DE68923330T2 - Vakuumpumpe. - Google Patents

Vakuumpumpe.

Info

Publication number
DE68923330T2
DE68923330T2 DE68923330T DE68923330T DE68923330T2 DE 68923330 T2 DE68923330 T2 DE 68923330T2 DE 68923330 T DE68923330 T DE 68923330T DE 68923330 T DE68923330 T DE 68923330T DE 68923330 T2 DE68923330 T2 DE 68923330T2
Authority
DE
Germany
Prior art keywords
zone
pump
vacuum pump
admitted
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68923330T
Other languages
English (en)
Other versions
DE68923330D1 (de
Inventor
Jacques Long
Denis Perrillat-Amede
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9368828&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE68923330(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Application granted granted Critical
Publication of DE68923330D1 publication Critical patent/DE68923330D1/de
Publication of DE68923330T2 publication Critical patent/DE68923330T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5806—Cooling the drive system
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Electrophonic Musical Instruments (AREA)
DE68923330T 1988-07-27 1989-07-24 Vakuumpumpe. Expired - Fee Related DE68923330T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8810120A FR2634829B1 (fr) 1988-07-27 1988-07-27 Pompe a vide

Publications (2)

Publication Number Publication Date
DE68923330D1 DE68923330D1 (de) 1995-08-10
DE68923330T2 true DE68923330T2 (de) 1995-11-23

Family

ID=9368828

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68923330T Expired - Fee Related DE68923330T2 (de) 1988-07-27 1989-07-24 Vakuumpumpe.

Country Status (7)

Country Link
US (1) US4929151A (de)
EP (1) EP0352688B1 (de)
JP (1) JPH0772558B2 (de)
AT (1) ATE124757T1 (de)
DE (1) DE68923330T2 (de)
ES (1) ES2074063T3 (de)
FR (1) FR2634829B1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19702456A1 (de) * 1997-01-24 1998-07-30 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE10107341A1 (de) * 2001-02-16 2002-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
KR950007378B1 (ko) * 1990-04-06 1995-07-10 가부시끼 가이샤 히다찌 세이사꾸쇼 진공펌프
JP2928615B2 (ja) * 1990-09-28 1999-08-03 株式会社日立製作所 ターボ真空ポンプ
DE4129673A1 (de) * 1991-09-06 1993-03-11 Leybold Ag Reibungsvakuumpumpe
DE59305085D1 (de) * 1992-06-19 1997-02-20 Leybold Ag Gasreibungsvakuumpumpe
JPH0612794U (ja) * 1992-07-13 1994-02-18 株式会社大阪真空機器製作所 複合型真空ポンプの加熱装置
DE4410903A1 (de) * 1994-03-29 1995-10-05 Leybold Ag System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen
US5618167A (en) * 1994-07-28 1997-04-08 Ebara Corporation Vacuum pump apparatus having peltier elements for cooling the motor & bearing housing and heating the outer housing
DE19508566A1 (de) * 1995-03-10 1996-09-12 Balzers Pfeiffer Gmbh Molekularvakuumpumpe mit Kühlgaseinrichtung und Verfahren zu deren Betrieb
JP3125207B2 (ja) * 1995-07-07 2001-01-15 東京エレクトロン株式会社 真空処理装置
US6926493B1 (en) 1997-06-27 2005-08-09 Ebara Corporation Turbo-molecular pump
JP3038432B2 (ja) * 1998-07-21 2000-05-08 セイコー精機株式会社 真空ポンプ及び真空装置
KR100724048B1 (ko) * 1999-02-19 2007-06-04 가부시키가이샤 에바라 세이사꾸쇼 터보 분자 펌프
DE19915307A1 (de) 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit
FR2810375B1 (fr) * 2000-06-15 2002-11-29 Cit Alcatel Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide
DE10142567A1 (de) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
JP2003269369A (ja) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ
JP4906345B2 (ja) * 2003-08-08 2012-03-28 エドワーズ株式会社 真空ポンプ
GB0525517D0 (en) * 2005-12-15 2006-01-25 Boc Group Plc Apparatus for detecting a flammable atmosphere
JP6077804B2 (ja) * 2012-09-06 2017-02-08 エドワーズ株式会社 固定側部材及び真空ポンプ
JP6287475B2 (ja) * 2014-03-28 2018-03-07 株式会社島津製作所 真空ポンプ
JP7015106B2 (ja) * 2016-08-30 2022-02-02 エドワーズ株式会社 真空ポンプ、および真空ポンプに備わる回転円筒体
GB201715151D0 (en) * 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1304689A (fr) * 1961-08-04 1962-09-28 Snecma Pompe à vide turbomoléculaire perfectionnée
FR81075E (fr) * 1962-01-23 1963-07-26 Snecma Pompe à vide turbomoléculaire perfectionnée
DE1935603A1 (de) * 1969-07-14 1971-01-28 Demag Ag Gehaeuse fuer einen beheizbaren Turboverdichter
SU533757A1 (ru) * 1973-04-05 1976-10-30 Предприятие П/Я А-3634 Турбомолекул рный вакуумный насос
SU881372A1 (ru) * 1980-04-11 1981-11-15 Предприятие П/Я А-3634 Турбомолекул рный вакуумный насос
DE3216404C2 (de) * 1982-05-03 1984-05-03 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Heizung für eine Turbo-Molekularpumpe
JPS5965592A (ja) * 1982-10-06 1984-04-13 Hitachi Ltd タ−ボ分子ポンプ
JPS5946394A (ja) * 1983-07-13 1984-03-15 Hitachi Ltd タ−ボ分子ポンプ
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
JPS60230599A (ja) * 1984-04-30 1985-11-16 Shimadzu Corp タ−ボ分子ポンプ
DE3508483A1 (de) * 1985-03-09 1986-10-23 Leybold-Heraeus GmbH, 5000 Köln Gehaeuse fuer eine turbomolekularvakuumpumpe
JPH0455276Y2 (de) * 1986-05-16 1992-12-25
SU1418495A1 (ru) * 1986-12-10 1988-08-23 МВТУ им.Н.Э.Баумана Турбомолекул рный вакуумный насос
US4804313A (en) * 1987-03-24 1989-02-14 Colt Industries Inc Side channel self priming fuel pump having reservoir
JPS63255594A (ja) * 1987-04-13 1988-10-21 Ebara Corp タ−ボ分子ポンプ
JPS6463698A (en) * 1987-09-02 1989-03-09 Hitachi Ltd Turbo vacuum pump

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19702456A1 (de) * 1997-01-24 1998-07-30 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE19702456B4 (de) * 1997-01-24 2006-01-19 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE10107341A1 (de) * 2001-02-16 2002-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe

Also Published As

Publication number Publication date
JPH0772558B2 (ja) 1995-08-02
ES2074063T3 (es) 1995-09-01
ATE124757T1 (de) 1995-07-15
EP0352688B1 (de) 1995-07-05
FR2634829A1 (fr) 1990-02-02
JPH0270994A (ja) 1990-03-09
DE68923330D1 (de) 1995-08-10
US4929151A (en) 1990-05-29
FR2634829B1 (fr) 1990-09-14
EP0352688A1 (de) 1990-01-31

Similar Documents

Publication Publication Date Title
DE68923330D1 (de) Vakuumpumpe.
DE69008683T2 (de) Kombinierte Turbomolekularpumpe mit zwei Wellen und atmosphärischem Auslass.
DE59809829D1 (de) Vakuumpumpe
DE3779295D1 (de) Gasgekuehlte elektrische maschine.
FR2637655B1 (fr) Machine rotative du type pompe a vis
SE8503636L (sv) Takflekt
KR880013517A (ko) 열풍 순환식 조리기
KR930016642A (ko) 전동연료펌프
SE8301777D0 (sv) Rotary means for multistage fans
IT1188339B (it) Dischi con pale d'alta stabilita' per pompe turbomolecolari
DE3682279D1 (de) Kuehlventilator mit durchfluss.
SE9001754D0 (sv) Pumpaggregat
DE59000825D1 (de) Kreiselpumpe zur foerderung heisser fluessigkeiten.
DE69002002T2 (de) Rotierender schraubenverdichter mit einlasskammer.
ATE42613T1 (de) Querstromventilator zum foerdern von foerdergas.
IT8819332A0 (it) Compressore centrifugo multistadio perfezionato per la deareazione di condensatori in depressione operanti su fluidi di origine geotermica.
SE8903178L (sv) Anordning foer pumpning av flytande medier
SU424994A1 (ru) ДВУХРОТОРНЫЙ ВАКУУМНЫЙ НАСОСВПТ5ФОНД эншрт0а
SE8700819D0 (sv) For torkning av styckegods avsedd anleggning
IT8619681A0 (it) Compressore centrifugo con camera principale contenente una girante e camera di testa con passaggi.
RU92002013A (ru) Импеллер
KR880010303A (ko) 고체 연료 제조용 건조장치
NO872166D0 (no) Fremgangsmaate og innretning for oekning av ytelsesfaktoren for hybride kuldemaskiner eller varmepumper.
SE9703971L (sv) Värmepumps driven turbinloop för el-produkter
SE8600089D0 (sv) Sett och anordning for att reducera friktionen mellan ett pa foretredesvis sno och is glidande fordon (lastberare) och underlaget

Legal Events

Date Code Title Description
8363 Opposition against the patent
8365 Fully valid after opposition proceedings
8339 Ceased/non-payment of the annual fee