CH508979A - Uniform radial density ion source - Google Patents
Uniform radial density ion sourceInfo
- Publication number
- CH508979A CH508979A CH412270A CH412270A CH508979A CH 508979 A CH508979 A CH 508979A CH 412270 A CH412270 A CH 412270A CH 412270 A CH412270 A CH 412270A CH 508979 A CH508979 A CH 508979A
- Authority
- CH
- Switzerland
- Prior art keywords
- ion source
- uniform radial
- radial density
- density ion
- uniform
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/08—Ion sources; Ion guns using arc discharge
- H01J27/10—Duoplasmatrons ; Duopigatrons
- H01J27/12—Duoplasmatrons ; Duopigatrons provided with an expansion cup
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR6910569A FR2061809A5 (en) | 1969-04-04 | 1969-04-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
CH508979A true CH508979A (en) | 1971-06-15 |
Family
ID=9031993
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH412270A CH508979A (en) | 1969-04-04 | 1970-03-18 | Uniform radial density ion source |
Country Status (8)
Country | Link |
---|---|
US (1) | US3702416A (en) |
BE (1) | BE747725A (en) |
CH (1) | CH508979A (en) |
DE (1) | DE2016038B2 (en) |
ES (1) | ES378259A1 (en) |
FR (1) | FR2061809A5 (en) |
GB (1) | GB1263043A (en) |
NL (1) | NL7004792A (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3845300A (en) * | 1973-04-18 | 1974-10-29 | Atomic Energy Commission | Apparatus and method for magnetoplasmadynamic isotope separation |
US3924134A (en) * | 1974-11-29 | 1975-12-02 | Ibm | Double chamber ion source |
DE2610165C2 (en) * | 1976-03-11 | 1983-11-10 | Gesellschaft für Schwerionenforschung mbH, 6100 Darmstadt | Duoplasmatron ion source for generating multiply charged ions |
US4458180A (en) * | 1982-02-18 | 1984-07-03 | Elscint Ltd. | Plasma electron source for cold-cathode discharge device or the like |
US4570106A (en) * | 1982-02-18 | 1986-02-11 | Elscint, Inc. | Plasma electron source for cold-cathode discharge device or the like |
DE3480449D1 (en) * | 1983-08-15 | 1989-12-14 | Applied Materials Inc | APPARATUS FOR ION IMPLANTATION |
GB8607222D0 (en) * | 1986-03-24 | 1986-04-30 | Welding Inst | Charged particle collection |
US4841197A (en) * | 1986-05-28 | 1989-06-20 | Nihon Shinku Gijutsu Kabushiki Kaisha | Double-chamber ion source |
US6250070B1 (en) * | 2000-05-09 | 2001-06-26 | Hughes Electronics Corporation | Ion thruster with ion-extraction grids having compound contour shapes |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL285354A (en) * | 1961-12-11 | |||
FR1366023A (en) * | 1963-05-02 | 1964-07-10 | Csf | Improvements to neutralized ion beam propulsion devices |
US3287598A (en) * | 1964-01-02 | 1966-11-22 | High Voltage Engineering Corp | Ion source having an expansion cup for effecting beam divergence |
US3238414A (en) * | 1965-07-28 | 1966-03-01 | George G Kelley | High output duoplasmatron-type ion source |
-
1969
- 1969-04-04 FR FR6910569A patent/FR2061809A5/fr not_active Expired
-
1970
- 1970-03-18 CH CH412270A patent/CH508979A/en not_active IP Right Cessation
- 1970-03-20 GB GB03554/70A patent/GB1263043A/en not_active Expired
- 1970-03-20 BE BE747725D patent/BE747725A/en unknown
- 1970-03-27 US US23184A patent/US3702416A/en not_active Expired - Lifetime
- 1970-04-03 NL NL7004792A patent/NL7004792A/xx unknown
- 1970-04-03 DE DE19702016038 patent/DE2016038B2/en active Granted
- 1970-04-04 ES ES378259A patent/ES378259A1/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
NL7004792A (en) | 1970-10-06 |
ES378259A1 (en) | 1973-03-16 |
US3702416A (en) | 1972-11-07 |
BE747725A (en) | 1970-08-31 |
GB1263043A (en) | 1972-02-09 |
DE2016038A1 (en) | 1970-10-08 |
DE2016038B2 (en) | 1972-12-07 |
FR2061809A5 (en) | 1971-06-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |