ATE124757T1 - Vakuumpumpe. - Google Patents

Vakuumpumpe.

Info

Publication number
ATE124757T1
ATE124757T1 AT89113558T AT89113558T ATE124757T1 AT E124757 T1 ATE124757 T1 AT E124757T1 AT 89113558 T AT89113558 T AT 89113558T AT 89113558 T AT89113558 T AT 89113558T AT E124757 T1 ATE124757 T1 AT E124757T1
Authority
AT
Austria
Prior art keywords
zone
pump
vacuum pump
admitted
stator
Prior art date
Application number
AT89113558T
Other languages
English (en)
Inventor
Jacques Long
Denis Perrillat-Amede
Original Assignee
Cit Alcatel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9368828&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE124757(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Cit Alcatel filed Critical Cit Alcatel
Application granted granted Critical
Publication of ATE124757T1 publication Critical patent/ATE124757T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5806—Cooling the drive system
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Electrophonic Musical Instruments (AREA)
AT89113558T 1988-07-27 1989-07-24 Vakuumpumpe. ATE124757T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8810120A FR2634829B1 (fr) 1988-07-27 1988-07-27 Pompe a vide

Publications (1)

Publication Number Publication Date
ATE124757T1 true ATE124757T1 (de) 1995-07-15

Family

ID=9368828

Family Applications (1)

Application Number Title Priority Date Filing Date
AT89113558T ATE124757T1 (de) 1988-07-27 1989-07-24 Vakuumpumpe.

Country Status (7)

Country Link
US (1) US4929151A (de)
EP (1) EP0352688B1 (de)
JP (1) JPH0772558B2 (de)
AT (1) ATE124757T1 (de)
DE (1) DE68923330T2 (de)
ES (1) ES2074063T3 (de)
FR (1) FR2634829B1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
KR950007378B1 (ko) * 1990-04-06 1995-07-10 가부시끼 가이샤 히다찌 세이사꾸쇼 진공펌프
JP2928615B2 (ja) * 1990-09-28 1999-08-03 株式会社日立製作所 ターボ真空ポンプ
DE4129673A1 (de) * 1991-09-06 1993-03-11 Leybold Ag Reibungsvakuumpumpe
WO1994000694A1 (de) * 1992-06-19 1994-01-06 Leybold Aktiengesellschaft Gasreibungsvakuumpumpe
JPH0612794U (ja) * 1992-07-13 1994-02-18 株式会社大阪真空機器製作所 複合型真空ポンプの加熱装置
DE4410903A1 (de) * 1994-03-29 1995-10-05 Leybold Ag System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen
US5618167A (en) * 1994-07-28 1997-04-08 Ebara Corporation Vacuum pump apparatus having peltier elements for cooling the motor & bearing housing and heating the outer housing
DE19508566A1 (de) * 1995-03-10 1996-09-12 Balzers Pfeiffer Gmbh Molekularvakuumpumpe mit Kühlgaseinrichtung und Verfahren zu deren Betrieb
JP3125207B2 (ja) * 1995-07-07 2001-01-15 東京エレクトロン株式会社 真空処理装置
DE19702456B4 (de) * 1997-01-24 2006-01-19 Pfeiffer Vacuum Gmbh Vakuumpumpe
US6926493B1 (en) 1997-06-27 2005-08-09 Ebara Corporation Turbo-molecular pump
JP3038432B2 (ja) * 1998-07-21 2000-05-08 セイコー精機株式会社 真空ポンプ及び真空装置
KR100724048B1 (ko) * 1999-02-19 2007-06-04 가부시키가이샤 에바라 세이사꾸쇼 터보 분자 펌프
DE19915307A1 (de) 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit
FR2810375B1 (fr) * 2000-06-15 2002-11-29 Cit Alcatel Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide
DE10107341A1 (de) * 2001-02-16 2002-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE10142567A1 (de) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
JP2003269369A (ja) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ
WO2005015026A1 (ja) * 2003-08-08 2005-02-17 Boc Edwards Japan Limited 真空ポンプ
GB0525517D0 (en) * 2005-12-15 2006-01-25 Boc Group Plc Apparatus for detecting a flammable atmosphere
JP6077804B2 (ja) * 2012-09-06 2017-02-08 エドワーズ株式会社 固定側部材及び真空ポンプ
JP6287475B2 (ja) * 2014-03-28 2018-03-07 株式会社島津製作所 真空ポンプ
JP7015106B2 (ja) * 2016-08-30 2022-02-02 エドワーズ株式会社 真空ポンプ、および真空ポンプに備わる回転円筒体
GB201715151D0 (en) * 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR81075E (fr) * 1962-01-23 1963-07-26 Snecma Pompe à vide turbomoléculaire perfectionnée
FR1304689A (fr) * 1961-08-04 1962-09-28 Snecma Pompe à vide turbomoléculaire perfectionnée
DE1935603A1 (de) * 1969-07-14 1971-01-28 Demag Ag Gehaeuse fuer einen beheizbaren Turboverdichter
SU533757A1 (ru) * 1973-04-05 1976-10-30 Предприятие П/Я А-3634 Турбомолекул рный вакуумный насос
SU881372A1 (ru) * 1980-04-11 1981-11-15 Предприятие П/Я А-3634 Турбомолекул рный вакуумный насос
DE3216404C2 (de) * 1982-05-03 1984-05-03 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Heizung für eine Turbo-Molekularpumpe
JPS5965592A (ja) * 1982-10-06 1984-04-13 Hitachi Ltd タ−ボ分子ポンプ
JPS5946394A (ja) * 1983-07-13 1984-03-15 Hitachi Ltd タ−ボ分子ポンプ
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
JPS60230599A (ja) * 1984-04-30 1985-11-16 Shimadzu Corp タ−ボ分子ポンプ
DE3508483A1 (de) * 1985-03-09 1986-10-23 Leybold-Heraeus GmbH, 5000 Köln Gehaeuse fuer eine turbomolekularvakuumpumpe
JPH0455276Y2 (de) * 1986-05-16 1992-12-25
SU1418495A1 (ru) * 1986-12-10 1988-08-23 МВТУ им.Н.Э.Баумана Турбомолекул рный вакуумный насос
US4804313A (en) * 1987-03-24 1989-02-14 Colt Industries Inc Side channel self priming fuel pump having reservoir
JPS63255594A (ja) * 1987-04-13 1988-10-21 Ebara Corp タ−ボ分子ポンプ
JPS6463698A (en) * 1987-09-02 1989-03-09 Hitachi Ltd Turbo vacuum pump

Also Published As

Publication number Publication date
EP0352688B1 (de) 1995-07-05
JPH0772558B2 (ja) 1995-08-02
DE68923330D1 (de) 1995-08-10
JPH0270994A (ja) 1990-03-09
ES2074063T3 (es) 1995-09-01
FR2634829A1 (fr) 1990-02-02
US4929151A (en) 1990-05-29
DE68923330T2 (de) 1995-11-23
EP0352688A1 (de) 1990-01-31
FR2634829B1 (fr) 1990-09-14

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties