GB1280011A - Improvements in or relating to ion beam separators - Google Patents
Improvements in or relating to ion beam separatorsInfo
- Publication number
- GB1280011A GB1280011A GB6288/69A GB628869A GB1280011A GB 1280011 A GB1280011 A GB 1280011A GB 6288/69 A GB6288/69 A GB 6288/69A GB 628869 A GB628869 A GB 628869A GB 1280011 A GB1280011 A GB 1280011A
- Authority
- GB
- United Kingdom
- Prior art keywords
- ion beam
- passageway
- polepiece
- polepieces
- curved
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D59/00—Separation of different isotopes of the same chemical element
- B01D59/44—Separation by mass spectrography
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/12—Ion sources; Ion guns using an arc discharge, e.g. of the duoplasmatron type
Abstract
1280011 Ion beam apparatus UNITED KINGDOM ATOMIC ENERGY AUTHORITY 19 Jan 1970 [5 Feb 1969] 6288/69 Heading H1D An ion beam separator, e.g. for separating isotopes, comprises a curved ion beam passageway 14 and a deflecting magnet 14 including polepieces 27 located either side of passageway 14 and being curved to conform to the shape of the passageway. At least one polepiece 27 has a pole tip 35, 36 movable with respect to the centre line of the passageway. The deflecting electromagnet 15 as a whole may be mounted on four ball castors, two of which are shown at 28, 29, and two of these castors run in a guide track 31, a lead screw 33 and drive wheel 34 being provided to move the magnet 15 parallel to track 31, in the directions of arrows A. The pole tips 35, 36 are thick discs preferably in the shape of a major segment of a circle which fit into shaped recesses in the polepiece 27. This adjustment of the position of the electromagnet 15 and the end faces of the polepieces 27 makes it possible during operation of the separator to vary the dispersion, the focal position, the convergence and the vertical or Z focusing of the ion beam 11. The ion source used may be that described in Specification 1,280,012.
Priority Applications (11)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB6289/69A GB1280012A (en) | 1969-02-05 | 1969-02-05 | Improvements in or relating to ion beam sources |
GB6288/69A GB1280011A (en) | 1969-02-05 | 1969-02-05 | Improvements in or relating to ion beam separators |
US3958A US3705320A (en) | 1969-02-05 | 1970-01-19 | Ion beam sources with tiltable firing angle |
DE2003715A DE2003715B2 (en) | 1969-02-05 | 1970-01-28 | Ion beam source |
DE19702003970 DE2003970A1 (en) | 1969-02-05 | 1970-01-29 | Ion beam separator |
DE7002990U DE7002990U (en) | 1969-02-05 | 1970-01-29 | ION BEAM SEPARATOR. |
NLAANVRAGE7001398,A NL172286C (en) | 1969-02-05 | 1970-01-30 | ION BUNDLE SOURCE INTENDED FOR AN ELECTROMAGNETIC SEPARATOR. |
NL7001397A NL7001397A (en) | 1969-02-05 | 1970-01-30 | |
JP45009228A JPS4940920B1 (en) | 1969-02-05 | 1970-02-02 | |
FR7003967A FR2033957A5 (en) | 1969-02-05 | 1970-02-04 | |
FR7003968A FR2033958A5 (en) | 1969-02-05 | 1970-02-04 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB6289/69A GB1280012A (en) | 1969-02-05 | 1969-02-05 | Improvements in or relating to ion beam sources |
GB6288/69A GB1280011A (en) | 1969-02-05 | 1969-02-05 | Improvements in or relating to ion beam separators |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1280011A true GB1280011A (en) | 1972-07-05 |
Family
ID=26240578
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB6289/69A Expired GB1280012A (en) | 1969-02-05 | 1969-02-05 | Improvements in or relating to ion beam sources |
GB6288/69A Expired GB1280011A (en) | 1969-02-05 | 1969-02-05 | Improvements in or relating to ion beam separators |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB6289/69A Expired GB1280012A (en) | 1969-02-05 | 1969-02-05 | Improvements in or relating to ion beam sources |
Country Status (5)
Country | Link |
---|---|
US (1) | US3705320A (en) |
DE (2) | DE2003715B2 (en) |
FR (2) | FR2033957A5 (en) |
GB (2) | GB1280012A (en) |
NL (2) | NL172286C (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4761553A (en) * | 1983-10-06 | 1988-08-02 | The United States Of America As Represented By The United States Department Of Energy | Gaseous leak detector |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4017403A (en) * | 1974-07-31 | 1977-04-12 | United Kingdom Atomic Energy Authority | Ion beam separators |
DE2621824C2 (en) * | 1976-05-17 | 1982-04-29 | Hitachi, Ltd., Tokyo | Microwave Discharge Ion Source |
DE3150156C2 (en) * | 1981-12-18 | 1986-04-30 | Gesellschaft für Schwerionenforschung mbH, 6100 Darmstadt | High current ion source |
US4847504A (en) * | 1983-08-15 | 1989-07-11 | Applied Materials, Inc. | Apparatus and methods for ion implantation |
EP0137649B1 (en) * | 1983-08-15 | 1989-06-21 | Applied Materials, Inc. | Apparatus and method for ion implantation |
US4578589A (en) * | 1983-08-15 | 1986-03-25 | Applied Materials, Inc. | Apparatus and methods for ion implantation |
US4855602A (en) * | 1986-06-20 | 1989-08-08 | Sharma Devendra N | Beam deflector |
GB8820359D0 (en) * | 1988-08-26 | 1988-09-28 | Atomic Energy Authority Uk | Charged particle grid |
US5262652A (en) * | 1991-05-14 | 1993-11-16 | Applied Materials, Inc. | Ion implantation apparatus having increased source lifetime |
US5723862A (en) * | 1996-03-04 | 1998-03-03 | Forman; Leon | Mass spectrometer utilizing high energy product density permanent magnets |
US6452338B1 (en) | 1999-12-13 | 2002-09-17 | Semequip, Inc. | Electron beam ion source with integral low-temperature vaporizer |
NL1021848C2 (en) | 2002-11-06 | 2004-05-07 | Nedap Nv | Security system based on standard euro cylinder. |
EP1830385A1 (en) * | 2006-03-01 | 2007-09-05 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Ion beam apparatus and method for aligning same |
WO2010018639A1 (en) * | 2008-08-15 | 2010-02-18 | 株式会社シンクロン | Deposition apparatus and method for manufacturing thin-film device |
-
1969
- 1969-02-05 GB GB6289/69A patent/GB1280012A/en not_active Expired
- 1969-02-05 GB GB6288/69A patent/GB1280011A/en not_active Expired
-
1970
- 1970-01-19 US US3958A patent/US3705320A/en not_active Expired - Lifetime
- 1970-01-28 DE DE2003715A patent/DE2003715B2/en not_active Ceased
- 1970-01-29 DE DE19702003970 patent/DE2003970A1/en active Pending
- 1970-01-30 NL NLAANVRAGE7001398,A patent/NL172286C/en not_active IP Right Cessation
- 1970-01-30 NL NL7001397A patent/NL7001397A/xx unknown
- 1970-02-04 FR FR7003967A patent/FR2033957A5/fr not_active Expired
- 1970-02-04 FR FR7003968A patent/FR2033958A5/fr not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4761553A (en) * | 1983-10-06 | 1988-08-02 | The United States Of America As Represented By The United States Department Of Energy | Gaseous leak detector |
Also Published As
Publication number | Publication date |
---|---|
NL7001398A (en) | 1970-08-07 |
DE2003715B2 (en) | 1980-11-06 |
DE2003970A1 (en) | 1970-08-20 |
NL7001397A (en) | 1970-08-07 |
FR2033957A5 (en) | 1970-12-04 |
GB1280012A (en) | 1972-07-05 |
NL172286C (en) | 1983-08-01 |
FR2033958A5 (en) | 1970-12-04 |
US3705320A (en) | 1972-12-05 |
DE2003715A1 (en) | 1970-09-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PCNP | Patent ceased through non-payment of renewal fee |