EP0435291A1 - Kombinierte Turbomolekularpumpe mit zwei Wellen und atmosphärischem Auslass - Google Patents

Kombinierte Turbomolekularpumpe mit zwei Wellen und atmosphärischem Auslass Download PDF

Info

Publication number
EP0435291A1
EP0435291A1 EP90125589A EP90125589A EP0435291A1 EP 0435291 A1 EP0435291 A1 EP 0435291A1 EP 90125589 A EP90125589 A EP 90125589A EP 90125589 A EP90125589 A EP 90125589A EP 0435291 A1 EP0435291 A1 EP 0435291A1
Authority
EP
European Patent Office
Prior art keywords
zone
stator
axis
axes
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP90125589A
Other languages
English (en)
French (fr)
Other versions
EP0435291B1 (de
Inventor
Claude Saulgeot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Priority to AT9090125589T priority Critical patent/ATE105378T1/de
Publication of EP0435291A1 publication Critical patent/EP0435291A1/de
Application granted granted Critical
Publication of EP0435291B1 publication Critical patent/EP0435291B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/024—Multi-stage pumps with contrarotating parts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/402—Plurality of electronically synchronised motors

Definitions

  • a pumping unit comprising a primary pump delivering to the atmosphere and a secondary pump delivering at the suction pressure of the primary pump.
  • the pressure of the enclosure, in which said process is carried out may not be as low but reach a few mbar but where it is necessary to extract, while maintaining this pressure, a certain flow of process gas, or at this pressure the primary pumps have a very low flow and therefore a pumping group is also used comprising a secondary pump and a primary pump.
  • Each pump, primary and secondary has its own drive motor.
  • the present invention aims to provide a unique pumping assembly and a single drive motor capable of delivering to the atmosphere and reaching very high vacuum limits up to 10 ⁇ 10 mbar.
  • the subject of the invention is therefore a pump making it possible to reach a molecular vacuum, comprising a stator and a rotor assembly comprising two rotors, with parallel axes, rotating in opposite directions, the stator comprising a suction inlet and a discharge outlet , characterized in that it divides into a first zone situated on the suction side, followed by a second zone, said first zone being of the turbo-molecular type with two rotors, said second zone being of the type with two pistons rotary or screw, with two parallel axes, one of the axes being driven by a motor and the other by means of transmission means.
  • each axis comprises, in the pump zone of the turbomolecular type, a series of fin discs, the distance separating the two axes corresponding approximately to the radial length of a fin plus the diameter of the hub which carries it, the discs of one axis being offset axially with respect to the discs of the other axis, the stator being provided, downstream of each rotor disc of the two rotors, of a diaphragm with stator fins, so that each diaphragm which succeeds a disc carried by one axis is in the same plane as a rotor disc carried by the other axis, said diaphragm being interrupted on a sector corresponding to the rotor space common to the two stators, located between the two axes.
  • FIG. 1 schematically represents a molecular vacuum pump according to the invention.
  • FIG. 2 is a diagram illustrating the circulation of the fluid from one stage to another in the high pressure zone of the pump.
  • Figure 3 is a variant of Figure 1 where the high pressure part of the pump is of another type.
  • Figure 4 shows the pump of Figure 1 or 3 seen at the end from the low pressure side.
  • Figure 5 shows a finned rotor disc and a finned stator diaphragm in their respective positions.
  • a molecular vacuum pump which comprises a stator 1 with a suction inlet 2 and a discharge outlet 3. Inside the stator is located a rotor assembly with two rotors with two axes 4 and 5 parallel and rotating in opposite directions.
  • the axis 4 is rotated by a drive motor 20 comprising a stator 6 and a rotor 7 integral with the axis 4.
  • the axis 5 is rotated in opposite directions by a gear comprising two pinions 8 and 9 .
  • the pump is divided into two zones: a first zone A located on the suction side and a second zone B which follows zone A.
  • Zone A plays the role of secondary pump and is of the turbomolecular type and zone B plays the role of primary pump and is of the Roots type.
  • zone B of the pump is of the screw type while the zone A is identical to that of FIG. 1.
  • zone B of the Roots pump type, comprises three stages 10, 11, 12 separated by partitions 13, 14.
  • Each Roots stage is entirely conventional and of course comprises two rotary pistons 15 and 16.
  • the axes 4, 5 carry sealing labyrinths of the dynamic joint type 17.
  • Bearings 18 mounted in walls end of zone B support the assembly of the two rotors.
  • the suction in the first stage 10, after the discharge of the turbomolecular pump, is done by an internal conduit 19 and the discharge at the outlet of the third and last stage 12 by a conduit 21 leading to the discharge orifice 3.
  • the passage from the first stage 10 to the second stage 11 and from the second stage 11 to the third stage 12 is done respectively by internal conduits 22 and 23.
  • FIG. 2 is a diagram which illustrates two stages 10 and 11 of zone B.
  • the synchronization gear constituted by the pinions 8, 9 is for example a dry gear. Otherwise, the gear chamber 24 is isolated from the motor 20 and the last stage 12 by seals.
  • zone B is constituted by a screw pump also with three stages 10, 11, 12. Each stage, comprises two screw rotors 25 and 26, the inlet and outlet being here axial.
  • Zone A is identical in the two figures 1 and 3.
  • the pump is of the turbomolecular type with vanes with two rotors consisting of vanes 27 for the first rotor on axis 4 and vanes 28 for the second rotor on axis 5.
  • the discs 27 and 28 are axially offset, because the distance between the two axes 4 and 5 does not allow them to be placed in the same plane. In fact, this distance corresponds to approximately the radial length of a fin of a disc more than the value of the diameter of the hub on which these fins are.
  • stator 1 Downstream of each disc 27 or 28, the stator 1 is provided with a stator diaphragm, 29 on the side of the axis 4 and 30 on the side of the axis 5, these diaphragms carry fins.
  • Each diaphragm 29 is located in the same plane as a disc rotor 28 and each diaphragm 30 is located in the same plane as a rotor disc 27.
  • These diaphragms 29 and 30 do not form complete discs but are interrupted by the value of a sector corresponding to the rotor space common to the two stators in the part located between axes 4 and 5 as can be seen in FIG. 5.
  • the ends of the fins of the diaphragms 29 and 30 are integral with a ring 31 (32 for the diaphragms 30) allowing their fixing in the stator 1 .
  • a molecular pump is thus obtained capable of reaching very high secondary voids and driving back into the atmosphere, having only one drive motor and making it possible to have large flow rates in a small footprint, the flow rate being close flow which would be given by two identical pumps, but all of which would of course have a much larger volume.
EP90125589A 1989-12-28 1990-12-27 Kombinierte Turbomolekularpumpe mit zwei Wellen und atmosphärischem Auslass Expired - Lifetime EP0435291B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT9090125589T ATE105378T1 (de) 1989-12-28 1990-12-27 Kombinierte turbomolekularpumpe mit zwei wellen und atmosphaerischem auslass.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8917343A FR2656658B1 (fr) 1989-12-28 1989-12-28 Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.
FR8917343 1989-12-28

Publications (2)

Publication Number Publication Date
EP0435291A1 true EP0435291A1 (de) 1991-07-03
EP0435291B1 EP0435291B1 (de) 1994-05-04

Family

ID=9389082

Family Applications (1)

Application Number Title Priority Date Filing Date
EP90125589A Expired - Lifetime EP0435291B1 (de) 1989-12-28 1990-12-27 Kombinierte Turbomolekularpumpe mit zwei Wellen und atmosphärischem Auslass

Country Status (8)

Country Link
US (1) US5118251A (de)
EP (1) EP0435291B1 (de)
JP (1) JPH04209980A (de)
AT (1) ATE105378T1 (de)
DE (1) DE69008683T2 (de)
ES (1) ES2053071T3 (de)
FR (1) FR2656658B1 (de)
RU (1) RU1776333C (de)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0472933A2 (de) * 1990-08-01 1992-03-04 Matsushita Electric Industrial Co., Ltd. Drehanlage für flüssige Medien
EP0585911A1 (de) * 1992-09-03 1994-03-09 Matsushita Electric Industrial Co., Ltd. Zweistufige Trockenprimärpumpe
US5302089A (en) * 1991-10-08 1994-04-12 Matsushita Electric Industrial Co., Ltd. Fluid rotating apparatus
US5352097A (en) * 1992-01-23 1994-10-04 Matsushita Electric Industrial Co., Ltd. Vacuum pump
US5354179A (en) * 1990-08-01 1994-10-11 Matsushita Electric Industrial Co., Ltd. Fluid rotating apparatus
US5449276A (en) * 1992-01-29 1995-09-12 Matsushita Electric Industrial Co., Ltd. Two stage vacuum pump having different diameter interengaging rotors
US5478210A (en) * 1992-01-31 1995-12-26 Matsushita Electric Industrial Co., Ltd. Multi-stage vacuum pump
EP0691475A3 (de) * 1990-08-01 1997-03-26 Matsushita Electric Ind Co Ltd Drehkolbenanlage für flüssige Medien
EP0931939A3 (de) * 1997-12-24 2000-08-30 VARIAN S.p.A. Vakuumpumpe

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05209589A (ja) * 1992-01-31 1993-08-20 Matsushita Electric Ind Co Ltd 流体回転装置
DE9202764U1 (de) * 1992-03-02 1992-05-07 Siemens Ag, 8000 Muenchen, De
US5267837A (en) * 1992-09-23 1993-12-07 Mowli John C Two-stage pumping apparatus with non-meshing first stage augers
DE4242406C2 (de) * 1992-12-08 2002-10-31 Grasso Gmbh Refrigeration Tech Anordnung in einem Schraubenverdichter
US5363740A (en) * 1993-07-16 1994-11-15 Pneumo Abex Corporation Fluid motor/pump with scavenged case
KR100346820B1 (ko) * 1994-04-21 2002-11-30 가부시키 가이샤 에바라 세이사꾸쇼 다축전기모터 및 그에 결합된 용적형 진공펌프
DE19930952A1 (de) * 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
US6508631B1 (en) 1999-11-18 2003-01-21 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
DE10019066A1 (de) * 2000-04-18 2001-10-25 Leybold Vakuum Gmbh Vakuumpumpe mit zwei zusammenwirkenden Rotoren
FR2807951B1 (fr) * 2000-04-20 2003-05-16 Cit Alcatel Procede et systeme de pompage des chambres de transfert d'equipement de semi-conducteur
EP1234982B1 (de) * 2001-02-22 2003-12-03 VARIAN S.p.A. Vakuumpumpe
KR100408153B1 (ko) * 2001-08-14 2003-12-01 주식회사 우성진공 드라이 진공펌프
DE10149366A1 (de) * 2001-10-06 2003-04-17 Leybold Vakuum Gmbh Axial fördernde Reibungsvakuumpumpe
JP2003343469A (ja) * 2002-03-20 2003-12-03 Toyota Industries Corp 真空ポンプ
US6672828B2 (en) 2002-06-03 2004-01-06 Varian S.P.A. Vacuum pump
NL1022785C2 (nl) * 2003-02-26 2004-08-30 Tendris Solutions Bv Pomp of turbine, aandrijving die een dergelijke pomp of turbine omvat en buitenboordmotor.
FR2854933B1 (fr) * 2003-05-13 2005-08-05 Cit Alcatel Pompe moleculaire, turbomoleculaire ou hybride a vanne integree
US20050214108A1 (en) * 2004-03-26 2005-09-29 Edwin Hayes Multi-stage dry vacuum pump for high vacuum applications
DE102004038677B4 (de) * 2004-08-10 2016-11-24 Pfeiffer Vacuum Gmbh Vakuumpumpe
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
WO2007078573A2 (en) * 2005-12-22 2007-07-12 Thermo Finnigan Llc Apparatus and method for pumping in an ion optical device
DE102007012408A1 (de) * 2007-03-15 2008-09-18 Aerodyn Engineering Gmbh Windenergieanlagen mit lastübertragenden Bauteilen
DE102008024764A1 (de) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe
DE202011104491U1 (de) 2011-08-17 2012-11-20 Oerlikon Leybold Vacuum Gmbh Wälzkolbenpumpe
JP6616611B2 (ja) * 2015-07-23 2019-12-04 エドワーズ株式会社 排気システム
CN108252927A (zh) * 2017-12-11 2018-07-06 安徽颐博思泵业有限责任公司 一种卧式多级泵

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB202295A (en) * 1922-08-12 1924-06-05 Bbc Brown Boveri & Cie Improvements in multi-stage centrifugal compressors
FR1397614A (fr) * 1964-05-14 1965-04-30 Neu Sa Perfectionnement aux compresseurs
EP0256234A2 (de) * 1986-06-12 1988-02-24 Hitachi, Ltd. Vakuumerzeugungssystem
DE3826710A1 (de) * 1987-08-07 1989-02-16 Japan Atomic Energy Res Inst Vakuumpumpe
EP0340685A2 (de) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Corporation Zusammengestellte Vakuumpumpe

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2833954A1 (de) * 1978-08-03 1980-02-21 Rudolf Peschke Reibungspumpe
JPS61145394A (ja) * 1984-12-18 1986-07-03 Tokuda Seisakusho Ltd 分子ポンプ
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck
JPS6375386A (ja) * 1986-09-18 1988-04-05 Mitsubishi Heavy Ind Ltd ハイブリツド真空ポンプ
JPH0759956B2 (ja) * 1986-09-19 1995-06-28 三菱重工業株式会社 真空ポンプ
JPS63147989A (ja) * 1986-12-09 1988-06-20 Daikin Ind Ltd 複合真空ポンプ
JPH07111195B2 (ja) * 1986-12-09 1995-11-29 ダイキン工業株式会社 複合真空ポンプ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB202295A (en) * 1922-08-12 1924-06-05 Bbc Brown Boveri & Cie Improvements in multi-stage centrifugal compressors
FR1397614A (fr) * 1964-05-14 1965-04-30 Neu Sa Perfectionnement aux compresseurs
EP0256234A2 (de) * 1986-06-12 1988-02-24 Hitachi, Ltd. Vakuumerzeugungssystem
DE3826710A1 (de) * 1987-08-07 1989-02-16 Japan Atomic Energy Res Inst Vakuumpumpe
EP0340685A2 (de) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Corporation Zusammengestellte Vakuumpumpe

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0472933A2 (de) * 1990-08-01 1992-03-04 Matsushita Electric Industrial Co., Ltd. Drehanlage für flüssige Medien
EP0472933A3 (en) * 1990-08-01 1992-09-16 Matsushita Electric Industrial Co., Ltd. Fluid rotating apparatus
US5197861A (en) * 1990-08-01 1993-03-30 Matsushita Electric Industrial Co., Ltd. Fluid rotating apparatus
EP0691475A3 (de) * 1990-08-01 1997-03-26 Matsushita Electric Ind Co Ltd Drehkolbenanlage für flüssige Medien
US5354179A (en) * 1990-08-01 1994-10-11 Matsushita Electric Industrial Co., Ltd. Fluid rotating apparatus
US5302089A (en) * 1991-10-08 1994-04-12 Matsushita Electric Industrial Co., Ltd. Fluid rotating apparatus
US5352097A (en) * 1992-01-23 1994-10-04 Matsushita Electric Industrial Co., Ltd. Vacuum pump
US5445502A (en) * 1992-01-23 1995-08-29 Matsushita Electric Industrial Co., Ltd. Vacuum pump having parallel kinetic pump inlet section
US5449276A (en) * 1992-01-29 1995-09-12 Matsushita Electric Industrial Co., Ltd. Two stage vacuum pump having different diameter interengaging rotors
US5478210A (en) * 1992-01-31 1995-12-26 Matsushita Electric Industrial Co., Ltd. Multi-stage vacuum pump
US5564907A (en) * 1992-09-03 1996-10-15 Matsushita Electric Industrial Co., Ltd. Evacuating apparatus
EP0585911A1 (de) * 1992-09-03 1994-03-09 Matsushita Electric Industrial Co., Ltd. Zweistufige Trockenprimärpumpe
US5709537A (en) * 1992-09-03 1998-01-20 Matsushita Electric Industrial Co., Ltd. Evacuating apparatus
US5951266A (en) * 1992-09-03 1999-09-14 Matsushita Electric Industrial Co., Ltd. Evacuating apparatus having interengaging rotors with threads having a decreasing pitch at the exhaust side
EP0931939A3 (de) * 1997-12-24 2000-08-30 VARIAN S.p.A. Vakuumpumpe

Also Published As

Publication number Publication date
ES2053071T3 (es) 1994-07-16
RU1776333C (ru) 1992-11-15
DE69008683D1 (de) 1994-06-09
EP0435291B1 (de) 1994-05-04
DE69008683T2 (de) 1994-08-25
JPH04209980A (ja) 1992-07-31
FR2656658A1 (fr) 1991-07-05
US5118251A (en) 1992-06-02
ATE105378T1 (de) 1994-05-15
FR2656658B1 (fr) 1993-01-29

Similar Documents

Publication Publication Date Title
EP0435291B1 (de) Kombinierte Turbomolekularpumpe mit zwei Wellen und atmosphärischem Auslass
JP3993666B2 (ja) 改良真空ポンプ
EP0173601B1 (de) Ganz trockene und isolierte Vakuumpumpe mit geradliniger Bewegung zum Bekommen einer alternierenden Kompression
FR2559848A1 (fr) Machine a volutes pour comprimer un fluide
FR2559847A1 (fr) Machine a volutes pour comprimer un fluide
EP3921515B1 (de) Mehrstufiges pumpengehäuse und mehrstufige gaspumpe
EP1613864A1 (de) Motorradialverdichtereinheit
FR2556054A1 (fr) Diffuseur pour compresseur centrifuge
FR2787147A1 (fr) Pompe de regeneration a plage de fonctionnement etendue
EP1510697B1 (de) Vakuumpumpe
FR2598179A1 (fr) Dispositif de transfert d'air de refroidissement pour une turbine
FR2627238A1 (fr) Compresseur d'air ondulatoire
NL8602052A (nl) Hoogvacuumpomp.
EP0457240B1 (de) Turbomaschinenstufe mit vermindertem Strömungsverlust
JP2007510853A (ja) 多段式の摩擦真空ポンプ
FR2629877A1 (fr) Pompe moleculaire a vide
FR2670539A1 (fr) Pompe multi-etagee destinee particulierement au pompage d'un fluide multiphasique.
FR2463865A1 (fr) Compresseur centrifuge a deux etages
JP2002526720A (ja) ステータとロータを有する摩擦真空ポンプ
FR3011583A1 (fr) Trompe a jet pour depressuriser des enceintes de lubrification d'une turbomachine a injecteurs independants coaxiaux
EP0143684B1 (de) Mehrstufiger Serienverdichter
FR2611818A1 (fr) Pompe rotative a vide moleculaire du type a canal de gaede
FR2601084A1 (fr) Pompe centrifuge pour le refoulement de fluides contenant des gaz
SU1707257A1 (ru) Двухступенчатый турбомолекул рный вакуумный насос
FR2711740A1 (fr) Système d'aspiration de gaz à rotors multiples.

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE CH DE DK ES FR GB GR IT LI LU NL SE

17P Request for examination filed

Effective date: 19911230

17Q First examination report despatched

Effective date: 19930722

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE CH DE DK ES FR GB GR IT LI LU NL SE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: THE PATENT HAS BEEN ANNULLED BY A DECISION OF A NATIONAL AUTHORITY

Effective date: 19940504

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 19940504

Ref country code: DK

Effective date: 19940504

Ref country code: AT

Effective date: 19940504

REF Corresponds to:

Ref document number: 105378

Country of ref document: AT

Date of ref document: 19940515

Kind code of ref document: T

REF Corresponds to:

Ref document number: 69008683

Country of ref document: DE

Date of ref document: 19940609

GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)

Effective date: 19940517

REG Reference to a national code

Ref country code: ES

Ref legal event code: FG2A

Ref document number: 2053071

Country of ref document: ES

Kind code of ref document: T3

ITF It: translation for a ep patent filed

Owner name: JACOBACCI CASETTA & PERANI S.P.A.

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19941231

Ref country code: BE

Effective date: 19941231

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: NL

Payment date: 19941231

Year of fee payment: 5

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
BERE Be: lapsed

Owner name: ALCATEL CIT

Effective date: 19941231

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: ES

Payment date: 19950906

Year of fee payment: 6

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 19950918

Year of fee payment: 6

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 19950927

Year of fee payment: 6

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 19951016

Year of fee payment: 6

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 19951231

Year of fee payment: 6

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Effective date: 19960701

NLV4 Nl: lapsed or anulled due to non-payment of the annual fee

Effective date: 19960701

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Effective date: 19961227

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: ES

Free format text: LAPSE BECAUSE OF THE APPLICANT RENOUNCES

Effective date: 19961228

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Effective date: 19961231

Ref country code: CH

Effective date: 19961231

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 19961227

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Effective date: 19970829

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Effective date: 19970902

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

REG Reference to a national code

Ref country code: ES

Ref legal event code: FD2A

Effective date: 20010402

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20051227