EP0352688A1 - Pompe à vide - Google Patents
Pompe à vide Download PDFInfo
- Publication number
- EP0352688A1 EP0352688A1 EP89113558A EP89113558A EP0352688A1 EP 0352688 A1 EP0352688 A1 EP 0352688A1 EP 89113558 A EP89113558 A EP 89113558A EP 89113558 A EP89113558 A EP 89113558A EP 0352688 A1 EP0352688 A1 EP 0352688A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- zone
- stator
- pump
- rotor
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/5806—Cooling the drive system
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2260/00—Function
- F05D2260/60—Fluid transfer
- F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles
Definitions
- the present invention relates to a vacuum pump, of the molecular or turbomolecular type.
- molecular and turbomolecular pumps must not suck up certain gases, because these can condense on the walls at low temperature, and because of the compression exerted by the pump.
- This liquid or solid condensate can cause deterioration, blockage and seizure of the pump.
- the cause of this condensation is that current pumps are cooled to eliminate the thermal power dissipated by the electric drive motor, and the thermal power developed by the compression of the gas. Consequently, the temperature of the internal walls of the pump are close to ambient temperature, and greatly promotes condensation.
- An object of the present invention is to provide a vacuum pump provided with means to eliminate any risk of condensation.
- the subject of the present invention is a pump of the molecular or turbomocular type comprising a stator and a rotor driven in rotation by a motor, the stator comprising a first zone, situated at the right of the rotor where the gas suction takes place and a second zone, in the vicinity of the drive motor, cooled by a circulation of fluid, characterized in that the first zone is provided with a heating means to maintain the temperature of said zone above the condensation threshold of the aspirated gas, the first and second zones being separated by a thermal impedance element.
- said heating means is a heating collar enclosing at least part of the first zone of the stator.
- said thermal impedance element is a ring or washer made of a material chosen from stainless steel, ceramic or a synthetic material.
- the single figure is a schematic view, partially cut axially, of a molecular pump according to the invention.
- reference 1 designates the suction port of the pump.
- the latter comprises a stator 2 and a rotor 3.
- the latter is integral with a shaft 4 and rotates on ball bearings 5 and 6.
- the shaft is rotated by an electric motor 7.
- the calorific power dissipated by the pump is evacuated by a circulation of water 8.
- the gas sucked in 1 is compressed, from the top of the figure downwards, by the helical section groove 9 of decreasing section, then continues its compression from the bottom to the top of the figure in another groove 10 of decreasing section.
- the discharge takes place downwards through a pipe 11.
- the pump is provided with means for maintaining, at a temperature above the condensation temperature of the aspirated gas, the part of the stotor in contact with the gas.
- a heating collar 12 in contact with the stator on at least one part situated in line with the suction grooves.
- the rest of the pump is kept at low temperature by the circulation of water.
- This element introduces a thermal barrier between the two parts of the stator and prevents the immediate dissipation by the circulation of water of the calories provided by the heating element.
- the thermal impedance element is for example a ring or washer made of stainless steel, or ceramic or synthetic material.
- the thermal impedance element 13 will maintain, between the two parts of the stator, a temperature difference ⁇ ⁇ equal to P / c, if P denotes the power of the heating element 12 and c the conductance of element 12.
- a thermal impedance element having a conductance of 1 watt / ° C associated with a 40 watt heating element, will make it possible to obtain a temperature difference close to 40 degrees C.
- the nature, shape and material of the heating element will be adjusted according to the desired temperature difference, taking into account the nature of the gas to be pumped and the value of the heating element.
- the invention applies to all pumps of molecular or turbomocular type, in particular in their applications in the chemical industry and in the semiconductor industry.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Electrophonic Musical Instruments (AREA)
Abstract
Description
- La présente invention concerne une pompe à vide, du type moléculaire ou turbomoléculaire.
- Actuellement, les pompes moléculaires et turbomoléculaires, ne doivent pas aspirer certains gaz, car ceux-ci peuvent se condenser sur les parois à basse température, et à cause de la compression exercée par la pompe. Ces condensats liquides ou solides peuvent provoquer la détérioration, l'obstruction et le grippage de la pompe. La cause de cette condensation est que les pompes actuelles sont refroidies pour éliminer la puissance thermique dissipée par le moteur électrique d'entraînement, et la puissance thermique développée par la compression du gaz. En conséquence la température des parois internes de la pompe sont voisines de la température ambiante, et favorise largement la condensation.
- Un but de la presente invention est de réaliser une pompe à vide munie de moyens pour éliminer tout risque de condensation.
- La présente invention a pour objet une pompe du type moléculaire ou turbomoculaire comprenant un stator et un rotor entraîné en rotation par un moteur, le stator comprenant une première zone, située au droit du rotor où s'effectue l'aspiration des gaz et une seconde zone, au voisinage du moteur d'entraînement, refroidie par une circulation de fluide, caractérisée en ce que la première zone est munie d'un moyen de chauffage pour maintenir la température de ladite zone au-dessus du seuil de condensation du gaz aspiré, la première et la seconde zone étant séparés par un élément d'impédance thermique.
- Avantageusement, ledit moyen de chauffage est un collier chauffant enserrant au moins une partie de la première zone du stator.
- De préférence, ledit élément d'impédance thermique est un anneau ou rondelle réalisé dans un matériau choisi parmi l'acier inoxydable, la céramique ou une matière synthétique.
- L'invention sera bien comprise par la description donnée ci-après d'une pompe à vide conforme à l'invention, qui n'est bien entendu qu'un exemple illustratif et nullement limitatif.
- Dans le dessin, la figure unique est une vue schématique, partiellement coupée axialement, d'une pompe moléculaire conforme à l'invention.
- Dans la figure, la référence 1 désigne l'orifice d'aspiration de la pompe. Cette dernière comprend un stator 2 et un rotor 3. Ce dernier est solidaire d'un arbre 4 et tourne sur des roulements à billes 5 et 6. L'arbre est entraîné en rotation par un moteur électrique 7.
- La puissance calorifique dissipée par la pompe est évacuée par une circulation d'eau 8.
- Le gaz aspiré en 1 est comprimé, du haut de la figure vers le bas, par la rainure de section hélicoïdale 9 de section décroissante, puis continue sa compression du bas vers le haut de la figure dans une autre rainure 10 de section décroissante. Le refoulement s'effectue vers le bas par une canalisation 11.
- Conformément à l'invention, la pompe est munie de moyens pour maintenir, à une température supérieure à la température de condensation du gaz aspiré, la partie du stotor en contact avec le gaz. Pour parvenir à ce résultat, on peut utiliser, comme le montre la figure, un collier chauffant 12 en contact avec le stator sur au moins une partie située au droit des rainures d'aspiration.
- Le reste de la pompe est maintenue à température basse par la circulation d'eau.
- Par ailleurs, on dispose entre la partie du stator maintenue à basse température (côté moteur) et la partie du stator chauffée (côté rainures de compression), un élément 13 d'impédance thermique.
- Cet élément introduit une barrière thermique entre les deux parties du stator et empêche la dissipation immédiate par la circulation d'eau des calories apportées par l'élément chauffant.
- L'élément d'impédance thermique est par exemple un anneau ou rondelle en acier inoxydable, ou en céramique ou en matière synthétique.
- L'élément d'impédance thermique 13 permettra de maintenir, entre les deux parties du stator, un écart de température Δ ϑ égal à P/c, si P désigne la puissance de l'élément chauffant 12 et c la conductance de l'élément 12.
- A titre d'exemple, un élément d'impédance thermique, ayant une conductance de 1 watt/°C associé à un élément chauffant de 40 watts, permettra d'obtenir un écart de température voisin de 40 degrés C.
- On ajustera la nature, la forme et le matériau de l'élément chauffant en fonction de l'écart de température souhaité compte tenu de la nature du gaz à pomper et de la valeur de l'élément chauffant.
- L'invention s'applique à toutes pompes de type moléculaire ou turbomoculaire, en particulier dans leurs applications dans le domaine de l'industrie chimique et celle des semi-conducteurs.
Claims (3)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8810120 | 1988-07-27 | ||
FR8810120A FR2634829B1 (fr) | 1988-07-27 | 1988-07-27 | Pompe a vide |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0352688A1 true EP0352688A1 (fr) | 1990-01-31 |
EP0352688B1 EP0352688B1 (fr) | 1995-07-05 |
Family
ID=9368828
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP89113558A Expired - Lifetime EP0352688B1 (fr) | 1988-07-27 | 1989-07-24 | Pompe à vide |
Country Status (7)
Country | Link |
---|---|
US (1) | US4929151A (fr) |
EP (1) | EP0352688B1 (fr) |
JP (1) | JPH0772558B2 (fr) |
AT (1) | ATE124757T1 (fr) |
DE (1) | DE68923330T2 (fr) |
ES (1) | ES2074063T3 (fr) |
FR (1) | FR2634829B1 (fr) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0530462A1 (fr) * | 1991-09-06 | 1993-03-10 | Leybold Aktiengesellschaft | Pompe à vide à friction |
WO1995026471A1 (fr) * | 1994-03-29 | 1995-10-05 | Leybold Aktiengesellschaft | Systeme comprenant une pompe a vide, un appareil de mesure, ainsi que des dispositifs d'alimentation, de commande, d'exploitation et d'affichage |
EP0694699A1 (fr) * | 1994-07-28 | 1996-01-31 | Ebara Corporation | Dispositif de pompe à vide |
EP0855517A2 (fr) * | 1997-01-24 | 1998-07-29 | Pfeiffer Vacuum GmbH | Pompe à vide |
WO2000060241A1 (fr) * | 1999-04-03 | 2000-10-12 | Leybold Vakuum Gmbh | Fixation d'un rotor sur une pompe a vide a friction |
EP1653086A1 (fr) * | 2003-08-08 | 2006-05-03 | BOC Edwards Japan Limited | Pompe a vide |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03222895A (ja) * | 1990-01-26 | 1991-10-01 | Hitachi Koki Co Ltd | ねじ溝真空ポンプ |
KR950007378B1 (ko) * | 1990-04-06 | 1995-07-10 | 가부시끼 가이샤 히다찌 세이사꾸쇼 | 진공펌프 |
JP2928615B2 (ja) * | 1990-09-28 | 1999-08-03 | 株式会社日立製作所 | ターボ真空ポンプ |
DE59305085D1 (de) * | 1992-06-19 | 1997-02-20 | Leybold Ag | Gasreibungsvakuumpumpe |
JPH0612794U (ja) * | 1992-07-13 | 1994-02-18 | 株式会社大阪真空機器製作所 | 複合型真空ポンプの加熱装置 |
DE19508566A1 (de) * | 1995-03-10 | 1996-09-12 | Balzers Pfeiffer Gmbh | Molekularvakuumpumpe mit Kühlgaseinrichtung und Verfahren zu deren Betrieb |
JP3125207B2 (ja) * | 1995-07-07 | 2001-01-15 | 東京エレクトロン株式会社 | 真空処理装置 |
US6926493B1 (en) | 1997-06-27 | 2005-08-09 | Ebara Corporation | Turbo-molecular pump |
JP3038432B2 (ja) * | 1998-07-21 | 2000-05-08 | セイコー精機株式会社 | 真空ポンプ及び真空装置 |
KR100724048B1 (ko) * | 1999-02-19 | 2007-06-04 | 가부시키가이샤 에바라 세이사꾸쇼 | 터보 분자 펌프 |
FR2810375B1 (fr) * | 2000-06-15 | 2002-11-29 | Cit Alcatel | Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide |
DE10107341A1 (de) * | 2001-02-16 | 2002-08-29 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE10142567A1 (de) * | 2001-08-30 | 2003-03-20 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpe |
JP2003269369A (ja) * | 2002-03-13 | 2003-09-25 | Boc Edwards Technologies Ltd | 真空ポンプ |
GB0525517D0 (en) * | 2005-12-15 | 2006-01-25 | Boc Group Plc | Apparatus for detecting a flammable atmosphere |
JP6077804B2 (ja) * | 2012-09-06 | 2017-02-08 | エドワーズ株式会社 | 固定側部材及び真空ポンプ |
JP6287475B2 (ja) * | 2014-03-28 | 2018-03-07 | 株式会社島津製作所 | 真空ポンプ |
JP7015106B2 (ja) * | 2016-08-30 | 2022-02-02 | エドワーズ株式会社 | 真空ポンプ、および真空ポンプに備わる回転円筒体 |
GB201715151D0 (en) * | 2017-09-20 | 2017-11-01 | Edwards Ltd | A drag pump and a set of vacuum pumps including a drag pump |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR81075E (fr) * | 1962-01-23 | 1963-07-26 | Snecma | Pompe à vide turbomoléculaire perfectionnée |
DE1935603A1 (de) * | 1969-07-14 | 1971-01-28 | Demag Ag | Gehaeuse fuer einen beheizbaren Turboverdichter |
EP0197238A2 (fr) * | 1985-03-09 | 1986-10-15 | Leybold Aktiengesellschaft | Enveloppe pour une pompe à vide turbomoléculaire |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1304689A (fr) * | 1961-08-04 | 1962-09-28 | Snecma | Pompe à vide turbomoléculaire perfectionnée |
SU533757A1 (ru) * | 1973-04-05 | 1976-10-30 | Предприятие П/Я А-3634 | Турбомолекул рный вакуумный насос |
SU881372A1 (ru) * | 1980-04-11 | 1981-11-15 | Предприятие П/Я А-3634 | Турбомолекул рный вакуумный насос |
DE3216404C2 (de) * | 1982-05-03 | 1984-05-03 | Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar | Heizung für eine Turbo-Molekularpumpe |
JPS5965592A (ja) * | 1982-10-06 | 1984-04-13 | Hitachi Ltd | タ−ボ分子ポンプ |
JPS5946394A (ja) * | 1983-07-13 | 1984-03-15 | Hitachi Ltd | タ−ボ分子ポンプ |
DE3410905A1 (de) * | 1984-03-24 | 1985-10-03 | Leybold-Heraeus GmbH, 5000 Köln | Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken |
JPS60230599A (ja) * | 1984-04-30 | 1985-11-16 | Shimadzu Corp | タ−ボ分子ポンプ |
JPH0455276Y2 (fr) * | 1986-05-16 | 1992-12-25 | ||
SU1418495A1 (ru) * | 1986-12-10 | 1988-08-23 | МВТУ им.Н.Э.Баумана | Турбомолекул рный вакуумный насос |
US4804313A (en) * | 1987-03-24 | 1989-02-14 | Colt Industries Inc | Side channel self priming fuel pump having reservoir |
JPS63255594A (ja) * | 1987-04-13 | 1988-10-21 | Ebara Corp | タ−ボ分子ポンプ |
JPS6463698A (en) * | 1987-09-02 | 1989-03-09 | Hitachi Ltd | Turbo vacuum pump |
-
1988
- 1988-07-27 FR FR8810120A patent/FR2634829B1/fr not_active Expired - Fee Related
-
1989
- 1989-06-21 US US07/369,401 patent/US4929151A/en not_active Expired - Lifetime
- 1989-07-20 JP JP1188697A patent/JPH0772558B2/ja not_active Expired - Fee Related
- 1989-07-24 EP EP89113558A patent/EP0352688B1/fr not_active Expired - Lifetime
- 1989-07-24 ES ES89113558T patent/ES2074063T3/es not_active Expired - Lifetime
- 1989-07-24 DE DE68923330T patent/DE68923330T2/de not_active Expired - Fee Related
- 1989-07-24 AT AT89113558T patent/ATE124757T1/de not_active IP Right Cessation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR81075E (fr) * | 1962-01-23 | 1963-07-26 | Snecma | Pompe à vide turbomoléculaire perfectionnée |
DE1935603A1 (de) * | 1969-07-14 | 1971-01-28 | Demag Ag | Gehaeuse fuer einen beheizbaren Turboverdichter |
EP0197238A2 (fr) * | 1985-03-09 | 1986-10-15 | Leybold Aktiengesellschaft | Enveloppe pour une pompe à vide turbomoléculaire |
Non-Patent Citations (1)
Title |
---|
SOVIET INVENTIONS ILLUSTRATED,Section M,semaine E39,10 Novembre 1982. Derwent Publications Ltd. Londres GB.*classe Q, page 56,no M8488E/39 & SU-A-881 372 (TUZANKIN YU M) 25 Novembre 1981 * |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0530462A1 (fr) * | 1991-09-06 | 1993-03-10 | Leybold Aktiengesellschaft | Pompe à vide à friction |
WO1995026471A1 (fr) * | 1994-03-29 | 1995-10-05 | Leybold Aktiengesellschaft | Systeme comprenant une pompe a vide, un appareil de mesure, ainsi que des dispositifs d'alimentation, de commande, d'exploitation et d'affichage |
EP0694699A1 (fr) * | 1994-07-28 | 1996-01-31 | Ebara Corporation | Dispositif de pompe à vide |
US5618167A (en) * | 1994-07-28 | 1997-04-08 | Ebara Corporation | Vacuum pump apparatus having peltier elements for cooling the motor & bearing housing and heating the outer housing |
DE19702456B4 (de) * | 1997-01-24 | 2006-01-19 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
EP0855517A2 (fr) * | 1997-01-24 | 1998-07-29 | Pfeiffer Vacuum GmbH | Pompe à vide |
EP0855517A3 (fr) * | 1997-01-24 | 1999-07-07 | Pfeiffer Vacuum GmbH | Pompe à vide |
WO2000060241A1 (fr) * | 1999-04-03 | 2000-10-12 | Leybold Vakuum Gmbh | Fixation d'un rotor sur une pompe a vide a friction |
US6599084B1 (en) | 1999-04-03 | 2003-07-29 | Leybold Vakuum Gmbh | Rotor fixture for a friction vacuum pump |
EP1653086A1 (fr) * | 2003-08-08 | 2006-05-03 | BOC Edwards Japan Limited | Pompe a vide |
EP1653086A4 (fr) * | 2003-08-08 | 2008-05-21 | Edwards Japan Ltd | Pompe a vide |
US7753661B2 (en) | 2003-08-08 | 2010-07-13 | Boc Edwards Japan Limited | Vacuum pump |
EP2228539A3 (fr) * | 2003-08-08 | 2017-05-03 | Edwards Japan Limited | Pompe à vide |
Also Published As
Publication number | Publication date |
---|---|
JPH0772558B2 (ja) | 1995-08-02 |
ES2074063T3 (es) | 1995-09-01 |
ATE124757T1 (de) | 1995-07-15 |
EP0352688B1 (fr) | 1995-07-05 |
FR2634829A1 (fr) | 1990-02-02 |
JPH0270994A (ja) | 1990-03-09 |
DE68923330T2 (de) | 1995-11-23 |
DE68923330D1 (de) | 1995-08-10 |
US4929151A (en) | 1990-05-29 |
FR2634829B1 (fr) | 1990-09-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
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