GB2221255A - Molecular vacuum pump - Google Patents

Molecular vacuum pump

Info

Publication number
GB2221255A
GB2221255A GB8917836A GB8917836A GB2221255A GB 2221255 A GB2221255 A GB 2221255A GB 8917836 A GB8917836 A GB 8917836A GB 8917836 A GB8917836 A GB 8917836A GB 2221255 A GB2221255 A GB 2221255A
Authority
GB
United Kingdom
Prior art keywords
rotor
stator
annular groove
vacuum pump
depth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB8917836A
Other versions
GB8917836D0 (en
GB2221255B (en
Inventor
Valery Borisovich Sholokhov
Konstantin Evgenievic Demikhov
Vladimir Iliich Vikhrev
Vladimir Pavlovich Sergeev
Sergei Nikolaevich Sharshin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB8917836D0 publication Critical patent/GB8917836D0/en
Publication of GB2221255A publication Critical patent/GB2221255A/en
Application granted granted Critical
Publication of GB2221255B publication Critical patent/GB2221255B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

A molecular vacuum pump comprises a hollow stator (1) in the axial opening (2) of which is mounted, with a gap, a rotor (3) the external cylindrical surface (5) of which is provided with at least one annular groove (7) and, on sections (8, 9, 10, 11, 12, 13) between the annular grooves (7), with slots (14) oriented along a screw line and having the depth gradually decreasing in the direction from the suction side to the compression side, whereas the depth of each annular groove (7) is no smaller than the minimum depth of the slots (14) of the neighboring area (8, 9, 10, 11, 12) of the rotor (3) on the suction side. The stator (1) is provided with blade disks (23) fixed to it, the number of which equals the number of the annular grooves (7). The blades (24) of the blade disks (23) are located inside the annular grooves (7) and the gaps between the surfaces of each blade disk (23) facing the surfaces of the corresponding annular groove (7), on the one hand, and said surfaces, on the other hand, are commensurable with the gap (4) between the rotor (3) and the stator (1).
GB8917836A 1988-01-05 1988-01-05 Molecular vacuum pump Expired - Lifetime GB2221255B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1988/000001 WO1989006320A1 (en) 1988-01-05 1988-01-05 Molecular vacuum pump

Publications (3)

Publication Number Publication Date
GB8917836D0 GB8917836D0 (en) 1989-11-01
GB2221255A true GB2221255A (en) 1990-01-31
GB2221255B GB2221255B (en) 1991-10-16

Family

ID=21617173

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8917836A Expired - Lifetime GB2221255B (en) 1988-01-05 1988-01-05 Molecular vacuum pump

Country Status (6)

Country Link
JP (1) JPH02502840A (en)
DE (1) DE3891201T1 (en)
FI (1) FI894157A0 (en)
FR (1) FR2630167B1 (en)
GB (1) GB2221255B (en)
WO (1) WO1989006320A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1238201B (en) * 1989-11-03 1993-07-09 Varian Spa METHOD OF MANUFACTURE BY ELECTROEROSION OF A IMPELLER OR A ROTOR TO ONE OR MORE IMPELLERS OF A TURBO PUMP, PARTICULARLY OF A TURBOMOLECULAR PUMP, AND PRODUCTS SO OBTAINED.
DE4216237A1 (en) * 1992-05-16 1993-11-18 Leybold Ag Gas friction vacuum pump
DE19846188A1 (en) 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Friction vacuum pump with stator and rotor
DE19937392A1 (en) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Friction vacuum pump with active pump elements

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2244370A5 (en) * 1973-09-14 1975-04-11 Cit Alcatel
DE2255618C2 (en) * 1971-11-16 1982-12-23 Compagnie Industrielle Des Telecommunications Cit-Alcatel S.A., 75008 Paris Molecular vacuum pump
EP0081890B1 (en) * 1981-12-14 1985-10-09 Ultra-Centrifuge Nederland N.V. High-vacuum molecular pump
DE3613344A1 (en) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik TURBOMOLECULAR VACUUM PUMP FOR HIGHER PRESSURE

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1626621A (en) * 1925-08-28 1927-05-03 Middendorf George Compressor for refrigerators or the like
FR1293546A (en) * 1961-02-09 1962-05-18 Alsacienne Constr Meca Improvements to rotary molecular pumps
JPS6341695A (en) * 1986-08-07 1988-02-22 Seiko Seiki Co Ltd Turbo-molecular pump

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2255618C2 (en) * 1971-11-16 1982-12-23 Compagnie Industrielle Des Telecommunications Cit-Alcatel S.A., 75008 Paris Molecular vacuum pump
FR2244370A5 (en) * 1973-09-14 1975-04-11 Cit Alcatel
EP0081890B1 (en) * 1981-12-14 1985-10-09 Ultra-Centrifuge Nederland N.V. High-vacuum molecular pump
DE3613344A1 (en) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik TURBOMOLECULAR VACUUM PUMP FOR HIGHER PRESSURE

Also Published As

Publication number Publication date
GB8917836D0 (en) 1989-11-01
WO1989006320A1 (en) 1989-07-13
DE3891201T1 (en) 1990-01-11
JPH02502840A (en) 1990-09-06
FR2630167B1 (en) 1990-08-31
FI894157A0 (en) 1989-09-04
GB2221255B (en) 1991-10-16
FR2630167A1 (en) 1989-10-20

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19940105