FR1312798A - Ion getter pump and method of operation - Google Patents

Ion getter pump and method of operation

Info

Publication number
FR1312798A
FR1312798A FR886043A FR886043A FR1312798A FR 1312798 A FR1312798 A FR 1312798A FR 886043 A FR886043 A FR 886043A FR 886043 A FR886043 A FR 886043A FR 1312798 A FR1312798 A FR 1312798A
Authority
FR
France
Prior art keywords
getter pump
ion getter
ion
pump
getter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR886043A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Application granted granted Critical
Publication of FR1312798A publication Critical patent/FR1312798A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/366—Aluminium nitride
FR886043A 1961-01-27 1962-01-26 Ion getter pump and method of operation Expired FR1312798A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US85355A US3149774A (en) 1961-01-27 1961-01-27 Getter ion pump method and apparatus

Publications (1)

Publication Number Publication Date
FR1312798A true FR1312798A (en) 1962-12-21

Family

ID=22191061

Family Applications (1)

Application Number Title Priority Date Filing Date
FR886043A Expired FR1312798A (en) 1961-01-27 1962-01-26 Ion getter pump and method of operation

Country Status (4)

Country Link
US (1) US3149774A (en)
DE (1) DE1414572B2 (en)
FR (1) FR1312798A (en)
GB (1) GB958423A (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3381890A (en) * 1964-12-30 1968-05-07 Nihon Shinku Gijitsu Kabushiki Vacuum apparatus
GB1095383A (en) * 1965-02-19
US3364370A (en) * 1966-08-17 1968-01-16 Rca Corp Tubular cell anode for sputter ion pumps
US3486213A (en) * 1968-08-27 1969-12-30 Norton Co Method of making or repairing a getter vacuum pump
US5655886A (en) * 1995-06-06 1997-08-12 Color Planar Displays, Inc. Vacuum maintenance device for high vacuum chambers
US20070286738A1 (en) * 2006-06-12 2007-12-13 Varian, Inc. Vacuum ion-getter pump with cryogenically cooled cathode
US8066433B2 (en) 2008-03-14 2011-11-29 Pro-Mart Industries, Inc. Valve for vacuum storage bag

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2103362A (en) * 1933-06-13 1937-12-28 Rca Corp Ultrahigh frequency magnetron oscillator
US2498841A (en) * 1945-06-01 1950-02-28 King L D Percival Ion source
GB797232A (en) * 1955-07-11 1958-06-25 Manfred Von Ardenne Improvements in or relating to high vacuum ion pumps
US2993638A (en) * 1957-07-24 1961-07-25 Varian Associates Electrical vacuum pump apparatus and method
NL131436C (en) * 1957-07-24

Also Published As

Publication number Publication date
DE1414572B2 (en) 1971-07-29
DE1414572A1 (en) 1968-10-03
GB958423A (en) 1964-05-21
US3149774A (en) 1964-09-22

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