission Apparatus and method for magnetoplasmadynamic isotope separation
US3924134A (en) * 1974-11-29 1975-12-02 Ibm Double chamber ion source
DE2610165C2 (en) * 1976-03-11 1983-11-10 Gesellschaft für Schwerionenforschung mbH, 6100 Darmstadt Duoplasmatron ion source for generating multiply charged ions
US4570106A (en) * 1982-02-18 1986-02-11 Elscint, Inc. Plasma electron source for cold-cathode discharge device or the like
US4458180A (en) * 1982-02-18 1984-07-03 Elscint Ltd. Plasma electron source for cold-cathode discharge device or the like
GB8607222D0 (en) * 1986-03-24 1986-04-30 Welding Inst Charged particle collection
US4841197A (en) * 1986-05-28 1989-06-20 Nihon Shinku Gijutsu Kabushiki Kaisha Double-chamber ion source
US6250070B1 (en) * 2000-05-09 2001-06-26 Hughes Electronics Corporation Ion thruster with ion-extraction grids having compound contour shapes

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL285354A (en) * 1961-12-11
FR1366023A (en) * 1963-05-02 1964-07-10 Csf Improvements to neutralized ion beam propulsion devices
US3287598A (en) * 1964-01-02 1966-11-22 High Voltage Engineering Corp Ion source having an expansion cup for effecting beam divergence
US3238414A (en) * 1965-07-28 1966-03-01 George G Kelley High output duoplasmatron-type ion source

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0145120A1 (en) * 1983-08-15 1985-06-19 Applied Materials, Inc. Apparatus for ion implantation

Also Published As

Publication number Publication date
CH508979A (en) 1971-06-15
DE2016038A1 (en) 1970-10-08
FR2061809A5 (en) 1971-06-25
BE747725A (en) 1970-08-31
DE2016038B2 (en) 1972-12-07
US3702416A (en) 1972-11-07
NL7004792A (en) 1970-10-06
ES378259A1 (en) 1973-03-16

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