EP1510697A1 - Vakuumpumpe - Google Patents

Vakuumpumpe Download PDF

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Publication number
EP1510697A1
EP1510697A1 EP04292018A EP04292018A EP1510697A1 EP 1510697 A1 EP1510697 A1 EP 1510697A1 EP 04292018 A EP04292018 A EP 04292018A EP 04292018 A EP04292018 A EP 04292018A EP 1510697 A1 EP1510697 A1 EP 1510697A1
Authority
EP
European Patent Office
Prior art keywords
rotor
primary
molecular
stator
kinematic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP04292018A
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English (en)
French (fr)
Other versions
EP1510697B1 (de
Inventor
Jean-Luc Rival
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel CIT SA
Alcatel SA
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Publication date
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Application filed by Alcatel CIT SA, Alcatel SA filed Critical Alcatel CIT SA
Publication of EP1510697A1 publication Critical patent/EP1510697A1/de
Application granted granted Critical
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Definitions

  • the present invention relates to vacuum pumps for generate and maintain a suitable vacuum in a vacuum enclosure or a line of empty.
  • Vacuum pumps of various types which are generally each adapted to particular flow conditions and pumped gas pressure.
  • a primary pump which must repress to the atmospheric pressure, which have a plurality of compression stages, and whose last stages produce a strong compression under a volumetric flow relatively weak.
  • An example of such a primary pump is a pump kinematic formed of a disc rotor with concentric ribs equipped with individual radial blades engaged in annular grooves corresponding communicating concentrics of the stator.
  • the primary pumps thus formed do not make it possible to achieve sufficiently advanced voids for many vacuum applications. Is the then associates in series with at least one secondary pump, for example a Molecular type or turbomolecular type pump, the repression of which is connected to the suction of the primary pump.
  • at least one secondary pump for example a Molecular type or turbomolecular type pump, the repression of which is connected to the suction of the primary pump.
  • a molecular or turbomolecular pump must be able to immediate vicinity of the vacuum chamber that it must evacuate, in order to benefit from the maximum pumping speed in the vacuum chamber.
  • the size and weight of the pumping stage single-axis primary is incompatible with close integration of the empty, and therefore the primary pump must be removed from the vacuum chamber, and the pumping performance is thus degraded.
  • the engine of such a composite pump must be able to provide a sufficient power to drive the primary pump.
  • the position of engine at the end of the motor shaft leads to a congestion that prevents the integration of the composite pump in the immediate vicinity of the vacuum chamber that the pump must evacuate.
  • the problem proposed by the present invention is to design a new composite pump structure which is compact enough to be integrated in close proximity to the vacuum chamber or process chamber, and which is capable of pumping from atmospheric pressure (1000 mbar). to the high vacuum usually required in some industries (10 -8 mbar).
  • the idea underlying the invention is to reduce both the size of the engine itself which drives the pump, and to place the engine inside the pump to further reduce the overall footprint of the motor-pump assembly.
  • a pump structure is provided with a primary stage which has improved and adjustable pumping properties, in order to achieve a satisfactory pumping using a smaller pump volume.
  • the speed-compatible primary pumping stage is a structure of mechanical pumping with viscous drive stator and rotor that allows back to atmospheric pressure and that works properly at speeds normal rotation of the molecular or turbomolecular stages, that is to say speeds of the order of 20,000 revolutions / minute.
  • the motor shaft is rotated by a upstream bearing and a downstream bearing, the upstream bearing being located between the engine and the zone coupling with the molecular rotor, the downstream bearing being located between the engine and the coupling area to the primary rotor.
  • the areas of reduced section grooves have the role of achieving a leakage barrier between two distinct annular grooves, which are different pressures.
  • a vacuum pump according to the invention is such that the primary rotor is a multi-stage kinematic rotor with drive viscous material comprising one or more disks having a transverse face oblique centrifugal ribs which cooperate with a transverse face corresponding of a multi-stage kinematic stator.
  • An improvement consists in providing that the primary pumping stage is further such that the primary rotor has an upstream transverse face to oblique centrifugal ribs which cooperate with a transverse face corresponding pump body to constitute a pumping stage additional kinematics.
  • the vacuum pump composite according to the invention comprises a plurality of pumping stages Molecules consisting of rotor elements in the form of concentric cylinders connected to the motor shaft according to their upstream ends, and of stator elements in form of concentric cylinders with helical ribs connected to the pump body according to their downstream and engaged ends between the concentric rotor cylinders successive.
  • the pump according to the invention further comprises at least one stage of turbomolecular pumping connected aeraulically upstream of the stage or stages of molecular pumping, the turbomolecular pumping stage comprising a rotor turbomolecular having at least one stage of radial vanes and a stator turbomolecular having at least one annular groove in which are engaged the radial fins of the turbomolecular rotor.
  • a plurality of turbomolecular stages consisting of a rotor having a plurality of radial fin stages distributed along of the motor shaft, and a plurality of corresponding annular grooves distributed on the stator.
  • the inner position of the motor preferably leads to providing means for increasing the overall efficiency of the motor, in order to reduce the losses and thus the heating of the motor in operation.
  • the goal is to provide the mechanical energy needed to the drive of the pump, with a smaller motor.
  • recessed cooling means in the stator of the motor for example pipes in which a fluid of cooling.
  • a primary stator of multi-stage kinematic type mounted movable in the axial direction relative to to the pump body, and biased by displacement means allowing modify its relative axial position with respect to the primary rotor, so that the pumping performance is adjustable. It should be noted that this provision may be used in a kinematic stage pump regardless of the presence or the absence of the other characteristics defined above, and that it constitutes thus an independent invention.
  • the motor shaft can advantageously be guided in rotation by magnetic bearings that allow an increase in the service life and a reduction of vibrations.
  • a vacuum pump composite according to the invention comprises, in the same pump body 100 having a suction port 1 and a delivery port 2, at least one pumping stage Aeraulically connected molecular 5, via a transfer line 6, in series with at least one primary pumping stage 9 of multi-stage kinematic type viscous training.
  • the pump further comprises at least one turbomolecular pumping stage 4, connected aeraulically upstream of or molecular pumping stages 5.
  • the molecular pumping stage 5 comprises a molecular rotor 5a which cooperates with a molecular stator 5b provided in the pump body 100.
  • the primary pumping stage 9 comprises a primary rotor 9a of the type kinematic cooperating with a primary stator 9b kinematic type provided in the pump body 100.
  • the molecular rotor 5a and the primary rotor 9a are driven in rotation by the same motor shaft 8 coupled to an electric motor 7.
  • the engine 7 comprises a motor rotor 7a, fixed on the central section of the motor shaft 8, and rotating in a motor stator 7b itself fixed in a housing 100b of the pump body 100.
  • the motor shaft 8 is rotated by an upstream bearing 15 and a bearing downstream 16, on either side of the motor rotor 7a.
  • the bearings 15 and 16 are mechanical bearings with ball bearings.
  • the bearings 15 and / or 16 are magnetic bearings, in a manner known per se.
  • the molecular rotor 5a has a blind axial cavity 5c, open downstream of the pump body 100 that is to say open towards the discharge port 2, and closed upstream, that is to say in the direction of the suction port 1, by a transverse wall 5d.
  • the motor 7 is housed at least partially in said blind axial cavity 5c of the molecular rotor 5a.
  • the motor 7 is housed entirely in the blind axial cavity 5c of the molecular rotor 5a.
  • the motor shaft 8 is coupled by its end upstream 8a to the molecular rotor 5a, and the motor shaft 8 is coupled by its downstream portion 8b to the primary rotor 9a.
  • the upstream end 8a of the drive shaft 8 crosses an axial hole provided in the transverse wall 5d of the molecular rotor 5a, and it is secured by a nut 8c.
  • the downstream portion 8b of the motor shaft 8 through a hole in the primary rotor 9a, and is fixed to it by a nut 13.
  • the upstream bearing 15 comprises, in the illustrated embodiment, a elastic washer 15a for precharging the ball bearing constituting said bearing upstream 15.
  • the upstream bearing 15 is located between the engine 7 and the upstream end 8a of the motor shaft 8 or coupling zone to the molecular rotor 5a.
  • the downstream bearing 16 is located between the engine 7 and the downstream portion 8b of the motor shaft 8 or coupling zone to the primary rotor 9a.
  • the primary rotor 9a is a kinematic rotor comprising a disk having a transverse face, for example the downstream transverse face in the illustrated embodiment, comprises a series concentric annular ribs each having individual blades radials.
  • Figure 2 illustrates in perspective an embodiment of such a transverse face 9c of a kinematic rotor 9a disc-shaped: we distinguish the concentric annular ribs successive 9d, 9e, 9f, 9g and 9h, which extend from the periphery to the center of the disk.
  • Each concentric annular rib 9d-9h has blades individual radial such as the blade 10, protruding axially from the ridge of the corresponding concentric annular rib 9d and oriented each substantially in a radial direction relative to the disk forming the rotor kinematic 9a.
  • the kinematic stator 9b has a transverse wall integral with the pump body 100 and which comprises a corresponding transverse face, the upstream transverse face in the illustrated embodiment, which comprises a series of concentric annular grooves.
  • FIG. 4 illustrates in perspective an embodiment of such a stator kinematic 9b, with concentric annular grooves 9j, 9k, 9l, 9m and 9n, which correspond respectively to the respective concentric annular ribs 9d-9h of the kinematic rotor 9a.
  • the successive concentric annular grooves 9j-9n are connected one to the other via a communication channel provided at the downstream end of the corresponding throat.
  • a communication channel provided at the downstream end of the corresponding throat.
  • the channel 9p which connects the concentric annular grooves 9j and 9k.
  • a additional pumping stage 11 at the interface between the primary rotor 9a and the upstream portion of the pump body 100.
  • the second transverse face or upstream transverse face of the kinematic rotor disk 9a may be such that represented in perspective in FIG. 3 to form a rotor 11a, comprising oblique centrifugal ribs 11c, 11d, 11e and 11f, to cooperate with a corresponding transverse face 11 b ( Figure 1) of the pump body 100 which constitutes a stator.
  • a plurality of molecular pumping stages 5 consisting of rotor elements in the form of concentric cylinders connected to the motor shaft 8 according to their upstream ends, that is to say according to the transverse wall 5d, and stator elements in the form of concentric cylinders with helical ribs connected to the pump body 100 along their downstream ends and engaged between the successive concentric rotor cylinders.
  • stator elements in the form of concentric cylinders with helical ribs connected to the pump body 100 along their downstream ends and engaged between the successive concentric rotor cylinders.
  • turbomolecular 4 having a turbomolecular rotor 4a having at least one radial fin stage, two stages of radial fins in the figure, and a stator Turbomolecular 4b having annular rings, two crowns in the figure 1, which engage between the radial vanes of the turbomolecular rotor 4a.
  • the crowns can be patches, stacked axially with appropriate spacers, in a manner known per se.
  • the stator may consist of the assembly peripheral of several shells reported radially around the rotor.
  • the motor 7 must be adapted for allow a high rotational speed, greater than 20 000 rpm rated speed.
  • the electrical power density is, in this way, more high, which reduces the size of the engine.
  • concentric ring grooves 9j-9n and corresponding individual radial blades 10 have a larger size reduced in the vicinity of the discharge of the kinematic stage.
  • the transverse dimension of the grooves and the blades is becoming smaller when going from the peripheral ring groove 9j to the throat 9n central annular, and it is the same concentric ribs 9d-9h and radial individual blades 10. In this way, the blades are reduced in the high pressure zone, that is to say in the vicinity of the axis of rotation, which reduces viscous friction and reduces the power that must develop the engine.
  • means are provided for reducing leaks between the kinematic pumping stages, providing for a very low clearance between the individual radial blades 10 and the sections of section grooves reduced 9o. This can be achieved by providing high precision machining of corresponding parts, but also by providing means for adjusting the the axial position of the kinematic stator 9b with respect to the kinematic rotor 9a, as will be described below.
  • stator kinematic 9b can be moved axially between a close position shown in FIG. 1 and a maximum distance position illustrated in FIG.
  • the kinematic rotor 9a can slide axially in the pump body 100, with the interposition of an annular seal 100a, in being guided by guide means 21 and biased by means of displacement such as a jack not shown.
  • Axial position adjustment means make it possible to reduce leaks as much as possible when in the closest approach position of FIG. enabling the constitution of a kinematic pump with improved performance.
  • the composite pump takes up the essential means of the embodiment of FIG. 1, with the molecular pumping stages 5, possibly the turbomolecular pumping stages 4, with the stage of kinematic pumping 9, and with the motor 7 engaged in the posterior cavity 5c and mounted on the central portion of the motor shaft 8 whose upstream end 8a is coupled to the molecular rotor 5a and whose downstream zone 8b is coupled to the rotor kinematic 9a.
  • the means for protect the bearings 15 and 16 against the harmful action of corrosive gases, powders and dust that the pump is often required to extract vacuum chambers for this is provided a purge 19 by which one can introduce a neutral gas of purge in the housing 100b containing the engine 7, and means are provided for aspirate the neutral gas through the areas occupied by the bearings 15 and 16.
  • a suction duct 20 which goes directly from the discharge of the molecular pumping stage 5 to the pumping stage kinematic 9, at the periphery of the disk forming the kinematic rotor 9a, and reverse the direction of the helical grooves in the last pumping stage 5th molecular so that it forms an upstream dynamic seal that aspires the gas from the upstream bearing 15 to push back to the pumping stage 9.
  • the second transverse face upstream 11a of the kinematic rotor disk 9a as illustrated in FIG. 3, comprises oblique centrifugal ribs 11c-11f for cooperating with a face corresponding 11 b of the pump body 100 and constitute a dynamic joint downstream which draws the gases from the downstream bearing 16 to the primary pumping stage 9.
  • the motor 7 is powered by electrical conductors connected to a power supply connector 18.
  • FIG. 3 An example of another possible structure of such a primary stage is shown in Figure 3. It is considered that the face 11a constitutes the main face of the rotor 9a, and that the oblique centrifugal ribs 11c-11f, cooperating with a corresponding transverse face of the stator or body of pump, constitute a kinematic stage with viscous drive. We can then design a stack of several similar disks including a transverse face has the oblique centrifugal ribs which cooperate with one side cross section of a multi-stage kinematic stator.
  • This embodiment is also compatible with the presence of a additional kinematic pumping stage consisting of the transverse face upstream of the rotor with other oblique centrifugal ribs.
  • the embodiment is also compatible with a provision special dynamic seals and neutral gas purges in the bearing area.
  • a plurality of pumping stages can be provided molecular and / or turbomolecular.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Electrophonic Musical Instruments (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP04292018A 2003-08-29 2004-08-09 Vakuumpumpe Expired - Lifetime EP1510697B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0310282A FR2859250B1 (fr) 2003-08-29 2003-08-29 Pompe a vide
FR0310282 2003-08-29

Publications (2)

Publication Number Publication Date
EP1510697A1 true EP1510697A1 (de) 2005-03-02
EP1510697B1 EP1510697B1 (de) 2006-05-03

Family

ID=34089871

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04292018A Expired - Lifetime EP1510697B1 (de) 2003-08-29 2004-08-09 Vakuumpumpe

Country Status (6)

Country Link
US (1) US7160081B2 (de)
EP (1) EP1510697B1 (de)
JP (1) JP2005076631A (de)
AT (1) ATE325274T1 (de)
DE (1) DE602004000798T2 (de)
FR (1) FR2859250B1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020178042A1 (fr) * 2019-03-05 2020-09-10 Pfeiffer Vacuum Pompe à vide turbomoléculaire et procédé de purge

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0229356D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
DE10353034A1 (de) * 2003-11-13 2005-06-09 Leybold Vakuum Gmbh Mehrstufige Reibungsvakuumpumpe
GB0329839D0 (en) * 2003-12-23 2004-01-28 Boc Group Plc Vacuum pump
US20090081022A1 (en) * 2007-09-21 2009-03-26 Honeywell International Inc. Radially Staged Microscale Turbomolecular Pump
DE102008024764A1 (de) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe
DE102008036623A1 (de) * 2008-08-06 2010-02-11 Oerlikon Leybold Vacuum Gmbh Verwendung eines Wälzlagers zur Lagerung rotierender Bauteile in Vakuumeinirchtungen sowie Vakuumeinrichtung
US8070419B2 (en) * 2008-12-24 2011-12-06 Agilent Technologies, Inc. Spiral pumping stage and vacuum pump incorporating such pumping stage
US8152442B2 (en) * 2008-12-24 2012-04-10 Agilent Technologies, Inc. Centripetal pumping stage and vacuum pump incorporating such pumping stage
DE102009021642B4 (de) * 2009-05-16 2021-07-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
CN102483069B (zh) * 2009-08-28 2016-09-07 埃地沃兹日本有限公司 真空泵以及真空泵中使用的部件
DE202011002809U1 (de) * 2011-02-17 2012-06-12 Oerlikon Leybold Vacuum Gmbh Statorelement sowie Hochvakuumpumpe
KR101704053B1 (ko) * 2011-09-06 2017-02-07 현대자동차주식회사 진공펌프 통합형 주행 안정성 제어 장치
CN103195724B (zh) * 2012-01-04 2015-05-27 李晨 立式鼠笼分子泵
WO2013116820A1 (en) * 2012-02-03 2013-08-08 Invacare Corporation Pumping device
EP2956674B1 (de) * 2013-02-15 2019-05-01 Edwards Limited Vakuumpumpe
DE102013203421A1 (de) * 2013-02-28 2014-08-28 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102014112553A1 (de) * 2014-09-01 2016-03-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB201715151D0 (en) * 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0959253A2 (de) * 1998-05-20 1999-11-24 The BOC Group plc Vakuumpumpe
EP1201929A2 (de) * 2000-10-31 2002-05-02 Seiko Instruments Inc. Vakuumpumpe
EP1318309A2 (de) * 2001-12-04 2003-06-11 BOC Edwards Technologies, Limited Vakuumpumpe

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3130890B2 (ja) * 1999-02-25 2001-01-31 セイコー精機株式会社 磁気軸受装置及び磁気軸受制御装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0959253A2 (de) * 1998-05-20 1999-11-24 The BOC Group plc Vakuumpumpe
EP1201929A2 (de) * 2000-10-31 2002-05-02 Seiko Instruments Inc. Vakuumpumpe
EP1318309A2 (de) * 2001-12-04 2003-06-11 BOC Edwards Technologies, Limited Vakuumpumpe

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020178042A1 (fr) * 2019-03-05 2020-09-10 Pfeiffer Vacuum Pompe à vide turbomoléculaire et procédé de purge
FR3093544A1 (fr) * 2019-03-05 2020-09-11 Pfeiffer Vacuum Pompe à vide turbomoléculaire et procédé de purge
CN113518863A (zh) * 2019-03-05 2021-10-19 普发真空公司 涡轮分子真空泵和净化方法

Also Published As

Publication number Publication date
US20050047904A1 (en) 2005-03-03
FR2859250A1 (fr) 2005-03-04
FR2859250B1 (fr) 2005-11-11
ATE325274T1 (de) 2006-06-15
DE602004000798T2 (de) 2007-08-16
JP2005076631A (ja) 2005-03-24
EP1510697B1 (de) 2006-05-03
DE602004000798D1 (de) 2006-06-08
US7160081B2 (en) 2007-01-09

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