CH473474A - Method for generating a vacuum by means of a getter ion pump and getter ion pump for carrying out the method - Google Patents
Method for generating a vacuum by means of a getter ion pump and getter ion pump for carrying out the methodInfo
- Publication number
- CH473474A CH473474A CH497868A CH497868A CH473474A CH 473474 A CH473474 A CH 473474A CH 497868 A CH497868 A CH 497868A CH 497868 A CH497868 A CH 497868A CH 473474 A CH473474 A CH 473474A
- Authority
- CH
- Switzerland
- Prior art keywords
- ion pump
- getter ion
- vacuum
- generating
- carrying
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Tubes For Measurement (AREA)
- Particle Accelerators (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR101911A FR1525369A (en) | 1967-04-07 | 1967-04-07 | Ion pump and gas ionization device usable in particular in this pump |
Publications (1)
Publication Number | Publication Date |
---|---|
CH473474A true CH473474A (en) | 1969-05-31 |
Family
ID=8628392
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH497868A CH473474A (en) | 1967-04-07 | 1968-04-04 | Method for generating a vacuum by means of a getter ion pump and getter ion pump for carrying out the method |
CH497968A CH469348A (en) | 1967-04-07 | 1968-04-04 | Ion source |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH497968A CH469348A (en) | 1967-04-07 | 1968-04-04 | Ion source |
Country Status (6)
Country | Link |
---|---|
US (2) | US3532917A (en) |
CH (2) | CH473474A (en) |
DE (1) | DE1764099A1 (en) |
FR (1) | FR1525369A (en) |
GB (1) | GB1213498A (en) |
NL (1) | NL6804402A (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1255439B (en) * | 1992-07-17 | 1995-10-31 | Getters Spa | NON-EVAPORABLE GETTER PUMP |
DE102009042417B4 (en) * | 2009-07-16 | 2011-11-24 | Vacom Steuerungsbau Und Service Gmbh | Orbitron-ion getter |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA729786A (en) * | 1966-03-08 | N.V. Philips Gloeilampenfabrieken | Ion pump | |
US3236442A (en) * | 1964-01-20 | 1966-02-22 | Morris Associates | Ionic vacuum pump |
US3424936A (en) * | 1965-02-10 | 1969-01-28 | Nippon Electric Co | Metal sleeve ionization gauge having controlled spacing between grid and shield electrodes for optimization of sensitivity |
-
0
- US US353291D patent/USB353291I5/en active Pending
-
1967
- 1967-04-07 FR FR101911A patent/FR1525369A/en not_active Expired
-
1968
- 1968-03-28 NL NL6804402A patent/NL6804402A/xx unknown
- 1968-04-02 DE DE19681764099 patent/DE1764099A1/en active Pending
- 1968-04-02 US US718048A patent/US3532917A/en not_active Expired - Lifetime
- 1968-04-04 CH CH497868A patent/CH473474A/en not_active IP Right Cessation
- 1968-04-04 GB GB06197/68A patent/GB1213498A/en not_active Expired
- 1968-04-04 CH CH497968A patent/CH469348A/en unknown
Also Published As
Publication number | Publication date |
---|---|
CH469348A (en) | 1969-02-28 |
USB353291I5 (en) | |
US3532917A (en) | 1970-10-06 |
FR1525369A (en) | 1968-05-17 |
GB1213498A (en) | 1970-11-25 |
NL6804402A (en) | 1968-10-08 |
DE1764099A1 (en) | 1971-04-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |