GB1518282A - Ion beam separators - Google Patents

Ion beam separators

Info

Publication number
GB1518282A
GB1518282A GB3386374A GB3386374A GB1518282A GB 1518282 A GB1518282 A GB 1518282A GB 3386374 A GB3386374 A GB 3386374A GB 3386374 A GB3386374 A GB 3386374A GB 1518282 A GB1518282 A GB 1518282A
Authority
GB
United Kingdom
Prior art keywords
slit
ion
ions
ion beam
july
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3386374A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Atomic Energy Authority
Original Assignee
UK Atomic Energy Authority
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Atomic Energy Authority filed Critical UK Atomic Energy Authority
Priority to GB3386374A priority Critical patent/GB1518282A/en
Priority to US05/593,188 priority patent/US4017403A/en
Priority to JP50094101A priority patent/JPS5939860B2/en
Publication of GB1518282A publication Critical patent/GB1518282A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1518282 Particle separators; ion implantation UNITED KINGDOM ATOMIC ENERGY AUTHORITY 16 July 1975 [31 July 1974 (3)] 33863/74 33864/74 and 33865/74 Heading H1D An ion separator providing a beam for an ion implantation apparatus comprises a curved passageway between magnetic polepieces 12, 13 along which ions form a source 15 are deflected to a slit 54 whose position, in conjunction with the magnetic field, determines the masses of the ions passing through the slit, the separator being provided with means such as deflection plates 19, 21 for deflecting the ions in a direction perpendicular to the plane of their path through the magnet 11 before they reach slit 54. The cross-section of the initial ion beam 14 can be varied by rotating frame electrode 51, as shown, and this rotation can be controlled by a servosystem to maintain the intensity of the final ion beam constant. The specification also describes with reference to Figs. 5 to 10 (not shown) various means for supporting and transporting specimens in the implantation apparatus.
GB3386374A 1974-07-31 1974-07-31 Ion beam separators Expired GB1518282A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB3386374A GB1518282A (en) 1974-07-31 1974-07-31 Ion beam separators
US05/593,188 US4017403A (en) 1974-07-31 1975-07-07 Ion beam separators
JP50094101A JPS5939860B2 (en) 1974-07-31 1975-07-31 Improvements regarding ion beam palletators

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3386374A GB1518282A (en) 1974-07-31 1974-07-31 Ion beam separators

Publications (1)

Publication Number Publication Date
GB1518282A true GB1518282A (en) 1978-07-19

Family

ID=10358428

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3386374A Expired GB1518282A (en) 1974-07-31 1974-07-31 Ion beam separators

Country Status (1)

Country Link
GB (1) GB1518282A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0137649A1 (en) * 1983-08-15 1985-04-17 Applied Materials, Inc. Apparatus and method for ion implantation
GB2178060A (en) * 1985-07-26 1987-02-04 Balzers Hochvakuum Method of coating micro-depressions
GB2191334A (en) * 1986-06-05 1987-12-09 Boc Group Plc Mass spectrometer
EP1030344A2 (en) * 1999-02-19 2000-08-23 Axcelis Technologies, Inc. Continuously variable aperture for high-energy ion implanter
EP1030343A2 (en) * 1999-02-19 2000-08-23 Axcelis Technologies, Inc. Method & system for operating a variable aperture in an ion implanter
GB2530363A (en) * 2014-05-13 2016-03-23 Micromass Ltd Multi-dimensional ion separation
US9899200B2 (en) 2014-05-13 2018-02-20 Micromass Uk Limited Multi-dimensional ion separation

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0137649A1 (en) * 1983-08-15 1985-04-17 Applied Materials, Inc. Apparatus and method for ion implantation
GB2178060A (en) * 1985-07-26 1987-02-04 Balzers Hochvakuum Method of coating micro-depressions
GB2178060B (en) * 1985-07-26 1989-12-13 Balzers Hochvakuum Method of coating micro-depressions
GB2191334A (en) * 1986-06-05 1987-12-09 Boc Group Plc Mass spectrometer
EP1030344A2 (en) * 1999-02-19 2000-08-23 Axcelis Technologies, Inc. Continuously variable aperture for high-energy ion implanter
EP1030343A2 (en) * 1999-02-19 2000-08-23 Axcelis Technologies, Inc. Method & system for operating a variable aperture in an ion implanter
EP1030343A3 (en) * 1999-02-19 2001-05-02 Axcelis Technologies, Inc. Method & system for operating a variable aperture in an ion implanter
EP1030344A3 (en) * 1999-02-19 2001-05-02 Axcelis Technologies, Inc. Continuously variable aperture for high-energy ion implanter
GB2530363A (en) * 2014-05-13 2016-03-23 Micromass Ltd Multi-dimensional ion separation
US9899200B2 (en) 2014-05-13 2018-02-20 Micromass Uk Limited Multi-dimensional ion separation
GB2530363B (en) * 2014-05-13 2018-02-28 Micromass Ltd Multi-dimensional ion separation

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Legal Events

Date Code Title Description
PS Patent sealed
746 Register noted 'licences of right' (sect. 46/1977)