FR2033958A5 - - Google Patents

Info

Publication number
FR2033958A5
FR2033958A5 FR7003968A FR7003968A FR2033958A5 FR 2033958 A5 FR2033958 A5 FR 2033958A5 FR 7003968 A FR7003968 A FR 7003968A FR 7003968 A FR7003968 A FR 7003968A FR 2033958 A5 FR2033958 A5 FR 2033958A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7003968A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Atomic Energy Authority
Original Assignee
UK Atomic Energy Authority
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Atomic Energy Authority filed Critical UK Atomic Energy Authority
Application granted granted Critical
Publication of FR2033958A5 publication Critical patent/FR2033958A5/fr
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D59/00—Separation of different isotopes of the same chemical element
    • B01D59/44—Separation by mass spectrography
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/12—Ion sources; Ion guns using an arc discharge, e.g. of the duoplasmatron type
FR7003968A 1969-02-05 1970-02-04 Expired FR2033958A5 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB6288/69A GB1280011A (en) 1969-02-05 1969-02-05 Improvements in or relating to ion beam separators
GB6289/69A GB1280012A (en) 1969-02-05 1969-02-05 Improvements in or relating to ion beam sources

Publications (1)

Publication Number Publication Date
FR2033958A5 true FR2033958A5 (en) 1970-12-04

Family

ID=26240578

Family Applications (2)

Application Number Title Priority Date Filing Date
FR7003967A Expired FR2033957A5 (en) 1969-02-05 1970-02-04
FR7003968A Expired FR2033958A5 (en) 1969-02-05 1970-02-04

Family Applications Before (1)

Application Number Title Priority Date Filing Date
FR7003967A Expired FR2033957A5 (en) 1969-02-05 1970-02-04

Country Status (5)

Country Link
US (1) US3705320A (en)
DE (2) DE2003715B2 (en)
FR (2) FR2033957A5 (en)
GB (2) GB1280012A (en)
NL (2) NL172286C (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4017403A (en) * 1974-07-31 1977-04-12 United Kingdom Atomic Energy Authority Ion beam separators
DE2621824C2 (en) * 1976-05-17 1982-04-29 Hitachi, Ltd., Tokyo Microwave Discharge Ion Source
DE3150156C2 (en) * 1981-12-18 1986-04-30 Gesellschaft für Schwerionenforschung mbH, 6100 Darmstadt High current ion source
US4847504A (en) * 1983-08-15 1989-07-11 Applied Materials, Inc. Apparatus and methods for ion implantation
DE3480449D1 (en) * 1983-08-15 1989-12-14 Applied Materials Inc APPARATUS FOR ION IMPLANTATION
US4578589A (en) * 1983-08-15 1986-03-25 Applied Materials, Inc. Apparatus and methods for ion implantation
US4761553A (en) * 1983-10-06 1988-08-02 The United States Of America As Represented By The United States Department Of Energy Gaseous leak detector
US4855602A (en) * 1986-06-20 1989-08-08 Sharma Devendra N Beam deflector
GB8820359D0 (en) * 1988-08-26 1988-09-28 Atomic Energy Authority Uk Charged particle grid
US5262652A (en) * 1991-05-14 1993-11-16 Applied Materials, Inc. Ion implantation apparatus having increased source lifetime
US5723862A (en) * 1996-03-04 1998-03-03 Forman; Leon Mass spectrometer utilizing high energy product density permanent magnets
US6452338B1 (en) 1999-12-13 2002-09-17 Semequip, Inc. Electron beam ion source with integral low-temperature vaporizer
NL1021848C2 (en) 2002-11-06 2004-05-07 Nedap Nv Security system based on standard euro cylinder.
EP1830385A1 (en) * 2006-03-01 2007-09-05 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Ion beam apparatus and method for aligning same
JPWO2010018639A1 (en) * 2008-08-15 2012-01-26 株式会社シンクロン Vapor deposition apparatus and thin film device manufacturing method

Also Published As

Publication number Publication date
DE2003970A1 (en) 1970-08-20
DE2003715B2 (en) 1980-11-06
FR2033957A5 (en) 1970-12-04
GB1280012A (en) 1972-07-05
NL7001397A (en) 1970-08-07
US3705320A (en) 1972-12-05
NL172286C (en) 1983-08-01
DE2003715A1 (en) 1970-09-03
NL7001398A (en) 1970-08-07
GB1280011A (en) 1972-07-05

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Legal Events

Date Code Title Description
ST Notification of lapse