DE3480449D1 - Apparatus for ion implantation - Google Patents
Apparatus for ion implantationInfo
- Publication number
- DE3480449D1 DE3480449D1 DE8484305547T DE3480449T DE3480449D1 DE 3480449 D1 DE3480449 D1 DE 3480449D1 DE 8484305547 T DE8484305547 T DE 8484305547T DE 3480449 T DE3480449 T DE 3480449T DE 3480449 D1 DE3480449 D1 DE 3480449D1
- Authority
- DE
- Germany
- Prior art keywords
- ion implantation
- implantation
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/022—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/028—Negative ion sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/08—Ion sources; Ion guns using arc discharge
- H01J27/14—Other arc discharge ion sources using an applied magnetic field
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US52346383A | 1983-08-15 | 1983-08-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3480449D1 true DE3480449D1 (de) | 1989-12-14 |
Family
ID=24085124
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8484305543T Expired - Lifetime DE3484334D1 (de) | 1983-08-15 | 1984-08-15 | Vorrichtung und verfahren zur ionenimplantation. |
DE8484305547T Expired DE3480449D1 (de) | 1983-08-15 | 1984-08-15 | Apparatus for ion implantation |
DE8484305545T Expired DE3478775D1 (en) | 1983-08-15 | 1984-08-15 | Apparatus and method for ion implantation |
DE8484305544T Expired - Lifetime DE3483552D1 (de) | 1983-08-15 | 1984-08-15 | System und methode zur ionenimplantation. |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8484305543T Expired - Lifetime DE3484334D1 (de) | 1983-08-15 | 1984-08-15 | Vorrichtung und verfahren zur ionenimplantation. |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8484305545T Expired DE3478775D1 (en) | 1983-08-15 | 1984-08-15 | Apparatus and method for ion implantation |
DE8484305544T Expired - Lifetime DE3483552D1 (de) | 1983-08-15 | 1984-08-15 | System und methode zur ionenimplantation. |
Country Status (3)
Country | Link |
---|---|
EP (5) | EP0139377B1 (de) |
JP (5) | JPH0727766B2 (de) |
DE (4) | DE3484334D1 (de) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4587432A (en) * | 1984-08-03 | 1986-05-06 | Applied Materials, Inc. | Apparatus for ion implantation |
JPS61107643A (ja) * | 1984-10-30 | 1986-05-26 | Hitachi Ltd | 蒸発炉付イオン源 |
GB8522976D0 (en) * | 1985-09-17 | 1985-10-23 | Atomic Energy Authority Uk | Ion sources |
JPH0656746B2 (ja) * | 1986-04-02 | 1994-07-27 | 株式会社日立製作所 | イオン打込装置用イオン源 |
JPH0722008B2 (ja) * | 1986-04-04 | 1995-03-08 | 理化学研究所 | 電子ビ−ム源 |
GB2191334A (en) * | 1986-06-05 | 1987-12-09 | Boc Group Plc | Mass spectrometer |
NL8601492A (nl) * | 1986-06-10 | 1988-01-04 | Boc Group Plc | Verbeteringen bij massaspectrometers. |
JP2635028B2 (ja) * | 1986-10-24 | 1997-07-30 | 株式会社日立製作所 | マイクロ波イオン源 |
GB2233124B (en) * | 1989-06-06 | 1994-02-09 | Mitsubishi Electric Corp | Ion implantation apparatus |
JP2648642B2 (ja) * | 1990-04-17 | 1997-09-03 | アプライド マテリアルズ インコーポレイテッド | 巾広ビームでイオンインプランテーションを行なう方法及び装置 |
US5206516A (en) * | 1991-04-29 | 1993-04-27 | International Business Machines Corporation | Low energy, steered ion beam deposition system having high current at low pressure |
US5196706A (en) * | 1991-07-30 | 1993-03-23 | International Business Machines Corporation | Extractor and deceleration lens for ion beam deposition apparatus |
GB9210887D0 (en) * | 1992-05-21 | 1992-07-08 | Superion Ltd | Resolving slit assembly and method of ion implantation |
GB2298083B (en) * | 1995-02-18 | 1998-11-18 | Atomic Energy Authority Uk | Parallel ion beam ion generator |
GB9515090D0 (en) * | 1995-07-21 | 1995-09-20 | Applied Materials Inc | An ion beam apparatus |
US7118996B1 (en) | 1996-05-15 | 2006-10-10 | Semiconductor Energy Laboratory Co., Ltd. | Apparatus and method for doping |
JP4593548B2 (ja) * | 1996-05-15 | 2010-12-08 | 株式会社半導体エネルギー研究所 | ドーピング処理装置 |
US6060715A (en) * | 1997-10-31 | 2000-05-09 | Applied Materials, Inc. | Method and apparatus for ion beam scanning in an ion implanter |
DE69923979T2 (de) * | 1999-06-23 | 2006-02-23 | Applied Materials, Inc., Santa Clara | Vorrichtung zur erzeugung von ionenstrahlen |
US6635880B1 (en) * | 1999-10-05 | 2003-10-21 | Varian Semiconductor Equipment Associates, Inc. | High transmission, low energy beamline architecture for ion implanter |
GB2386247B (en) * | 2002-01-11 | 2005-09-07 | Applied Materials Inc | Ion beam generator |
US7145157B2 (en) * | 2003-09-11 | 2006-12-05 | Applied Materials, Inc. | Kinematic ion implanter electrode mounting |
JP4954465B2 (ja) * | 2004-11-30 | 2012-06-13 | 株式会社Sen | イオンビーム/荷電粒子ビーム照射装置 |
US8314009B2 (en) | 2007-09-14 | 2012-11-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing SOI substrate and method for manufacturing semiconductor device |
US7915597B2 (en) * | 2008-03-18 | 2011-03-29 | Axcelis Technologies, Inc. | Extraction electrode system for high current ion implanter |
KR100978793B1 (ko) * | 2008-11-19 | 2010-08-30 | 한국원자력연구원 | 다중 전극을 이용한 저에너지·대전류·대면적 빔 제조 장치 및 수송 장치 |
NL2010760C2 (en) * | 2013-05-03 | 2014-11-04 | Mapper Lithography Ip Bv | Beam grid layout. |
US9318302B1 (en) * | 2015-03-31 | 2016-04-19 | Axcelis Technologies, Inc. | Integrated extraction electrode manipulator for ion source |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3122631A (en) * | 1960-02-05 | 1964-02-25 | Atlas Werke Ag | Apparatus for focusing a line type ion beam on a mass spectrometer analyzer |
DE1578167A1 (de) * | 1967-07-26 | 1972-02-17 | Karlsruhe Augsburg Iweka | Treibspiegel-Geschoss |
GB1280011A (en) * | 1969-02-05 | 1972-07-05 | Atomic Energy Authority Uk | Improvements in or relating to ion beam separators |
FR2061809A5 (de) * | 1969-04-04 | 1971-06-25 | Commissariat Energie Atomique | |
US3767952A (en) * | 1972-10-24 | 1973-10-23 | Ca Atomic Energy Ltd | Ion source with reduced emittance |
JPS509898A (de) * | 1973-06-04 | 1975-01-31 | ||
DE2362723C3 (de) * | 1973-12-17 | 1982-02-18 | Gesellschaft für Schwerionenforschung mbH, 6100 Darmstadt | Ionenquelle zur Erzeugung einfach und/oder mehrfach geladener Ionen |
US4017403A (en) * | 1974-07-31 | 1977-04-12 | United Kingdom Atomic Energy Authority | Ion beam separators |
GB1518282A (en) * | 1974-07-31 | 1978-07-19 | Atomic Energy Authority Uk | Ion beam separators |
US3999097A (en) * | 1975-06-30 | 1976-12-21 | International Business Machines Corporation | Ion implantation apparatus utilizing multiple aperture source plate and single aperture accel-decel system |
JPS5214582A (en) * | 1975-07-24 | 1977-02-03 | Hitachi Zosen Corp | Reactor having a fixed layer of catalyst |
US4139772A (en) * | 1977-08-08 | 1979-02-13 | Western Electric Co., Inc. | Plasma discharge ion source |
JPS5457859A (en) * | 1977-10-17 | 1979-05-10 | Hitachi Ltd | Ion source |
US4149084A (en) * | 1977-11-01 | 1979-04-10 | International Business Machines Corporation | Apparatus for maintaining ion bombardment beam under improved vacuum condition |
US4146810A (en) * | 1977-12-29 | 1979-03-27 | International Business Machines Corporation | Radiation heated acceleration |
DE2920972A1 (de) * | 1978-05-25 | 1979-11-29 | Kratos Ltd | Vorrichtung zur spektroskopie mit geladenen teilchen |
DE2855864A1 (de) * | 1978-12-22 | 1980-07-10 | Ibm Deutschland | Ionenquelle, insbesondere fuer ionenimplantationsanlagen |
JPS5852297B2 (ja) * | 1979-06-04 | 1983-11-21 | 株式会社日立製作所 | マイクロ波イオン源 |
JPS57130358A (en) * | 1981-02-05 | 1982-08-12 | Nippon Telegr & Teleph Corp <Ntt> | Full automatic ion implantation device |
JPS57182864U (de) * | 1981-05-18 | 1982-11-19 | ||
US4385946A (en) * | 1981-06-19 | 1983-05-31 | Bell Telephone Laboratories, Incorporated | Rapid alteration of ion implant dopant species to create regions of opposite conductivity |
JPS5821949U (ja) * | 1981-08-04 | 1983-02-10 | 日新ハイボルテ−ジ株式会社 | イオン源装置 |
DE3278486D1 (en) * | 1981-12-07 | 1988-06-16 | Vg Instr Group | Improvements in or relating to multiple collector mass spectrometers |
DE3150156C2 (de) * | 1981-12-18 | 1986-04-30 | Gesellschaft für Schwerionenforschung mbH, 6100 Darmstadt | Hochstrom-Ionenquelle |
US4421988A (en) * | 1982-02-18 | 1983-12-20 | Varian Associates, Inc. | Beam scanning method and apparatus for ion implantation |
JPS5923432A (ja) * | 1982-07-30 | 1984-02-06 | Hitachi Ltd | プラズマイオン源 |
-
1984
- 1984-08-15 DE DE8484305543T patent/DE3484334D1/de not_active Expired - Lifetime
- 1984-08-15 EP EP19840305543 patent/EP0139377B1/de not_active Expired
- 1984-08-15 DE DE8484305547T patent/DE3480449D1/de not_active Expired
- 1984-08-15 EP EP19840305544 patent/EP0135366B1/de not_active Expired
- 1984-08-15 DE DE8484305545T patent/DE3478775D1/de not_active Expired
- 1984-08-15 JP JP59170335A patent/JPH0727766B2/ja not_active Expired - Fee Related
- 1984-08-15 JP JP17033684A patent/JPH0719560B2/ja not_active Expired - Fee Related
- 1984-08-15 EP EP19840305545 patent/EP0137649B1/de not_active Expired
- 1984-08-15 JP JP59170338A patent/JPS60107246A/ja active Granted
- 1984-08-15 DE DE8484305544T patent/DE3483552D1/de not_active Expired - Lifetime
- 1984-08-15 JP JP59170334A patent/JPH0746593B2/ja not_active Expired - Lifetime
- 1984-08-15 EP EP19840305547 patent/EP0145120B1/de not_active Expired
- 1984-08-15 EP EP84305546A patent/EP0145119A1/de not_active Withdrawn
- 1984-08-15 JP JP59170337A patent/JPH0736323B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS60105156A (ja) | 1985-06-10 |
EP0137649A1 (de) | 1985-04-17 |
EP0135366A1 (de) | 1985-03-27 |
EP0145119A1 (de) | 1985-06-19 |
DE3484334D1 (de) | 1991-05-02 |
JPH0736323B2 (ja) | 1995-04-19 |
EP0139377A1 (de) | 1985-05-02 |
DE3478775D1 (en) | 1989-07-27 |
EP0137649B1 (de) | 1989-06-21 |
JPS60105153A (ja) | 1985-06-10 |
EP0145120A1 (de) | 1985-06-19 |
JPS60105155A (ja) | 1985-06-10 |
JPH0531259B2 (de) | 1993-05-12 |
JPH0719560B2 (ja) | 1995-03-06 |
JPH0727766B2 (ja) | 1995-03-29 |
DE3483552D1 (de) | 1990-12-13 |
JPS60105154A (ja) | 1985-06-10 |
JPS60107246A (ja) | 1985-06-12 |
EP0135366B1 (de) | 1990-11-07 |
EP0145120B1 (de) | 1989-11-08 |
JPH0746593B2 (ja) | 1995-05-17 |
EP0139377B1 (de) | 1991-03-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |