EP0352688A1 - Vakuumpumpe - Google Patents

Vakuumpumpe Download PDF

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Publication number
EP0352688A1
EP0352688A1 EP89113558A EP89113558A EP0352688A1 EP 0352688 A1 EP0352688 A1 EP 0352688A1 EP 89113558 A EP89113558 A EP 89113558A EP 89113558 A EP89113558 A EP 89113558A EP 0352688 A1 EP0352688 A1 EP 0352688A1
Authority
EP
European Patent Office
Prior art keywords
zone
stator
pump
rotor
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP89113558A
Other languages
English (en)
French (fr)
Other versions
EP0352688B1 (de
Inventor
Jacques Long
Denis Perrillat-Amede
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9368828&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0352688(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Publication of EP0352688A1 publication Critical patent/EP0352688A1/de
Application granted granted Critical
Publication of EP0352688B1 publication Critical patent/EP0352688B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5806—Cooling the drive system
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Definitions

  • the present invention relates to a vacuum pump, of the molecular or turbomolecular type.
  • molecular and turbomolecular pumps must not suck up certain gases, because these can condense on the walls at low temperature, and because of the compression exerted by the pump.
  • This liquid or solid condensate can cause deterioration, blockage and seizure of the pump.
  • the cause of this condensation is that current pumps are cooled to eliminate the thermal power dissipated by the electric drive motor, and the thermal power developed by the compression of the gas. Consequently, the temperature of the internal walls of the pump are close to ambient temperature, and greatly promotes condensation.
  • An object of the present invention is to provide a vacuum pump provided with means to eliminate any risk of condensation.
  • the subject of the present invention is a pump of the molecular or turbomocular type comprising a stator and a rotor driven in rotation by a motor, the stator comprising a first zone, situated at the right of the rotor where the gas suction takes place and a second zone, in the vicinity of the drive motor, cooled by a circulation of fluid, characterized in that the first zone is provided with a heating means to maintain the temperature of said zone above the condensation threshold of the aspirated gas, the first and second zones being separated by a thermal impedance element.
  • said heating means is a heating collar enclosing at least part of the first zone of the stator.
  • said thermal impedance element is a ring or washer made of a material chosen from stainless steel, ceramic or a synthetic material.
  • the single figure is a schematic view, partially cut axially, of a molecular pump according to the invention.
  • reference 1 designates the suction port of the pump.
  • the latter comprises a stator 2 and a rotor 3.
  • the latter is integral with a shaft 4 and rotates on ball bearings 5 and 6.
  • the shaft is rotated by an electric motor 7.
  • the calorific power dissipated by the pump is evacuated by a circulation of water 8.
  • the gas sucked in 1 is compressed, from the top of the figure downwards, by the helical section groove 9 of decreasing section, then continues its compression from the bottom to the top of the figure in another groove 10 of decreasing section.
  • the discharge takes place downwards through a pipe 11.
  • the pump is provided with means for maintaining, at a temperature above the condensation temperature of the aspirated gas, the part of the stotor in contact with the gas.
  • a heating collar 12 in contact with the stator on at least one part situated in line with the suction grooves.
  • the rest of the pump is kept at low temperature by the circulation of water.
  • This element introduces a thermal barrier between the two parts of the stator and prevents the immediate dissipation by the circulation of water of the calories provided by the heating element.
  • the thermal impedance element is for example a ring or washer made of stainless steel, or ceramic or synthetic material.
  • the thermal impedance element 13 will maintain, between the two parts of the stator, a temperature difference ⁇ ⁇ equal to P / c, if P denotes the power of the heating element 12 and c the conductance of element 12.
  • a thermal impedance element having a conductance of 1 watt / ° C associated with a 40 watt heating element, will make it possible to obtain a temperature difference close to 40 degrees C.
  • the nature, shape and material of the heating element will be adjusted according to the desired temperature difference, taking into account the nature of the gas to be pumped and the value of the heating element.
  • the invention applies to all pumps of molecular or turbomocular type, in particular in their applications in the chemical industry and in the semiconductor industry.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Electrophonic Musical Instruments (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP89113558A 1988-07-27 1989-07-24 Vakuumpumpe Expired - Lifetime EP0352688B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8810120A FR2634829B1 (fr) 1988-07-27 1988-07-27 Pompe a vide
FR8810120 1988-07-27

Publications (2)

Publication Number Publication Date
EP0352688A1 true EP0352688A1 (de) 1990-01-31
EP0352688B1 EP0352688B1 (de) 1995-07-05

Family

ID=9368828

Family Applications (1)

Application Number Title Priority Date Filing Date
EP89113558A Expired - Lifetime EP0352688B1 (de) 1988-07-27 1989-07-24 Vakuumpumpe

Country Status (7)

Country Link
US (1) US4929151A (de)
EP (1) EP0352688B1 (de)
JP (1) JPH0772558B2 (de)
AT (1) ATE124757T1 (de)
DE (1) DE68923330T2 (de)
ES (1) ES2074063T3 (de)
FR (1) FR2634829B1 (de)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0530462A1 (de) * 1991-09-06 1993-03-10 Leybold Aktiengesellschaft Reibungsvakuumpumpe
WO1995026471A1 (de) * 1994-03-29 1995-10-05 Leybold Aktiengesellschaft System mit vakuumpumpe, messgerät sowie versorgungs-, steuer-, bedienungs- und anzeigeeinrichtungen
EP0694699A1 (de) * 1994-07-28 1996-01-31 Ebara Corporation Vakuum-Pumpvorrichtung
EP0855517A2 (de) * 1997-01-24 1998-07-29 Pfeiffer Vacuum GmbH Vakuumpumpe
WO2000060241A1 (de) * 1999-04-03 2000-10-12 Leybold Vakuum Gmbh Rotorbefestigung einer reibungsvakuumpumpe
EP1653086A1 (de) * 2003-08-08 2006-05-03 BOC Edwards Japan Limited Vakuumpumpe

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
KR950007378B1 (ko) * 1990-04-06 1995-07-10 가부시끼 가이샤 히다찌 세이사꾸쇼 진공펌프
JP2928615B2 (ja) * 1990-09-28 1999-08-03 株式会社日立製作所 ターボ真空ポンプ
US5577883A (en) * 1992-06-19 1996-11-26 Leybold Aktiengesellschaft Gas friction vacuum pump having a cooling system
JPH0612794U (ja) * 1992-07-13 1994-02-18 株式会社大阪真空機器製作所 複合型真空ポンプの加熱装置
DE19508566A1 (de) * 1995-03-10 1996-09-12 Balzers Pfeiffer Gmbh Molekularvakuumpumpe mit Kühlgaseinrichtung und Verfahren zu deren Betrieb
JP3125207B2 (ja) * 1995-07-07 2001-01-15 東京エレクトロン株式会社 真空処理装置
US6926493B1 (en) 1997-06-27 2005-08-09 Ebara Corporation Turbo-molecular pump
JP3038432B2 (ja) * 1998-07-21 2000-05-08 セイコー精機株式会社 真空ポンプ及び真空装置
KR100724048B1 (ko) * 1999-02-19 2007-06-04 가부시키가이샤 에바라 세이사꾸쇼 터보 분자 펌프
FR2810375B1 (fr) * 2000-06-15 2002-11-29 Cit Alcatel Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide
DE10107341A1 (de) * 2001-02-16 2002-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE10142567A1 (de) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
JP2003269369A (ja) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ
GB0525517D0 (en) * 2005-12-15 2006-01-25 Boc Group Plc Apparatus for detecting a flammable atmosphere
JP6077804B2 (ja) * 2012-09-06 2017-02-08 エドワーズ株式会社 固定側部材及び真空ポンプ
JP6287475B2 (ja) * 2014-03-28 2018-03-07 株式会社島津製作所 真空ポンプ
JP7015106B2 (ja) * 2016-08-30 2022-02-02 エドワーズ株式会社 真空ポンプ、および真空ポンプに備わる回転円筒体
GB201715151D0 (en) * 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR81075E (fr) * 1962-01-23 1963-07-26 Snecma Pompe à vide turbomoléculaire perfectionnée
DE1935603A1 (de) * 1969-07-14 1971-01-28 Demag Ag Gehaeuse fuer einen beheizbaren Turboverdichter
EP0197238A2 (de) * 1985-03-09 1986-10-15 Leybold Aktiengesellschaft Gehäuse für eine Turbomolekularvakuumpumpe

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1304689A (fr) * 1961-08-04 1962-09-28 Snecma Pompe à vide turbomoléculaire perfectionnée
SU533757A1 (ru) * 1973-04-05 1976-10-30 Предприятие П/Я А-3634 Турбомолекул рный вакуумный насос
SU881372A1 (ru) * 1980-04-11 1981-11-15 Предприятие П/Я А-3634 Турбомолекул рный вакуумный насос
DE3216404C2 (de) * 1982-05-03 1984-05-03 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Heizung für eine Turbo-Molekularpumpe
JPS5965592A (ja) * 1982-10-06 1984-04-13 Hitachi Ltd タ−ボ分子ポンプ
JPS5946394A (ja) * 1983-07-13 1984-03-15 Hitachi Ltd タ−ボ分子ポンプ
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
JPS60230599A (ja) * 1984-04-30 1985-11-16 Shimadzu Corp タ−ボ分子ポンプ
JPH0455276Y2 (de) * 1986-05-16 1992-12-25
SU1418495A1 (ru) * 1986-12-10 1988-08-23 МВТУ им.Н.Э.Баумана Турбомолекул рный вакуумный насос
US4804313A (en) * 1987-03-24 1989-02-14 Colt Industries Inc Side channel self priming fuel pump having reservoir
JPS63255594A (ja) * 1987-04-13 1988-10-21 Ebara Corp タ−ボ分子ポンプ
JPS6463698A (en) * 1987-09-02 1989-03-09 Hitachi Ltd Turbo vacuum pump

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR81075E (fr) * 1962-01-23 1963-07-26 Snecma Pompe à vide turbomoléculaire perfectionnée
DE1935603A1 (de) * 1969-07-14 1971-01-28 Demag Ag Gehaeuse fuer einen beheizbaren Turboverdichter
EP0197238A2 (de) * 1985-03-09 1986-10-15 Leybold Aktiengesellschaft Gehäuse für eine Turbomolekularvakuumpumpe

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
SOVIET INVENTIONS ILLUSTRATED,Section M,semaine E39,10 Novembre 1982. Derwent Publications Ltd. Londres GB.*classe Q, page 56,no M8488E/39 & SU-A-881 372 (TUZANKIN YU M) 25 Novembre 1981 *

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0530462A1 (de) * 1991-09-06 1993-03-10 Leybold Aktiengesellschaft Reibungsvakuumpumpe
WO1995026471A1 (de) * 1994-03-29 1995-10-05 Leybold Aktiengesellschaft System mit vakuumpumpe, messgerät sowie versorgungs-, steuer-, bedienungs- und anzeigeeinrichtungen
EP0694699A1 (de) * 1994-07-28 1996-01-31 Ebara Corporation Vakuum-Pumpvorrichtung
US5618167A (en) * 1994-07-28 1997-04-08 Ebara Corporation Vacuum pump apparatus having peltier elements for cooling the motor & bearing housing and heating the outer housing
DE19702456B4 (de) * 1997-01-24 2006-01-19 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP0855517A2 (de) * 1997-01-24 1998-07-29 Pfeiffer Vacuum GmbH Vakuumpumpe
EP0855517A3 (de) * 1997-01-24 1999-07-07 Pfeiffer Vacuum GmbH Vakuumpumpe
WO2000060241A1 (de) * 1999-04-03 2000-10-12 Leybold Vakuum Gmbh Rotorbefestigung einer reibungsvakuumpumpe
US6599084B1 (en) 1999-04-03 2003-07-29 Leybold Vakuum Gmbh Rotor fixture for a friction vacuum pump
EP1653086A1 (de) * 2003-08-08 2006-05-03 BOC Edwards Japan Limited Vakuumpumpe
EP1653086A4 (de) * 2003-08-08 2008-05-21 Edwards Japan Ltd Vakuumpumpe
US7753661B2 (en) 2003-08-08 2010-07-13 Boc Edwards Japan Limited Vacuum pump
EP2228539A3 (de) * 2003-08-08 2017-05-03 Edwards Japan Limited Vakuumpumpe

Also Published As

Publication number Publication date
FR2634829A1 (fr) 1990-02-02
US4929151A (en) 1990-05-29
DE68923330D1 (de) 1995-08-10
DE68923330T2 (de) 1995-11-23
EP0352688B1 (de) 1995-07-05
JPH0270994A (ja) 1990-03-09
ES2074063T3 (es) 1995-09-01
JPH0772558B2 (ja) 1995-08-02
ATE124757T1 (de) 1995-07-15
FR2634829B1 (fr) 1990-09-14

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