EP0173601A1 - Ganz trockene und isolierte Vakuumpumpe mit geradliniger Bewegung zum Bekommen einer alternierenden Kompression - Google Patents

Ganz trockene und isolierte Vakuumpumpe mit geradliniger Bewegung zum Bekommen einer alternierenden Kompression Download PDF

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Publication number
EP0173601A1
EP0173601A1 EP85401426A EP85401426A EP0173601A1 EP 0173601 A1 EP0173601 A1 EP 0173601A1 EP 85401426 A EP85401426 A EP 85401426A EP 85401426 A EP85401426 A EP 85401426A EP 0173601 A1 EP0173601 A1 EP 0173601A1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
axial end
pump according
end wall
pumping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP85401426A
Other languages
English (en)
French (fr)
Other versions
EP0173601B1 (de
Inventor
Daniel Pottier
Rémi Leclaire
Paul Vulliez
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Normande dEtude et dExploitation SA NORMETEX
Original Assignee
Normande dEtude et dExploitation SA NORMETEX
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Normande dEtude et dExploitation SA NORMETEX filed Critical Normande dEtude et dExploitation SA NORMETEX
Priority to AT85401426T priority Critical patent/ATE35025T1/de
Publication of EP0173601A1 publication Critical patent/EP0173601A1/de
Application granted granted Critical
Publication of EP0173601B1 publication Critical patent/EP0173601B1/de
Expired legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/02—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/02—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows
    • F04B45/024—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows with two or more bellows in series

Definitions

  • the present invention relates to a fully dry and sealed vacuum pump.
  • Dry vacuum pumps are also known which involve alternative compression of metal bellows which, in combination with spiral pumps of the aforementioned type, allow the pumping of corrosive or radioactive gases up to a limit vacuum of the same order ( 10 -1 Pa).
  • a limit vacuum 10 -1 Pa.
  • the performance of these bellows pumps remains limited due to the residual volumes which inevitably remain in the vicinity of these bellows.
  • the present invention relates to a new type of vacuum pump whose pumping members are metallic and which has better performance.
  • the invention thus relates to a new dry pump with rectilinear movement of alternative compression allowing, with a simple and robust construction and an operation free of hazards, to obtain good performances in limit vacuum thanks for each compression cycle to an almost expulsion. full of pumped gas.
  • the invention also relates to an alternative compression dry pump which, in combination with a dry spiral pump of the aforementioned type, allows the pumping of all gases, including corrosive and radioactive, with a significant improvement in the vacuum limit and the discharge pressure with respect to known dry pumps.
  • the invention relates to a completely dry and sealed vacuum pump comprising at least one variable volume pumping chamber connected to a suction pipe and to a delivery pipe and non-return means arranged to ensure a flow one-way fluid from said suction manifold to said discharge manifold, said chamber having a fixed axial end wall and a movable axial end wall, characterized in that said pumping chamber has at least one circular metallic member axially flexible and having a certain radial stiffness, in that this member has its external part fixed to a rigid part of said pumping chamber and is made integral with a mobile assembly subjected to an alternating axial movement between a configuration apart and a close configuration of said axial end walls and in that said metal member. lique and the axial end wall against which it is applied have substantially the same diametrical profile, in said close configuration, so that the residual space between said flexible metal member and this end wall. axial mite facing it is as small as possible.
  • the flexible metallic pumping member can be in the annular form with a substantially toric cross section, it can in this case be manufactured in one piece, such as a bellows element, or in two pieces by the assembly and following their internal edges of two metal diaphragms preformed in a substantially semi-toric cross section, that is to say open radially outwards (FIG. 1 and FIG. 2).
  • This kind of flexible member of substantially toroidal shape is better suited to short strokes of the mobile pumping member and to obtaining relatively high discharge pressures.
  • this type of dry pump can be equipped with another model of flexible metallic member obtained from a circular disc preformed in the free position, according to a diametral profile giving the best performance of axial flexibility for a minimum of fatigue effort.
  • Another model of flexible metallic member obtained from a circular disc preformed in the free position, according to a diametral profile giving the best performance of axial flexibility for a minimum of fatigue effort.
  • The'. back-to-back meeting of two of these discs in their central part allows, while retaining the flexibility advantages of each of them, to double the volume of each pumping chamber.
  • the central assembly of these two discs must include a communication hole between the two parts of the same pumping chamber.
  • the use of the vacuum pump according to the invention finds a very particular interest when it is associated with the spiral pumps mentioned above.
  • the strictly dry limit vacuum obtained can reach 10-2 to 10 -3 Pa (10 -4 to 10-5 millibars) and this in conjunction with obtaining a significant discharge pressure depending on the type of flexible member. employee.
  • FIG. 1 shows, by way of nonlimiting example, a part of an entirely dry and sealed vacuum pump with rectilinear movement of alternative compression, adapted according to the invention to pump all kinds of media, even corrosive or radioactive.
  • This pump part comprises a pumping chamber 1 whose variable volume is included inside radially of a circular metallic member more particularly here annular with a substantially toric cross section, open externally, axially flexible and formed here of two annular metal diaphragms flexible 2 and 3 connected back to back, by their internal circular edges 4.
  • This chamber is also delimited by two rigid parts 5 and 6 axially opposite defining the walls of axial end of the pumping chamber and animated, one with respect to the other, of a rectilinear alternating axial movement, along an axis AA, between a spaced configuration and a close configuration.
  • the annular element 2-3 is connected along its external circular edges 7 and 8, for example by welding, to each of the two rigid parts, respectively.
  • the upper rigid part 5 is fixed to a frame B.
  • the lower rigid part 6 belongs to a mobile assembly M driven in movement with the aid of an eccentric device 11 of the "frame" type, the axis X-X of which crosses the axis A-A at right angles.
  • the device 11 comprises a drive shaft 11A, aligned along the axis X-X, integral with an eccentric disc 11B engaged in a ball bearing 11C.
  • the movable rigid part 6 comprises two bearing areas 6a and 6b parallel to the central surface 10, between which is engaged with play the external track of the ball bearing 11C.
  • non-return valves of the ball type 12 and 13 ensuring a one-way fluid flow in a tube 14 comprising a suction section 14A and a discharge section 14B.
  • the flexible annular element 2-3 In operation, during the upward movement of the equi. mobile page M, the flexible annular element 2-3 is gradually brought to conform to a very small clearance near the surfaces of zones 9A and 10A of the pumping chamber at the same time as the central surfaces 9 and 10 of this same chamber s also marry to a very small play. The gas is thus almost entirely expelled through the discharge orifice.
  • FIG. 2 represents a pump according to the invention which comprises two pumping chambers 1 and l 'of the aforementioned type, but arranged head to tail.
  • the same reference signs have been used to designate, with respect to the upper pumping chamber 1, the same elements as in FIG. 1, and similar reference signs, but followed by a "prime" index to designate the corresponding elements of the lower pumping chamber.
  • the tubing 14A which passes through the movable assembly M constitutes an intake tubing for the pumping chamber 1, but a discharge tubing for the pumping chamber 1 ', which receives a suction tubing 14C which is advantageously in the extension pipes 14A and 14B which constitute the delivery pipe of chamber 1.
  • each of the annular elements or flexible metallic pumping elements 2-3 and 2'-3 ' is preferably surrounded by a metal bellows 15 or 15', fixed to the rigid fixed and mobile parts 5, 6 to which said annular element is fixed.
  • These annular elements and these bellows define annular safety chambers 15A and 15'A which insulate the pumping chambers vis-à-vis the outside.
  • These annular chambers are advantageously connected, by tubes 17A and 17B connecting to a pressure switch 16 adapted to control that the pressure of the control gas contained in these chambers remains between two limit values, and to trigger any control and safety system when this pressure leaves this range of admissible values.
  • the pressure switch thus makes it possible to detect any rupture either of an annular element or of a bellows, without any direct communication having been established between the interior of the pumping chambers and the exterior. This results in good safety in the case of pumping dangerous gases.
  • this same arrangement makes it possible, by maintaining the control gas in the chambers 15A and 15'A at a pressure value significantly lower than the atmospheric pressure, to reduce the fatigue forces borne by the flexible metallic pumping bodies 2-3 and 2'-3 'when their external faces are directly subjected to atmospheric pressure.
  • This appreciable advantage results in an increase in the service life of the flexible metallic pumping member, and therefore in the reliability of the entire pump.
  • FIG. 3 shows a flexible metallic pump member 18 obtained from a solid disc and preformed according to a diametrical profile allowing optimal axial flexibility, that is to say the best axial displacement for the corresponding minimum axial force .
  • the desired shape of the metallic member 18 is determined by subjecting one of the faces of a solid metallic disc to a predetermined hydrostatic pressure, the disc being held at its periphery and on a circular central part 33.
  • the simple forming process makes it possible to obtain the diametral profile giving optimal axial flexibility, but it is not necessarily used in industry.
  • LEMENT TO PRODUCE FLEXIBLE BODIES 18. These can for example be obtained by stamping similar discs by means of press tools shaped to reproduce the desired profile, determined as indicated above. above.
  • This pumping member 18 is intended to be connected along its outer edge 7 to the fixed rigid part 5 and to the mobile assembly '1 (FIG. 5) by a central fixing at 33, by any suitable means.
  • FIG. 4 shows a flexible metallic member constituted by two members 18 identical to that of FIG. 3, and joined by their respective central parts 33, so that their diametrical profiles are substantially symmetrical with respect to a plane transverse to the axial direction of displacement.
  • the outer edges 7 and 8 are intended to be tightly connected, for example by welding to each of the rigid parts 5 and 6 respectively and the central part 33 has a passage 34 for the communication between the two parts of the pumping chamber thus created.
  • FIG. 5 represents a dry pump assembly similar to that represented in FIG. 2, but where the two pumping chambers 1 and l 'are included between the rigid parts 5 and 5 ′ and the flexible pumping members constituted by two preformed metal discs such as shown in FIG. 3.
  • These unitary members 18 and 18 t are joined by their outer edges 7 and 7 ′ to the rigid parts 5 and 5 ′, and their alternating axial movement is transmitted to them by the action of the mobile assembly M from which they are united by their connection in 33 and 33 '.
  • the flexible member 18 somehow forms the movable axial end wall of the variable volume chamber.
  • This example of construction includes the details already described in FIG.
  • the gas suction and delivery pipes 14 are located outside the pump body and they are fitted with non-return valves 14a of the type with flaps or lamellae according to the conventional solutions specific to a alternative pumping.
  • Figure 6 is a dry pump construction identical to that shown in Figure 5 but with the adaptation of a pumping member consisting of two members 18 joined together by their central part 33 and as shown in Figure 4. These double members 18 and 18 'are connected by their outer edges 7-7' and 8-8 'respectively to the fixed rigid parts 5 and 5' and to the part 6 which is part of the movable assembly M, which under the action of the Eccentric cage transmits to these flexible members their alternating axial movement.
  • the volume of the pumping chamber l is doubled compared to the volume of a chamber equipped as in FIG. 5 with a single element 18 unlined. Between the spread configuration and the close configuration of the member 18 the intercommunication hole 34 between the two parts of the chamber 1 allows the expulsion of all of the gases.
  • the present construction benefits from the various advantageous arrangements already mentioned for the construction according to FIGS. 2 and 5.
  • FIGS 7 and 8 show such a scroll pump 19A associated with a pump 19B of the type described in connection with Figure 5 above.
  • a fixed spiral 24 secured by a plate 24A of a suction barrel 25 of gas and, nested therein, a movable spiral 22 driven in an exact circular translational movement adapted to make it extend radially and axially, respectively, with a very small constant play, the fixed spiral 24 and the associated base plate 24A .
  • the circular translational movement is controlled by three eccentrics 23 of the same eccentricity "e", integral with three parallel shafts 20 and engaged by means of bearings in cavities arranged axially in the part 22A carrying the movable spiral 22.
  • One, 20A, of the three shafts 20 is driven in rotation by a motor 21, the other shafts serving only to ensure rigorous guidance of the movable spiral 22.
  • the assembly is arranged in a frame Bl.
  • the gases to be pumped are sucked, through a connection tube to the enclosure to be emptied (not shown) in the tube 28 of the barrel 25, penetrate between the spirals at their periphery and by compression between these spirals, are discharged towards the axis. in an annular chamber 29 between the barrel 25 and the assembly 27 with double bellows.
  • This pump 19B is analogous to the pump of FIG. 5 but shown in FIG. 7 along a section plane perpendicular to that of this FIG. 5; the corresponding elements bear the same figures as in this FIG. 5.
  • This pump in the manner previously described, discharges said gases, either to the atmosphere, or into a capacity or into a circuit where they can, according to the invention, and depending on the type of flexible member used be transferred to a pressure higher than atmospheric pressure.
  • the drive of the eccentric 11 of the pump 19B (eccentricity "e 1 ") is ensured by the rotation of a shaft 32 arranged in the extension of the shaft 20A driven by the motor 21.
  • the connection between shafts 20 and 32 can be made, either directly or through any speed reduction system, the alternative compression pump 19B retaining sufficient efficiency at reduced speeds, taking into account the low mass flow rate of the gases to be pumped near where most of the pumping is done by the spiral pump.
  • the volume situated between the two bellows of the double bellows assembly 27 is placed in communication (by a tube 17C), like the volumes 15A and 15'A situated between the flexible members 18 and 18 'and the bellows 15 and 15 ', with a pressure switch 16 adapted to control any possible leakage to the flexible members 27, 18-18', 15-15 '.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP85401426A 1984-07-23 1985-07-12 Ganz trockene und isolierte Vakuumpumpe mit geradliniger Bewegung zum Bekommen einer alternierenden Kompression Expired EP0173601B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT85401426T ATE35025T1 (de) 1984-07-23 1985-07-12 Ganz trockene und isolierte vakuumpumpe mit geradliniger bewegung zum bekommen einer alternierenden kompression.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8411652A FR2567970B1 (fr) 1984-07-23 1984-07-23 Pompe a vide integralement seche et etanche a mouvement rectiligne de compression alternative
FR8411652 1984-07-23

Publications (2)

Publication Number Publication Date
EP0173601A1 true EP0173601A1 (de) 1986-03-05
EP0173601B1 EP0173601B1 (de) 1988-06-08

Family

ID=9306386

Family Applications (1)

Application Number Title Priority Date Filing Date
EP85401426A Expired EP0173601B1 (de) 1984-07-23 1985-07-12 Ganz trockene und isolierte Vakuumpumpe mit geradliniger Bewegung zum Bekommen einer alternierenden Kompression

Country Status (8)

Country Link
US (1) US4718836A (de)
EP (1) EP0173601B1 (de)
JP (1) JPS6193283A (de)
AT (1) ATE35025T1 (de)
CA (1) CA1317576C (de)
DE (1) DE3563242D1 (de)
FR (1) FR2567970B1 (de)
ZA (1) ZA855368B (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990014517A1 (de) * 1989-05-23 1990-11-29 Siemens Aktiengesellschaft Faltenbalgpumpe mit mehreren sternförmig angeordneten faltenbälgen

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SE455164B (sv) * 1985-12-05 1988-06-27 Data Promeditech Inc Ab Pump for biologiska vetskor
US4753578A (en) * 1986-11-26 1988-06-28 Morrison Donald R Abrasive fluid pumping apparatus
US5226801A (en) * 1992-08-17 1993-07-13 Cobile Alfredo P Shock absorber type compressor
US5308230A (en) * 1993-03-08 1994-05-03 Stainless Steel Products, Inc. Bellows pump
WO1995021329A1 (en) * 1994-02-01 1995-08-10 Charles Grenci Improved oil free scroll vacuum pump
KR0126711Y1 (ko) * 1995-11-22 1998-12-15 배순훈 세탁기의 공기방울 발생기
US5993170A (en) * 1998-04-09 1999-11-30 Applied Materials, Inc. Apparatus and method for compressing high purity gas
TW482871B (en) * 1999-03-05 2002-04-11 Tadahiro Ohmi Vacuum device
JP3822768B2 (ja) * 1999-12-03 2006-09-20 株式会社ルネサステクノロジ Ｉｃカードの製造方法
US10221852B2 (en) 2006-02-14 2019-03-05 Air Squared, Inc. Multi stage scroll vacuum pumps and related scroll devices
US8668479B2 (en) * 2010-01-16 2014-03-11 Air Squad, Inc. Semi-hermetic scroll compressors, vacuum pumps, and expanders
US10683865B2 (en) 2006-02-14 2020-06-16 Air Squared, Inc. Scroll type device incorporating spinning or co-rotating scrolls
US7942655B2 (en) * 2006-02-14 2011-05-17 Air Squared, Inc. Advanced scroll compressor, vacuum pump, and expander
US8523544B2 (en) 2010-04-16 2013-09-03 Air Squared, Inc. Three stage scroll vacuum pump
IT1394259B1 (it) * 2009-05-12 2012-06-01 Lo Compressore d'aria
US11047389B2 (en) 2010-04-16 2021-06-29 Air Squared, Inc. Multi-stage scroll vacuum pumps and related scroll devices
US20130232975A1 (en) 2011-08-09 2013-09-12 Robert W. Saffer Compact energy cycle construction utilizing some combination of a scroll type expander, pump, and compressor for operating according to a rankine, an organic rankine, heat pump, or combined organic rankine and heat pump cycle
US10508543B2 (en) 2015-05-07 2019-12-17 Air Squared, Inc. Scroll device having a pressure plate
US10865793B2 (en) 2016-12-06 2020-12-15 Air Squared, Inc. Scroll type device having liquid cooling through idler shafts
WO2019048647A1 (de) * 2017-09-08 2019-03-14 Sera Gmbh Verdichter mit einem metall-membranbalg und betriebsverfahren für einen solchen verdichter
CN112119219B (zh) 2018-05-04 2022-09-27 空气平方公司 固定和动涡旋压缩机、膨胀机或真空泵的液体冷却
US20200025199A1 (en) 2018-07-17 2020-01-23 Air Squared, Inc. Dual drive co-rotating spinning scroll compressor or expander
US11067080B2 (en) 2018-07-17 2021-07-20 Air Squared, Inc. Low cost scroll compressor or vacuum pump
US11530703B2 (en) 2018-07-18 2022-12-20 Air Squared, Inc. Orbiting scroll device lubrication
US11473572B2 (en) 2019-06-25 2022-10-18 Air Squared, Inc. Aftercooler for cooling compressed working fluid
US11898557B2 (en) 2020-11-30 2024-02-13 Air Squared, Inc. Liquid cooling of a scroll type compressor with liquid supply through the crankshaft
US11885328B2 (en) 2021-07-19 2024-01-30 Air Squared, Inc. Scroll device with an integrated cooling loop

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FR1457688A (fr) * 1965-09-23 1966-01-24 Omnium Tech De Mecanique S A R Compresseur à membrane
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US1992139A (en) * 1933-11-14 1935-02-19 Cloyd L Armstrong Air compressor
DE802642C (de) * 1949-05-17 1951-02-15 Richard Dr-Ing Stroehlen Zweistufiger Verdichter mit Schwingungsantrieb
FR1457688A (fr) * 1965-09-23 1966-01-24 Omnium Tech De Mecanique S A R Compresseur à membrane
FR2141402A1 (de) * 1971-06-01 1973-01-26 Vulliez Paul

Cited By (1)

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Publication number Priority date Publication date Assignee Title
WO1990014517A1 (de) * 1989-05-23 1990-11-29 Siemens Aktiengesellschaft Faltenbalgpumpe mit mehreren sternförmig angeordneten faltenbälgen

Also Published As

Publication number Publication date
JPH0315038B2 (de) 1991-02-28
FR2567970B1 (fr) 1989-04-28
ZA855368B (en) 1986-03-26
EP0173601B1 (de) 1988-06-08
FR2567970A1 (fr) 1986-01-24
US4718836A (en) 1988-01-12
CA1317576C (fr) 1993-05-11
DE3563242D1 (en) 1988-07-14
ATE35025T1 (de) 1988-06-15
JPS6193283A (ja) 1986-05-12

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