NL7001397A - - Google Patents
Info
- Publication number
- NL7001397A NL7001397A NL7001397A NL7001397A NL7001397A NL 7001397 A NL7001397 A NL 7001397A NL 7001397 A NL7001397 A NL 7001397A NL 7001397 A NL7001397 A NL 7001397A NL 7001397 A NL7001397 A NL 7001397A
- Authority
- NL
- Netherlands
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D59/00—Separation of different isotopes of the same chemical element
- B01D59/44—Separation by mass spectrography
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/12—Ion sources; Ion guns using an arc discharge, e.g. of the duoplasmatron type
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electron Sources, Ion Sources (AREA)
- Particle Accelerators (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB6288/69A GB1280011A (en) | 1969-02-05 | 1969-02-05 | Improvements in or relating to ion beam separators |
| GB6289/69A GB1280012A (en) | 1969-02-05 | 1969-02-05 | Improvements in or relating to ion beam sources |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7001397A true NL7001397A (xx) | 1970-08-07 |
Family
ID=26240578
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NLAANVRAGE7001398,A NL172286C (nl) | 1969-02-05 | 1970-01-30 | Ionenbundelbron bestemd voor een elektromagnetische separator. |
| NL7001397A NL7001397A (xx) | 1969-02-05 | 1970-01-30 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NLAANVRAGE7001398,A NL172286C (nl) | 1969-02-05 | 1970-01-30 | Ionenbundelbron bestemd voor een elektromagnetische separator. |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3705320A (xx) |
| DE (2) | DE2003715B2 (xx) |
| FR (2) | FR2033957A5 (xx) |
| GB (2) | GB1280012A (xx) |
| NL (2) | NL172286C (xx) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4017403A (en) * | 1974-07-31 | 1977-04-12 | United Kingdom Atomic Energy Authority | Ion beam separators |
| DE2621824C2 (de) * | 1976-05-17 | 1982-04-29 | Hitachi, Ltd., Tokyo | Mikrowellen-Entladungs-Ionenquelle |
| DE3150156C2 (de) * | 1981-12-18 | 1986-04-30 | Gesellschaft für Schwerionenforschung mbH, 6100 Darmstadt | Hochstrom-Ionenquelle |
| US4847504A (en) * | 1983-08-15 | 1989-07-11 | Applied Materials, Inc. | Apparatus and methods for ion implantation |
| DE3480449D1 (de) * | 1983-08-15 | 1989-12-14 | Applied Materials Inc | Apparatus for ion implantation |
| US4578589A (en) * | 1983-08-15 | 1986-03-25 | Applied Materials, Inc. | Apparatus and methods for ion implantation |
| US4761553A (en) * | 1983-10-06 | 1988-08-02 | The United States Of America As Represented By The United States Department Of Energy | Gaseous leak detector |
| US4855602A (en) * | 1986-06-20 | 1989-08-08 | Sharma Devendra N | Beam deflector |
| GB8820359D0 (en) * | 1988-08-26 | 1988-09-28 | Atomic Energy Authority Uk | Charged particle grid |
| US5262652A (en) * | 1991-05-14 | 1993-11-16 | Applied Materials, Inc. | Ion implantation apparatus having increased source lifetime |
| US5723862A (en) * | 1996-03-04 | 1998-03-03 | Forman; Leon | Mass spectrometer utilizing high energy product density permanent magnets |
| US6452338B1 (en) | 1999-12-13 | 2002-09-17 | Semequip, Inc. | Electron beam ion source with integral low-temperature vaporizer |
| NL1021848C2 (nl) | 2002-11-06 | 2004-05-07 | Nedap Nv | Beveiligingssysteem gebaseerd op standaard eurocilinder. |
| EP1830385A1 (en) * | 2006-03-01 | 2007-09-05 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Ion beam apparatus and method for aligning same |
| JPWO2010018639A1 (ja) * | 2008-08-15 | 2012-01-26 | 株式会社シンクロン | 蒸着装置及び薄膜デバイスの製造方法 |
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1969
- 1969-02-05 GB GB6289/69A patent/GB1280012A/en not_active Expired
- 1969-02-05 GB GB6288/69A patent/GB1280011A/en not_active Expired
-
1970
- 1970-01-19 US US3958A patent/US3705320A/en not_active Expired - Lifetime
- 1970-01-28 DE DE2003715A patent/DE2003715B2/de not_active Ceased
- 1970-01-29 DE DE19702003970 patent/DE2003970A1/de active Pending
- 1970-01-30 NL NLAANVRAGE7001398,A patent/NL172286C/xx not_active IP Right Cessation
- 1970-01-30 NL NL7001397A patent/NL7001397A/xx unknown
- 1970-02-04 FR FR7003967A patent/FR2033957A5/fr not_active Expired
- 1970-02-04 FR FR7003968A patent/FR2033958A5/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2003970A1 (de) | 1970-08-20 |
| DE2003715B2 (de) | 1980-11-06 |
| FR2033957A5 (xx) | 1970-12-04 |
| GB1280012A (en) | 1972-07-05 |
| US3705320A (en) | 1972-12-05 |
| FR2033958A5 (xx) | 1970-12-04 |
| NL172286C (nl) | 1983-08-01 |
| DE2003715A1 (de) | 1970-09-03 |
| NL7001398A (xx) | 1970-08-07 |
| GB1280011A (en) | 1972-07-05 |