EP0401741B1 - Zweistufige Trockenprimärpumpe - Google Patents

Zweistufige Trockenprimärpumpe Download PDF

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Publication number
EP0401741B1
EP0401741B1 EP90110602A EP90110602A EP0401741B1 EP 0401741 B1 EP0401741 B1 EP 0401741B1 EP 90110602 A EP90110602 A EP 90110602A EP 90110602 A EP90110602 A EP 90110602A EP 0401741 B1 EP0401741 B1 EP 0401741B1
Authority
EP
European Patent Office
Prior art keywords
pump
screw
entrainment
stage
screw pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP90110602A
Other languages
English (en)
French (fr)
Other versions
EP0401741A1 (de
Inventor
Jean-Marie Crinquette
Jacques Long
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Priority to AT90110602T priority Critical patent/ATE86364T1/de
Publication of EP0401741A1 publication Critical patent/EP0401741A1/de
Application granted granted Critical
Publication of EP0401741B1 publication Critical patent/EP0401741B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running

Definitions

  • the present invention relates to a two-stage dry primary pump.
  • a dry vane pump avoids, compared to an oil lubricated vane pump, the migration of oil vapor in the enclosure to be pumped, but the main drawback lies in the existence of a high dry friction causing rapid wear and accelerated degradation of pump performance.
  • dry primary screw pumps consisting of a single stage. These pumps are capable, under steady conditions, of sucking a fluid from a limit pressure of the order of 10 ⁇ 2 mbar to atmospheric pressure. Their advantage is the absence of contact between the screws, therefore absence of friction, which makes them very reliable. But in the pump area where the pressure is higher than 10 mbar, they absorb a high power which is mainly dissipated in heat. The part of the screws working in this zone at high pressures (greater than 10 mbar) is then subjected to a significant heating which causes strong asymmetric expansions and incompatible with internal clearances. Increasing the clearance between the two screws would not constitute a satisfactory solution because, under these conditions, the performance would no longer be ensured, in particular the suction flow and the limit pressure.
  • the present invention aims to provide a solution to this problem, therefore to obtain a dry primary pump capable of sucking, in steady state, a fluid from a limit pressure of the order of 10 ⁇ 2 mbar, or even lower. , up to atmospheric pressure, and with a wide range of suction flow rates, from 50 m3 / h to several thousand m3 / h.
  • the invention consists in limiting the discharge pressure of the screw pump, in order to limit its heating, and in adding a second stage constituted by a viscous and / or turbulent drive pump, making it possible to transfer the energy to the second stage. of compression degraded in heat.
  • the screw pump no longer has a screw part working at high pressures and undergoing large expansions.
  • the average free path of the molecules is relatively high, and this pump can then operate with greater internal clearances.
  • the present invention thus relates to a two-stage dry primary pump, characterized in that it comprises in a single common stator, low pressure side, a screw pump, and, high pressure side, a drive pump, a conduit connection ensuring communication between the screw pump and the drive pump.
  • the connecting conduit is in communication with the suction side of the screw pump, therefore the suction side of the primary pump, by means of a by-pass provided with a relief valve.
  • the connecting duct is in communication with the discharge side of the drive pump, therefore the discharge side of the primary pump, by means of a bypass provided with a relief valve.
  • the primary pump comprises these two embodiments.
  • the speed of rotation of each stage may be different.
  • a single motor can run the screw pump and the drive pump simultaneously, or two motors can independently drive the screw pump and the drive pump. The latter solution makes it possible in particular to independently vary the rotation speeds, therefore the pumping speeds, in applications where pressure regulation is necessary.
  • the motor or motors can be conventional motors or vacuum rotors.
  • FIG. 1 shows a pump with a single motor.
  • Figure 2 shows the same pump with two motors.
  • the primary pump comprises a frame 1 constituting a stator, a suction inlet 4, a discharge outlet 5, a low pressure stage constituted by a dry screw pump 10, and a high pressure stage constituted by a drive pump 20.
  • the frame 1 may include cooling channels 2, which allow, by circulation of a liquid (water, oil, ...) to ensure thermal stabilization of the assembly. The heat exchange with the ambient environment takes place by natural or forced convection.
  • the pump 10 comprises two conjugated screws 11, 12, mounted respectively on two shafts 13, 14 and synchronized in drive by two pinions 41, 44, the pinion 41 being driven by an electric motor 50.
  • the two pinions 41, 44 are installed in an oil box 3 secured to the chassis 1 and sealed against the suction inlet 4 by two seals 48, 49.
  • the two shafts 13, 14 rotate in two bearings respectively 42, 43 and 45, 46.
  • L 'shaft 13 rotates in another bearing 47 located at the other end, at the connection conduit.
  • the pump 20 is a viscous and / or turbulent drive pump, that is to say a pump in which the pumping effect is obtained by friction from a rotor / stator assembly 21 comprising one or more helical grooves variable pitch, whose profile varies between suction and discharge, and rotating at high speed.
  • the pump 20 shown is cylindrical but, of course, it can be in the form of a disc or a cone for example.
  • the shaft 22 of the pump 20 is mechanically linked to the shaft 14 of the screw 12, so that the motor 50 alone drives the pumps 10 and 20.
  • the shaft 22 rotates in a level 23.
  • the primary pump comprises two by-passes 60, 70 each equipped with a relief valve 61, 71 to ensure the distribution of the flow in the transient phases.
  • the bypass 60 allows the excess gas pumped by the low pressure stage to be recirculated to the suction side 4, and the bypass 70 allows recirculation of excess gas to the discharge side 5.
  • valves 61 and 71 can be controlled or automatic, and close under the action of a spring 62, 72 (as shown) or close under the effect of their own weight. But they are, in all cases, closed when there is compatibility between the flow discharged by the low pressure stage and the flow sucked by the high pressure stage.
  • the pump 20 is driven separately by an electric motor 80, and, in this case, the shaft 22 of this pump 20 is no longer linked to the shaft 14 of the screw 12, but to the electric motor 80.
  • FIG. 2 makes it possible to have a speed of rotation of the pump 20 different from that of the screw pump 10.
  • the speed of rotation of the pump 20 can then be easily adapted to the flow rate and to the discharge pressure of the pump 10.
  • the volume flow treated is low, as a consequence of the high compression rate obtained in the first stage.
  • Such a primary pump works as follows: At start-up, during the emptying of an enclosure, the overpressure created on the discharge of the low pressure stage causes the valves 61, 71 to open.
  • valve 71 closes, the valve 61 remaining open.
  • valve 61 closes and the primary pump operates in steady state.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Rotary Pumps (AREA)
  • Details And Applications Of Rotary Liquid Pumps (AREA)
  • Details Of Reciprocating Pumps (AREA)

Claims (6)

  1. Trocken laufende zweistufige Primärpumpe, dadurch gekennzeichnet, daß sie in einem einzigen gemeinsamen Stator auf der Niederdruckseite eine Schraubenpumpe (10), und auf der Hochdruckseite eine Treibpumpe (20) aufweist, wobei eine Verbindungsleitung (30) die Verbindung zwischen der Schraubenpumpe (10) und der Treibpumpe (20) herstellt.
  2. Pumpe nach Anspruch 1, dadurch gekennzeichnet, daß die Verbindungsleitung (30) mit der Saugseite der Schraubenpumpe über einen mit einem Überdruckventil (61) versehenen By-Pass (60) in Verbindung steht.
  3. Pumpe nach einem der Ansprüche 1 und 2, dadurch gekennzeichnet, daß die Verbindungsleitung (30) über einen mit einem Überdruckventil versehenen By-Pass (70) mit der Auslaßseite der Treibpumpe (20) in Verbindung steht.
  4. Pumpe nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß sie einen einzigen Motor (50) aufweist, der die Schraubenpumpe (10) und die Treibpumpe (20) antreibt.
  5. Pumpe nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß sie zwei getrennte Motoren (50, 80) aufweist, von denen der eine die Schraubenpumpe und der andere die Treibpumpe antreibt.
  6. Pumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß sie Kühlkanäle (2) aufweist.
EP90110602A 1989-06-05 1990-06-05 Zweistufige Trockenprimärpumpe Expired - Lifetime EP0401741B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT90110602T ATE86364T1 (de) 1989-06-05 1990-06-05 Zweistufige trockenprimaerpumpe.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8907392 1989-06-05
FR8907392A FR2647853A1 (fr) 1989-06-05 1989-06-05 Pompe primaire seche a deux etages

Publications (2)

Publication Number Publication Date
EP0401741A1 EP0401741A1 (de) 1990-12-12
EP0401741B1 true EP0401741B1 (de) 1993-03-03

Family

ID=9382363

Family Applications (1)

Application Number Title Priority Date Filing Date
EP90110602A Expired - Lifetime EP0401741B1 (de) 1989-06-05 1990-06-05 Zweistufige Trockenprimärpumpe

Country Status (8)

Country Link
US (1) US5040949A (de)
EP (1) EP0401741B1 (de)
JP (1) JPH0333492A (de)
AT (1) ATE86364T1 (de)
DE (1) DE69000990T2 (de)
ES (1) ES2039997T3 (de)
FR (1) FR2647853A1 (de)
RU (1) RU1771514C (de)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
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ES2030561T3 (es) * 1988-06-24 1992-11-01 Siemens Aktiengesellschaft Grupo de bombas de vacio de varias fases.
JPH05195957A (ja) * 1992-01-23 1993-08-06 Matsushita Electric Ind Co Ltd 真空ポンプ
JPH05209589A (ja) * 1992-01-31 1993-08-20 Matsushita Electric Ind Co Ltd 流体回転装置
JPH05272478A (ja) * 1992-01-31 1993-10-19 Matsushita Electric Ind Co Ltd 真空ポンプ
KR100190310B1 (ko) * 1992-09-03 1999-06-01 모리시따 요오이찌 진공배기장치
US5888053A (en) * 1995-02-10 1999-03-30 Ebara Corporation Pump having first and second outer casing members
EP1101943B1 (de) * 1995-02-28 2003-12-03 Anest Iwata Corporation Kontrollsystem für zweistufige Vakuumpumpe
EP0798463A3 (de) * 1996-03-29 1998-02-25 Anest Iwata Corporation Ölfreie Spiralvakuumpumpe
DE19704234B4 (de) * 1997-02-05 2006-05-11 Pfeiffer Vacuum Gmbh Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen
GB9717400D0 (en) 1997-08-15 1997-10-22 Boc Group Plc Vacuum pumping systems
DK1070848T3 (da) * 1999-07-19 2004-08-09 Sterling Fluid Sys Gmbh Fortrængningsmaskine til kompressible medier
DE10114585A1 (de) * 2001-03-24 2002-09-26 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE20110360U1 (de) * 2001-06-22 2002-10-31 Ghh Rand Schraubenkompressoren Zweistufiger Schraubenkompressor
DE10142567A1 (de) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
US6589023B2 (en) 2001-10-09 2003-07-08 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
ITMI20020263A1 (it) * 2002-02-12 2003-08-12 Alfatech Srl Pompa per il trasporto di masse fuse di polimeri ed elastomeri
JP2003343469A (ja) * 2002-03-20 2003-12-03 Toyota Industries Corp 真空ポンプ
GB0223769D0 (en) * 2002-10-14 2002-11-20 Boc Group Plc A pump
NL1024480C2 (nl) 2003-10-08 2005-04-11 Draka Fibre Technology Bv Werkwijze ter vervaardiging van een voorvorm voor optische vezels, alsmede werkwijze ter vervaardiging van optische vezels.
GB0416385D0 (en) * 2004-07-22 2004-08-25 Boc Group Plc Gas abatement
CN102099582B (zh) * 2008-07-22 2014-05-28 厄利孔莱博尔德真空技术有限责任公司 真空泵、特别是罗茨泵
DE102010019402A1 (de) * 2010-05-04 2011-11-10 Oerlikon Leybold Vacuum Gmbh Schrauben-Vakuumpumpe
US11215180B2 (en) 2012-06-28 2022-01-04 Sterling Industry Consult Gmbh Method and pump arrangement for evacuating a chamber
US20150078927A1 (en) * 2013-09-13 2015-03-19 Agilent Technologies, Inc. Multi-Stage Pump Having Reverse Bypass Circuit
DE202014005279U1 (de) * 2014-06-26 2015-10-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-System
CN107002680A (zh) * 2014-09-26 2017-08-01 阿特利耶博世股份有限公司 用于产生真空的泵送系统及利用此泵送系统的泵送方法
CN107002681A (zh) * 2014-10-02 2017-08-01 阿特利耶博世股份有限公司 用于产生真空的泵送系统及利用此泵送系统的泵送方法
DE102016100957A1 (de) * 2016-01-20 2017-07-20 FRISTAM Pumpen Schaumburg GmbH Verdrängerpumpe
GB201700998D0 (en) * 2017-01-20 2017-03-08 Edwards Ltd Multi-stage vacuum booster pump coupling
GB201701000D0 (en) 2017-01-20 2017-03-08 Edwards Ltd Multi-stage vacuum booster pump coupling
IT201800009944A1 (it) 2018-10-31 2020-05-01 Nova Rotors Srl "pompa volumetrica"
GB2583949A (en) * 2019-05-15 2020-11-18 Edwards Ltd A vacuum pump comprising a relief valve and a method of assembly of the relief valve
CN111520321B (zh) * 2020-05-15 2022-09-13 大连宏亚泵业有限公司 一种机械密封化工泵及其使用方法
GB2606224B (en) * 2021-04-30 2024-01-31 Edwards Ltd Stator for a vacuum pump

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JPS5267810A (en) * 1975-12-03 1977-06-04 Aisin Seiki Co Ltd High vacuum pump
JPS62243982A (ja) * 1986-04-14 1987-10-24 Hitachi Ltd ２段型真空ポンプ装置およびその運転方法
JPH0784871B2 (ja) * 1986-06-12 1995-09-13 株式会社日立製作所 真空排気装置
US4781553A (en) * 1987-07-24 1988-11-01 Kabushiki Kaisha Kobe Seiko Sho Screw vacuum pump with lubricated bearings and a plurality of shaft sealing means

Also Published As

Publication number Publication date
ES2039997T3 (es) 1993-10-01
ATE86364T1 (de) 1993-03-15
JPH0333492A (ja) 1991-02-13
RU1771514C (ru) 1992-10-23
DE69000990T2 (de) 1993-06-09
DE69000990D1 (de) 1993-04-08
EP0401741A1 (de) 1990-12-12
FR2647853A1 (fr) 1990-12-07
US5040949A (en) 1991-08-20

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