GB1352654A - Ion source which makes use of a microwave resonant cavity - Google Patents

Ion source which makes use of a microwave resonant cavity

Info

Publication number
GB1352654A
GB1352654A GB3521172A GB3521172A GB1352654A GB 1352654 A GB1352654 A GB 1352654A GB 3521172 A GB3521172 A GB 3521172A GB 3521172 A GB3521172 A GB 3521172A GB 1352654 A GB1352654 A GB 1352654A
Authority
GB
United Kingdom
Prior art keywords
cylinder
ion source
july
magnetic field
soft iron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3521172A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of GB1352654A publication Critical patent/GB1352654A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Plasma Technology (AREA)

Abstract

1352654 lon sources COMMISSARIAT A L'ENERGIE ATOMIQUE 27 July 1972 [29 July 1971] 35211/72 Heading H1D An ion source comprises a resonant microwave cavity 50 energized by microwaves through an antenna 9 and influenced by a static magnetic field from coils 19, 20 such that electron cyclotron resonance is obtained in the cavity. Gas admitted through opening 13 is ionized in a dielectric cylinder 14 and the ions are extracted through an expansion cup electrode 17 having an aperture 41, and thence to extraction electrodes 18. Electrode 17 is of soft iron to shield the extraction system from the magnetic field. In Fig. 6, not shown, the dielectric cylinder 14 is replaced by a soft iron cylinder (23) which is a continuation of the gas inlet pipe and is also part of a magnetic yoke carrying coils (32, 33). The cylinder (23) terminates adjacent aperture 41.
GB3521172A 1971-07-29 1972-07-27 Ion source which makes use of a microwave resonant cavity Expired GB1352654A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7127812A FR2147497A5 (en) 1971-07-29 1971-07-29

Publications (1)

Publication Number Publication Date
GB1352654A true GB1352654A (en) 1974-05-08

Family

ID=9081130

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3521172A Expired GB1352654A (en) 1971-07-29 1972-07-27 Ion source which makes use of a microwave resonant cavity

Country Status (4)

Country Link
US (1) US3778656A (en)
DE (2) DE2237252A1 (en)
FR (1) FR2147497A5 (en)
GB (1) GB1352654A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3144016A1 (en) * 1980-11-05 1982-07-08 Mitsubishi Denki K.K., Tokyo PLASMA TREATMENT APPARATUS
WO2009048739A2 (en) 2007-10-10 2009-04-16 Mks Instruments, Inc. Chemical ionization reaction or proton transfer reaction mass spectrometry with a quadrupole or time-of-flight mass spectrometer

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2621824C2 (en) * 1976-05-17 1982-04-29 Hitachi, Ltd., Tokyo Microwave Discharge Ion Source
US4185213A (en) * 1977-08-31 1980-01-22 Reynolds Metals Company Gaseous electrode for MHD generator
JPS55131175A (en) * 1979-03-30 1980-10-11 Toshiba Corp Surface treatment apparatus with microwave plasma
US4240007A (en) * 1979-06-29 1980-12-16 International Business Machines Corporation Microchannel ion gun
US4393333A (en) * 1979-12-10 1983-07-12 Hitachi, Ltd. Microwave plasma ion source
FR2475798A1 (en) * 1980-02-13 1981-08-14 Commissariat Energie Atomique METHOD AND DEVICE FOR PRODUCING HIGHLY CHARGED HEAVY IONS AND AN APPLICATION USING THE METHOD
JPS5947421B2 (en) * 1980-03-24 1984-11-19 株式会社日立製作所 microwave ion source
CA1159012A (en) * 1980-05-02 1983-12-20 Seitaro Matsuo Plasma deposition apparatus
JPS6043620B2 (en) * 1982-11-25 1985-09-28 日新ハイボルテージ株式会社 microwave ion source
US4507588A (en) * 1983-02-28 1985-03-26 Board Of Trustees Operating Michigan State University Ion generating apparatus and method for the use thereof
FR2546358B1 (en) * 1983-05-20 1985-07-05 Commissariat Energie Atomique ION SOURCE WITH ELECTRON CYCLOTRON RESONANCE
FR2572847B1 (en) * 1984-11-06 1986-12-26 Commissariat Energie Atomique METHOD AND DEVICE FOR IGNITION OF A MICROWAVE ION SOURCE
US4649278A (en) * 1985-05-02 1987-03-10 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Generation of intense negative ion beams
DE3703207A1 (en) * 1987-02-04 1988-08-18 Loet Und Schweissgeraete Gmbh High-frequency (radio-frequency) ion source
DE3712971A1 (en) * 1987-04-16 1988-11-03 Plasonic Oberflaechentechnik G Method and device for producing (generating) a plasma
US4778561A (en) * 1987-10-30 1988-10-18 Veeco Instruments, Inc. Electron cyclotron resonance plasma source
DE3738352A1 (en) * 1987-11-11 1989-05-24 Technics Plasma Gmbh FILAMENTLESS MAGNETRON ION BEAM SYSTEM
DE3803355A1 (en) * 1988-02-05 1989-08-17 Leybold Ag PARTICLE SOURCE FOR A REACTIVE ION BEAM OR PLASMA POSITIONING PLANT
US5053678A (en) * 1988-03-16 1991-10-01 Hitachi, Ltd. Microwave ion source
DE3834984A1 (en) * 1988-10-14 1990-04-19 Leybold Ag DEVICE FOR GENERATING ELECTRICALLY CHARGED AND / OR UNCHARGED PARTICLES
GB9224745D0 (en) * 1992-11-26 1993-01-13 Atomic Energy Authority Uk Microwave plasma generator
DE19513345C2 (en) * 1995-04-08 2000-08-03 Ehret Hans P ECR ion source
DE19600223A1 (en) * 1996-01-05 1997-07-17 Ralf Dr Dipl Phys Spitzl Device for generating plasmas using microwaves
DE19608949A1 (en) * 1996-03-08 1997-09-11 Ralf Dr Spitzl Device for generating powerful microwave plasmas
DE19757852C2 (en) * 1997-12-24 2001-06-28 Karlsruhe Forschzent Device and method for doping vascular supports with radioactive and non-radioactive atoms
DE19900437B4 (en) * 1999-01-11 2009-04-23 Ehret, Hans-P. Method and device for ion implantation in solids and / or for coating solid surfaces and the use of methods and apparatus
US7461502B2 (en) * 2003-03-20 2008-12-09 Elwing Llc Spacecraft thruster
ATE335928T1 (en) * 2003-03-20 2006-09-15 Elwing Llc PROPULSION SYSTEM FOR SPACE VEHICLES
EP2295797B1 (en) * 2004-09-22 2013-01-23 Elwing LLC Spacecraft thruster
NL2014415B1 (en) * 2015-03-06 2016-10-13 Jiaco Instr Holding B V System and method for decapsulation of plastic integrated circuit packages.
CN106102301B (en) * 2016-07-29 2019-01-29 中国原子能科学研究院 It can high voltage bearing electrostatic deflection plates in compact superconduction bevatron
ES2696227B2 (en) * 2018-07-10 2019-06-12 Centro De Investig Energeticas Medioambientales Y Tecnologicas Ciemat INTERNAL ION SOURCE FOR LOW EROSION CYCLONES

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3418206A (en) * 1963-04-29 1968-12-24 Boeing Co Particle accelerator

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3144016A1 (en) * 1980-11-05 1982-07-08 Mitsubishi Denki K.K., Tokyo PLASMA TREATMENT APPARATUS
WO2009048739A2 (en) 2007-10-10 2009-04-16 Mks Instruments, Inc. Chemical ionization reaction or proton transfer reaction mass spectrometry with a quadrupole or time-of-flight mass spectrometer
EP2212903B1 (en) * 2007-10-10 2014-08-27 MKS Instruments, Inc. Chemical ionization reaction or proton transfer reaction mass spectrometry with a quadrupole or time-of-flight mass spectrometer

Also Published As

Publication number Publication date
US3778656A (en) 1973-12-11
DE2237252A1 (en) 1973-02-01
DE7228091U (en) 1973-09-20
FR2147497A5 (en) 1973-03-09

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
435 Patent endorsed 'licences of right' on the date specified (sect. 35/1949)
PCNP Patent ceased through non-payment of renewal fee