GB1213498A - Getter-ion pump - Google Patents

Getter-ion pump

Info

Publication number
GB1213498A
GB1213498A GB06197/68A GB1619768A GB1213498A GB 1213498 A GB1213498 A GB 1213498A GB 06197/68 A GB06197/68 A GB 06197/68A GB 1619768 A GB1619768 A GB 1619768A GB 1213498 A GB1213498 A GB 1213498A
Authority
GB
United Kingdom
Prior art keywords
electrode
field
getter
april
electron emitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB06197/68A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1213498A publication Critical patent/GB1213498A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Tubes For Measurement (AREA)
  • Particle Accelerators (AREA)

Abstract

1,213,498. Ion pumps. PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd. 4 April, 1968 [7 April, 1967], No. 16197/68. Heading H1D. In a getter-ion pump in which ionization is effected by secondary electrons oscillating under the influence of a high-frequency electric field applied between a secondary-electron emitting electrode 2 and a grid electrode 4, the amplitude and frequency of the field are such that the emitted secondary electrons return to the secondary-electron emitting electrode after one whole cycle of the field and the ions produced are accelerated by a D.C. field to an inner electrode 8, e.g. of titanium, where sputtering takes place. The sputtered material is collected on the radial strips 11 of a further electrode 10. Electrode 10 is cooled by liquid nitrogen 14. The operating pressure is 10<SP>-4</SP> Torr. Specific voltages and dimensions are given.
GB06197/68A 1967-04-07 1968-04-04 Getter-ion pump Expired GB1213498A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR101911A FR1525369A (en) 1967-04-07 1967-04-07 Ion pump and gas ionization device usable in particular in this pump

Publications (1)

Publication Number Publication Date
GB1213498A true GB1213498A (en) 1970-11-25

Family

ID=8628392

Family Applications (1)

Application Number Title Priority Date Filing Date
GB06197/68A Expired GB1213498A (en) 1967-04-07 1968-04-04 Getter-ion pump

Country Status (6)

Country Link
US (2) US3532917A (en)
CH (2) CH469348A (en)
DE (1) DE1764099A1 (en)
FR (1) FR1525369A (en)
GB (1) GB1213498A (en)
NL (1) NL6804402A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1255439B (en) * 1992-07-17 1995-10-31 Getters Spa NON-EVAPORABLE GETTER PUMP
DE102009042417B4 (en) * 2009-07-16 2011-11-24 Vacom Steuerungsbau Und Service Gmbh Orbitron-ion getter

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA729786A (en) * 1966-03-08 N.V. Philips Gloeilampenfabrieken Ion pump
US3236442A (en) * 1964-01-20 1966-02-22 Morris Associates Ionic vacuum pump
US3424936A (en) * 1965-02-10 1969-01-28 Nippon Electric Co Metal sleeve ionization gauge having controlled spacing between grid and shield electrodes for optimization of sensitivity

Also Published As

Publication number Publication date
US3532917A (en) 1970-10-06
NL6804402A (en) 1968-10-08
USB353291I5 (en)
DE1764099A1 (en) 1971-04-15
FR1525369A (en) 1968-05-17
CH473474A (en) 1969-05-31
CH469348A (en) 1969-02-28

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees