EP0173601B1 - Ganz trockene und isolierte Vakuumpumpe mit geradliniger Bewegung zum Bekommen einer alternierenden Kompression - Google Patents

Ganz trockene und isolierte Vakuumpumpe mit geradliniger Bewegung zum Bekommen einer alternierenden Kompression Download PDF

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Publication number
EP0173601B1
EP0173601B1 EP85401426A EP85401426A EP0173601B1 EP 0173601 B1 EP0173601 B1 EP 0173601B1 EP 85401426 A EP85401426 A EP 85401426A EP 85401426 A EP85401426 A EP 85401426A EP 0173601 B1 EP0173601 B1 EP 0173601B1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
axial end
pump according
circular
end wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP85401426A
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English (en)
French (fr)
Other versions
EP0173601A1 (de
Inventor
Daniel Pottier
Rémi Leclaire
Paul Vulliez
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Normande dEtude et dExploitation SA NORMETEX
Original Assignee
Normande dEtude et dExploitation SA NORMETEX
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Normande dEtude et dExploitation SA NORMETEX filed Critical Normande dEtude et dExploitation SA NORMETEX
Priority to AT85401426T priority Critical patent/ATE35025T1/de
Publication of EP0173601A1 publication Critical patent/EP0173601A1/de
Application granted granted Critical
Publication of EP0173601B1 publication Critical patent/EP0173601B1/de
Expired legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/02—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/02—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows
    • F04B45/024—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows with two or more bellows in series

Definitions

  • the present invention relates to a fully dry and sealed vacuum pump.
  • the invention also relates to an alternative compression dry pump which, in combination with a dry spiral pump of the aforementioned type, allows the pumping of all gases, including corrosive and radioactive, with a significant improvement in the vacuum limit and the discharge pressure with respect to known dry pumps.
  • the invention relates to a completely dry and sealed vacuum pump comprising at least one variable volume pumping chamber connected to a suction pipe and to a delivery pipe and non-return means arranged to ensure a flow one-way fluid from said suction manifold to said discharge manifold, said chamber having a fixed axial end wall and a movable axial end wall, characterized in that said pumping chamber has at least one axially flexible circular metallic member having a certain radial stiffness, in that this member has its external part fixed to a rigid part of said pumping chamber and is made integral with a mobile assembly subjected to an alternating axial movement between a spaced apart configuration and a close configuration of said axial end walls and in that said metal member and the axial end wall against the watercolour it comes to apply have substantially the same curved diametral profile, in said close configuration, so that the residual space between said flexible metallic member and this axial end wall facing it is as small as possible.
  • the use of the vacuum pump according to the invention is of particular interest when it is combined with the above-mentioned spiral pumps.
  • FIG. 2 represents a pump according to the invention which comprises two pumping chambers 1 and 1 ′ of the aforementioned type, but arranged head to tail.
  • the same reference signs have been used to designate, with respect to the upper pumping chamber 1, the same elements as in FIG. 1, and similar reference signs, but followed by a "prime" index to designate the corresponding elements of the lower pumping chamber 1 '.
  • the desired shape of the metallic member 18 is determined by subjecting one of the faces of a solid metallic disc to a predetermined hydrostatic pressure, the disc being held at its periphery and on a circular central part 33.
  • the simple forming process makes it possible to obtain the diametral profile giving optimum axial flexibility, but it is not necessarily used industrially to produce the flexible members 18.
  • the latter can for example be obtained by stamping similar discs using tools. presses designed to reproduce the desired profile, determined as indicated above.
  • This pumping member 18 is intended to be connected along its outer edge 7 to the fixed rigid part 5 and to the movable assembly M (FIG. 5) by a central fixing at 33, by any suitable means.
  • Figure 5 shows a dry pump assembly similar to that shown in Figure 2, but where the two pumping chambers 1 and 1 'are between the rigid parts 5 and 5' and the flexible pumping members constituted by two preformed metal discs such as shown in FIG. 3.
  • These unitary members 18 and 18 ′ are joined by their outer edges 7 and 7 ′ to the rigid parts 5 and 5 ′, and their alternating axial movement is transmitted to them by the action of the mobile assembly M from which they are united by their connection in 33 and 33 '.
  • the flexible member 18 somehow forms the movable axial end wall of the variable volume chamber.
  • This example of construction includes the details already described in FIG.
  • the gas suction and delivery pipes 14 are located outside the pump body and they are fitted with non-return valves 14a of the type with flaps or lamellae according to the conventional solutions specific to a alternative pumping.
  • FIGS 7 and 8 show such a scroll pump 19A associated with a pump 19B of the type described in connection with Figure 5 above.
  • a fixed spiral 24 secured by a plate 24A of a gas suction barrel 25 and, nested therein, a movable spiral 22 driven in an exact circular translation movement adapted to make it extend radially and axially, respectively, with a very small constant clearance, the fixed spiral 24 and the associated base plate 24A.
  • the circular translational movement is controlled by three eccentrics 23 of the same eccentricity "e", integral with three parallel shafts 20 and engaged by means of bearings in cavities arranged axially in the part 22A carrying the movable spiral 22.
  • the gases to be pumped are sucked, through a connection tube to the enclosure to be emptied (not shown) in the tube 28 of the barrel 25, penetrate between the spirals at their periphery and by compression between these spirals, are discharged towards the axis in an annular chamber 29 between the barrel 25 and the assembly 27 with double bellows.
  • the volume situated between the two bellows of the double bellows assembly 27 is placed in communication (by a tube 17C), like the volumes 15A and 15'A situated between the flexible members 18 and 18 'and the bellows 15 and 15 ', with a pressure switch 16 suitable for controlling any leakage to the flexible members 27, 18-18', 15-15 '.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Claims (11)

1. Vollkommen trockene und dichte Vakuumpumpe mit mindestens einer Pumpenkammer (1) mit bezüglich eines Ansaugstutzens und eines Druckstutzens veränderlichem Volumen und mit Rückstromverhinderungsmitteln zum Sicherstellen einer Medienströmung in einem Richtungssinn vom Ansaugstutzen zum Druckstutzen, wobei die genannte Kammer eine feststehende axiale Stirnwand (5) und eine bewegliche axiale Stirnwand (6; 18) aufweist, dadurch gekennzeichnet, daß die genannte Pumpenkammer mindestens ein axial flexibles und eine gewisse radiale Steifigkeit aufweisendes kreisförmiges metallisches Organ (2, 3; 18) aufweist, daß dieses Organ mit seinem äußeren Teil an einem starren Teil der genannten Pumpenkammer befestigt ist und mit einer beweglichen Baugruppe (6) zusammenwirkt, die einer hin- und hergehenden Axialbewegung zwischen einer voneinander entfernten Stellung und einer einander angenäherten Stellung der genannten axialen Stirnwände unterworfen ist, und daß das genannte metallische Organ (2, 3; 18) und die axiale Stirnwand (5, 6), gegen welche es in Anlage kommt, in der genannten angenäherten Stellung etwa das gleiche gekrümmte Diametralprofil haben, damit der restliche Zwischenraum zwischen dem flexiblen metallischen Organ und dieser ihm zugewandten axialen Stirnwand so klein wie möglich ist.
2. Vakuumpumpe nach Anspruch 1, dadurch gekennzeichnet, daß die bzw. jede Pumpenkammer ein einziges kreisförmiges metallisches Organ (18) aufweist, dessen äußerer Teil abdichtend mit der genannten feststehenden axialen Stirnwand (5) zusammenwirkt und von welchem ein mittiger Teil an der beweglichen Baugruppe (6) befestigt (33) ist.
3. Vakuumpumpe nach Anspruch 1, dadurch gekennzeichnet, daß die bzw. jede Pumpenkammer zwei metallische Organe (18) trägt, die ilber ähnliche Mittelteile (33) derart miteinander verbunden sind, daß ihre Diametralprofile mit Bezug auf eine Transversalebene etwa symmetrisch sind, daß die äußeren Teile dieser beider metallischen Organe (18) abdichtend mit der feststehenden axialen Stirnwand bzw. mit der beweglichen axialen Stirnwand zusammenwirken, und daß in den miteinander verbundenen Mittelteilen eine Durchtrittsöffnung (34) gebildet ist.
4. Vakuumpumpe nach Anspruch 1, dadurch gekennzeichnet, daß das kreisförmige metallische Organ eine Ringform mit etwa torusartigem, nach außen offenem Querschnitt hat, um zwei äußere kreisförmige Ränder (7, 8) zu bilden, die mit starren Teilen der feststehenden axialen Stirnwand (5) bzw. der beweglichen axialen Stirnwand (6) zusammenwirken, wobei diese Wände ringförmige ausgesparte Bereiche (9A, 10A) mit einem Diametralprofil aufweisen, das im wesentlichen demjenigen eines angrenzenden Teils des benachbarten metallischen Organs in der genannten angenäherten Stellung entspricht.
5. Vakuumpumpe nach Anspruch 4, dadurch gekennzeichnet, daß das kreisförmige metallische Organ aus zwei biegsamen ringförmigen Metallmembranen (2, 3) gebildet ist, die Rücken an Rücken über ihre ringförmigen inneren Ränder (4) miteinander verbunden sind.
6. Vakuumpumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß das oder die metallischen Organe (18) der bzw. jeder Pumpenkammer von einem metallischen Faltenbalg (15) umschlossen sind, der in abdichtender Weise axial einerseits mit einem feststehenden starren Teil (5) und andererseits mit einem beweglichen starren Teil (6) der Pumpe derart zusammenwirkt, daß eine ringförmige Sicherheitskammer (15A) gebildet ist, welche die genannte Pumpenkammer von der äußeren Umgebung trennt.
7. Vakuumpumpe nach Anspruch 6, dadurch gekennzeichnet, daß die bzw. jede ringförmige Sicherheitskammer mit Druckmeßmitteln (16) in Verbindung steht.
8. Vakuumpumpe nach Anspruch 6 oder 7, dadurch gekennzeichnet, daß die bzw. jede ringförmige Sicherheitskammer (15A) unter einem beträchtlich geringeren Druck als dem Außendruck gehalten wird.
9. Vakuumpumpe nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß das Diametralprofil des kreisförmigen metallischen Organs durch Anwendung eines vorgegebenen hydrostatischen Druckes auf eine Metallscheibe hergestellt ist, die an ihrem Umfang und auf einem Mittelteil gehaltert ist, um eine optimale axiale Flexibilität zu erhalten.
10. Vakuumpumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß die bewegliche Baugruppe (6) mittels einer Exzenteranordnung (11) in eine hin- und hergehende geradlinige Bewegung versetzt wird.
11. Vakuumpumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß sie in Verbindung mit einer vollkommen trockenen und dichten Vakuumpumpe der Bauart montiert ist, die eine bewegliche Spirale (22) aufweist, die in einer feststehenden Spirale (24) verschachtelt und so ausgebildet ist, daß sie in der feststehenden Spirale eine kreisfbrmige Translationsbewegung beschreibt, die durch drei Exzenter (23) gleicher Exzentrizität in drei parallelen Zweigen (20) gesteuert wird, von denen der eine (20A) mit einem Motor (21) verbunden ist, und daß die genannte Exzenteranordnung (11) auf einem Zweig (32) montiert ist, der in der Verlängerung des mit dem Motor verbundenen (20A) der drei Zweige verläuft, wobei die Exzenteranordnung (11) von diesem Zweig (20A) mitgedreht wird.
EP85401426A 1984-07-23 1985-07-12 Ganz trockene und isolierte Vakuumpumpe mit geradliniger Bewegung zum Bekommen einer alternierenden Kompression Expired EP0173601B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT85401426T ATE35025T1 (de) 1984-07-23 1985-07-12 Ganz trockene und isolierte vakuumpumpe mit geradliniger bewegung zum bekommen einer alternierenden kompression.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8411652 1984-07-23
FR8411652A FR2567970B1 (fr) 1984-07-23 1984-07-23 Pompe a vide integralement seche et etanche a mouvement rectiligne de compression alternative

Publications (2)

Publication Number Publication Date
EP0173601A1 EP0173601A1 (de) 1986-03-05
EP0173601B1 true EP0173601B1 (de) 1988-06-08

Family

ID=9306386

Family Applications (1)

Application Number Title Priority Date Filing Date
EP85401426A Expired EP0173601B1 (de) 1984-07-23 1985-07-12 Ganz trockene und isolierte Vakuumpumpe mit geradliniger Bewegung zum Bekommen einer alternierenden Kompression

Country Status (8)

Country Link
US (1) US4718836A (de)
EP (1) EP0173601B1 (de)
JP (1) JPS6193283A (de)
AT (1) ATE35025T1 (de)
CA (1) CA1317576C (de)
DE (1) DE3563242D1 (de)
FR (1) FR2567970B1 (de)
ZA (1) ZA855368B (de)

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US5993170A (en) * 1998-04-09 1999-11-30 Applied Materials, Inc. Apparatus and method for compressing high purity gas
EP1077329A4 (de) * 1999-03-05 2006-08-02 Tokyo Electron Ltd Vakuummaschine
JP3822768B2 (ja) 1999-12-03 2006-09-20 株式会社ルネサステクノロジ Ｉｃカードの製造方法
US10221852B2 (en) 2006-02-14 2019-03-05 Air Squared, Inc. Multi stage scroll vacuum pumps and related scroll devices
US10683865B2 (en) 2006-02-14 2020-06-16 Air Squared, Inc. Scroll type device incorporating spinning or co-rotating scrolls
US8668479B2 (en) * 2010-01-16 2014-03-11 Air Squad, Inc. Semi-hermetic scroll compressors, vacuum pumps, and expanders
US7942655B2 (en) * 2006-02-14 2011-05-17 Air Squared, Inc. Advanced scroll compressor, vacuum pump, and expander
US8523544B2 (en) 2010-04-16 2013-09-03 Air Squared, Inc. Three stage scroll vacuum pump
IT1394259B1 (it) * 2009-05-12 2012-06-01 Lo Compressore d'aria
US11047389B2 (en) 2010-04-16 2021-06-29 Air Squared, Inc. Multi-stage scroll vacuum pumps and related scroll devices
US20130232975A1 (en) 2011-08-09 2013-09-12 Robert W. Saffer Compact energy cycle construction utilizing some combination of a scroll type expander, pump, and compressor for operating according to a rankine, an organic rankine, heat pump, or combined organic rankine and heat pump cycle
US10508543B2 (en) 2015-05-07 2019-12-17 Air Squared, Inc. Scroll device having a pressure plate
US10865793B2 (en) 2016-12-06 2020-12-15 Air Squared, Inc. Scroll type device having liquid cooling through idler shafts
DE112018004922A5 (de) * 2017-09-08 2020-07-02 Sera Gmbh Verdichter mit einem Metall-Membranbalg und Betriebsverfahren für einen solchen Verdichter
US11454241B2 (en) 2018-05-04 2022-09-27 Air Squared, Inc. Liquid cooling of fixed and orbiting scroll compressor, expander or vacuum pump
US11067080B2 (en) 2018-07-17 2021-07-20 Air Squared, Inc. Low cost scroll compressor or vacuum pump
US20200025199A1 (en) 2018-07-17 2020-01-23 Air Squared, Inc. Dual drive co-rotating spinning scroll compressor or expander
US11530703B2 (en) 2018-07-18 2022-12-20 Air Squared, Inc. Orbiting scroll device lubrication
US11473572B2 (en) 2019-06-25 2022-10-18 Air Squared, Inc. Aftercooler for cooling compressed working fluid
US11898557B2 (en) 2020-11-30 2024-02-13 Air Squared, Inc. Liquid cooling of a scroll type compressor with liquid supply through the crankshaft
US11885328B2 (en) 2021-07-19 2024-01-30 Air Squared, Inc. Scroll device with an integrated cooling loop

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Also Published As

Publication number Publication date
JPH0315038B2 (de) 1991-02-28
DE3563242D1 (en) 1988-07-14
FR2567970A1 (fr) 1986-01-24
ZA855368B (en) 1986-03-26
ATE35025T1 (de) 1988-06-15
US4718836A (en) 1988-01-12
EP0173601A1 (de) 1986-03-05
FR2567970B1 (fr) 1989-04-28
CA1317576C (fr) 1993-05-11
JPS6193283A (ja) 1986-05-12

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