DE69008683D1 - Kombinierte Turbomolekularpumpe mit zwei Wellen und atmosphärischem Auslass. - Google Patents

Kombinierte Turbomolekularpumpe mit zwei Wellen und atmosphärischem Auslass.

Info

Publication number
DE69008683D1
DE69008683D1 DE69008683T DE69008683T DE69008683D1 DE 69008683 D1 DE69008683 D1 DE 69008683D1 DE 69008683 T DE69008683 T DE 69008683T DE 69008683 T DE69008683 T DE 69008683T DE 69008683 D1 DE69008683 D1 DE 69008683D1
Authority
DE
Germany
Prior art keywords
shafts
area
turbomolecular pump
stator
atmospheric outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69008683T
Other languages
English (en)
Other versions
DE69008683T2 (de
Inventor
Claude Saulgeot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Publication of DE69008683D1 publication Critical patent/DE69008683D1/de
Application granted granted Critical
Publication of DE69008683T2 publication Critical patent/DE69008683T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/024—Multi-stage pumps with contrarotating parts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/402—Plurality of electronically synchronised motors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
DE69008683T 1989-12-28 1990-12-27 Kombinierte Turbomolekularpumpe mit zwei Wellen und atmosphärischem Auslass. Expired - Fee Related DE69008683T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8917343A FR2656658B1 (fr) 1989-12-28 1989-12-28 Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.

Publications (2)

Publication Number Publication Date
DE69008683D1 true DE69008683D1 (de) 1994-06-09
DE69008683T2 DE69008683T2 (de) 1994-08-25

Family

ID=9389082

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69008683T Expired - Fee Related DE69008683T2 (de) 1989-12-28 1990-12-27 Kombinierte Turbomolekularpumpe mit zwei Wellen und atmosphärischem Auslass.

Country Status (8)

Country Link
US (1) US5118251A (de)
EP (1) EP0435291B1 (de)
JP (1) JPH04209980A (de)
AT (1) ATE105378T1 (de)
DE (1) DE69008683T2 (de)
ES (1) ES2053071T3 (de)
FR (1) FR2656658B1 (de)
RU (1) RU1776333C (de)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0691475B1 (de) * 1990-08-01 2001-12-12 Matsushita Electric Industrial Co., Ltd. Drehkolbenanlage für flüssige Medien
US5354179A (en) * 1990-08-01 1994-10-11 Matsushita Electric Industrial Co., Ltd. Fluid rotating apparatus
DE69132867T2 (de) * 1990-08-01 2002-09-12 Matsushita Electric Ind Co Ltd Drehkolbenanlage für flüssige Medien
JP3074845B2 (ja) * 1991-10-08 2000-08-07 松下電器産業株式会社 流体回転装置
JPH05195957A (ja) * 1992-01-23 1993-08-06 Matsushita Electric Ind Co Ltd 真空ポンプ
JPH05202855A (ja) * 1992-01-29 1993-08-10 Matsushita Electric Ind Co Ltd 流体回転装置
JPH05209589A (ja) * 1992-01-31 1993-08-20 Matsushita Electric Ind Co Ltd 流体回転装置
JPH05272478A (ja) * 1992-01-31 1993-10-19 Matsushita Electric Ind Co Ltd 真空ポンプ
DE9202764U1 (de) * 1992-03-02 1992-05-07 Siemens AG, 80333 München Absperrbares Gerät
KR100190310B1 (ko) * 1992-09-03 1999-06-01 모리시따 요오이찌 진공배기장치
US5267837A (en) * 1992-09-23 1993-12-07 Mowli John C Two-stage pumping apparatus with non-meshing first stage augers
DE4242406C2 (de) * 1992-12-08 2002-10-31 Grasso Gmbh Refrigeration Tech Anordnung in einem Schraubenverdichter
US5363740A (en) * 1993-07-16 1994-11-15 Pneumo Abex Corporation Fluid motor/pump with scavenged case
US5814913A (en) * 1994-04-21 1998-09-29 Ebara Corporation Multishaft electric motor and positive-displacement pump combined with such multishaft electric motor
IT1297347B1 (it) * 1997-12-24 1999-09-01 Varian Spa Pompa da vuoto.
DE19930952A1 (de) * 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
US6508631B1 (en) 1999-11-18 2003-01-21 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
DE10019066A1 (de) * 2000-04-18 2001-10-25 Leybold Vakuum Gmbh Vakuumpumpe mit zwei zusammenwirkenden Rotoren
FR2807951B1 (fr) * 2000-04-20 2003-05-16 Cit Alcatel Procede et systeme de pompage des chambres de transfert d'equipement de semi-conducteur
EP1234982B1 (de) * 2001-02-22 2003-12-03 VARIAN S.p.A. Vakuumpumpe
KR100408153B1 (ko) * 2001-08-14 2003-12-01 주식회사 우성진공 드라이 진공펌프
DE10149366A1 (de) * 2001-10-06 2003-04-17 Leybold Vakuum Gmbh Axial fördernde Reibungsvakuumpumpe
JP2003343469A (ja) * 2002-03-20 2003-12-03 Toyota Industries Corp 真空ポンプ
US6672828B2 (en) 2002-06-03 2004-01-06 Varian S.P.A. Vacuum pump
NL1022785C2 (nl) * 2003-02-26 2004-08-30 Tendris Solutions Bv Pomp of turbine, aandrijving die een dergelijke pomp of turbine omvat en buitenboordmotor.
FR2854933B1 (fr) * 2003-05-13 2005-08-05 Cit Alcatel Pompe moleculaire, turbomoleculaire ou hybride a vanne integree
US20050214108A1 (en) * 2004-03-26 2005-09-29 Edwin Hayes Multi-stage dry vacuum pump for high vacuum applications
DE102004038677B4 (de) * 2004-08-10 2016-11-24 Pfeiffer Vacuum Gmbh Vakuumpumpe
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
US8740587B2 (en) * 2005-12-22 2014-06-03 Thermo Finnigan Llc Apparatus and method for pumping in an ion optical device
DE102007012408A1 (de) * 2007-03-15 2008-09-18 Aerodyn Engineering Gmbh Windenergieanlagen mit lastübertragenden Bauteilen
DE102008024764A1 (de) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe
DE202011104491U1 (de) 2011-08-17 2012-11-20 Oerlikon Leybold Vacuum Gmbh Wälzkolbenpumpe
JP6616611B2 (ja) * 2015-07-23 2019-12-04 エドワーズ株式会社 排気システム
CN108252927A (zh) * 2017-12-11 2018-07-06 安徽颐博思泵业有限责任公司 一种卧式多级泵

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB202295A (en) * 1922-08-12 1924-06-05 Bbc Brown Boveri & Cie Improvements in multi-stage centrifugal compressors
FR1397614A (fr) * 1964-05-14 1965-04-30 Neu Sa Perfectionnement aux compresseurs
DE2833954A1 (de) * 1978-08-03 1980-02-21 Rudolf Peschke Reibungspumpe
JPS61145394A (ja) * 1984-12-18 1986-07-03 Tokuda Seisakusho Ltd 分子ポンプ
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck
JPH0784871B2 (ja) * 1986-06-12 1995-09-13 株式会社日立製作所 真空排気装置
JPS6375386A (ja) * 1986-09-18 1988-04-05 Mitsubishi Heavy Ind Ltd ハイブリツド真空ポンプ
JPH0759956B2 (ja) * 1986-09-19 1995-06-28 三菱重工業株式会社 真空ポンプ
JPS63147989A (ja) * 1986-12-09 1988-06-20 Daikin Ind Ltd 複合真空ポンプ
JPH07111195B2 (ja) * 1986-12-09 1995-11-29 ダイキン工業株式会社 複合真空ポンプ
DE3826710A1 (de) * 1987-08-07 1989-02-16 Japan Atomic Energy Res Inst Vakuumpumpe
JPH01277698A (ja) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Kk 複合型真空ポンプ

Also Published As

Publication number Publication date
RU1776333C (ru) 1992-11-15
ES2053071T3 (es) 1994-07-16
ATE105378T1 (de) 1994-05-15
FR2656658B1 (fr) 1993-01-29
JPH04209980A (ja) 1992-07-31
FR2656658A1 (fr) 1991-07-05
EP0435291B1 (de) 1994-05-04
US5118251A (en) 1992-06-02
EP0435291A1 (de) 1991-07-03
DE69008683T2 (de) 1994-08-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee