CH473474A - Method for generating a vacuum by means of a getter ion pump and getter ion pump for carrying out the method - Google Patents

Method for generating a vacuum by means of a getter ion pump and getter ion pump for carrying out the method

Info

Publication number
CH473474A
CH473474A CH497868A CH497868A CH473474A CH 473474 A CH473474 A CH 473474A CH 497868 A CH497868 A CH 497868A CH 497868 A CH497868 A CH 497868A CH 473474 A CH473474 A CH 473474A
Authority
CH
Switzerland
Prior art keywords
ion pump
getter ion
vacuum
generating
carrying
Prior art date
Application number
CH497868A
Other languages
German (de)
Inventor
Evrard Robert
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of CH473474A publication Critical patent/CH473474A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
CH497868A 1967-04-07 1968-04-04 Method for generating a vacuum by means of a getter ion pump and getter ion pump for carrying out the method CH473474A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR101911A FR1525369A (en) 1967-04-07 1967-04-07 Ion pump and gas ionization device usable in particular in this pump

Publications (1)

Publication Number Publication Date
CH473474A true CH473474A (en) 1969-05-31

Family

ID=8628392

Family Applications (2)

Application Number Title Priority Date Filing Date
CH497968A CH469348A (en) 1967-04-07 1968-04-04 Ion source
CH497868A CH473474A (en) 1967-04-07 1968-04-04 Method for generating a vacuum by means of a getter ion pump and getter ion pump for carrying out the method

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CH497968A CH469348A (en) 1967-04-07 1968-04-04 Ion source

Country Status (6)

Country Link
US (2) US3532917A (en)
CH (2) CH469348A (en)
DE (1) DE1764099A1 (en)
FR (1) FR1525369A (en)
GB (1) GB1213498A (en)
NL (1) NL6804402A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1255439B (en) * 1992-07-17 1995-10-31 Getters Spa NON-EVAPORABLE GETTER PUMP
DE102009042417B4 (en) * 2009-07-16 2011-11-24 Vacom Steuerungsbau Und Service Gmbh Orbitron-ion getter

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA729786A (en) * 1966-03-08 N.V. Philips Gloeilampenfabrieken Ion pump
US3236442A (en) * 1964-01-20 1966-02-22 Morris Associates Ionic vacuum pump
US3424936A (en) * 1965-02-10 1969-01-28 Nippon Electric Co Metal sleeve ionization gauge having controlled spacing between grid and shield electrodes for optimization of sensitivity

Also Published As

Publication number Publication date
FR1525369A (en) 1968-05-17
US3532917A (en) 1970-10-06
DE1764099A1 (en) 1971-04-15
GB1213498A (en) 1970-11-25
CH469348A (en) 1969-02-28
NL6804402A (en) 1968-10-08
USB353291I5 (en)

Similar Documents

Publication Publication Date Title
CH469923A (en) Process for forming a laminate ring
AT334806B (en) DEVICE FOR GENERATING AN AIRPOROUS MORTAR
CH482266A (en) Process for generating an intense neutron flux
CH519588A (en) Process for processing a workpiece by means of a glow discharge and apparatus for performing the process
AT291951B (en) Process for the dehydrogenation of a saturated hydrocarbon
CH459074A (en) Method of anchoring an object in the ground
AT279635B (en) Process for the preparation of glycidyl ethers
ATA991171A (en) DEVICE FOR PLUGGING THE TUBE HOLE OF A MANHOLE POT
CH440480A (en) Process for generating a plasma
AT284582B (en) Device for vaporizing a substance for covering substrates
AT271654B (en) Method for facilitating the ignition of a high-performance plasma generator
AT277923B (en) Method of making a pile fabric
AT269733B (en) Method of making a self-sealing container
CH473474A (en) Method for generating a vacuum by means of a getter ion pump and getter ion pump for carrying out the method
CH457300A (en) Method for sealing a structure
AT282839B (en) Process for the separation of a mixture of the diastereoisomers of zearalanol
CH507311A (en) Process for the production or isolation of a plasminogen activator
CH459147A (en) Method for evaporating a solvent from a solution and means for carrying out the method
CH544476A (en) Method for activating a reactive material by means of an electric arc discharge and device for carrying out the method
CH418576A (en) Process for creating a structure and intermediate layer for carrying out the process
CH419428A (en) Device for generating or maintaining a vacuum in a room
CH488372A (en) Device for deflecting a beam of charged particles
CH536879A (en) Device for electrolytic etching of a workpiece
CH509934A (en) Device for vertical lifting of a component
CH480570A (en) Device for the vacuum-tight closing of a vessel

Legal Events

Date Code Title Description
PL Patent ceased