EP0798463A3 - Ölfreie Spiralvakuumpumpe - Google Patents

Ölfreie Spiralvakuumpumpe Download PDF

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Publication number
EP0798463A3
EP0798463A3 EP97105399A EP97105399A EP0798463A3 EP 0798463 A3 EP0798463 A3 EP 0798463A3 EP 97105399 A EP97105399 A EP 97105399A EP 97105399 A EP97105399 A EP 97105399A EP 0798463 A3 EP0798463 A3 EP 0798463A3
Authority
EP
European Patent Office
Prior art keywords
revolving
stationary
laps
scroll
scrolls
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP97105399A
Other languages
English (en)
French (fr)
Other versions
EP0798463A2 (de
Inventor
Masaru Tsuchiya
Shuji Haga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anest Iwata Corp
Original Assignee
Anest Iwata Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP10419296A external-priority patent/JP3884101B2/ja
Priority claimed from JP10343196A external-priority patent/JP3815747B2/ja
Application filed by Anest Iwata Corp filed Critical Anest Iwata Corp
Publication of EP0798463A2 publication Critical patent/EP0798463A2/de
Publication of EP0798463A3 publication Critical patent/EP0798463A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F04C18/0223—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving with symmetrical double wraps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Rotary Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP97105399A 1996-03-29 1997-04-01 Ölfreie Spiralvakuumpumpe Withdrawn EP0798463A3 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP103431/96 1996-03-29
JP10419296A JP3884101B2 (ja) 1996-03-29 1996-03-29 オイルフリースクロール真空ポンプ
JP10343196A JP3815747B2 (ja) 1996-03-29 1996-03-29 オイルフリー真空ポンプ
JP104192/96 1996-03-29

Publications (2)

Publication Number Publication Date
EP0798463A2 EP0798463A2 (de) 1997-10-01
EP0798463A3 true EP0798463A3 (de) 1998-02-25

Family

ID=26444067

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97105399A Withdrawn EP0798463A3 (de) 1996-03-29 1997-04-01 Ölfreie Spiralvakuumpumpe

Country Status (1)

Country Link
EP (1) EP0798463A3 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103573627A (zh) * 2012-08-07 2014-02-12 思科涡旋科技(杭州)有限公司 一种多级浮动涡旋真空泵及其使用方法
DE102014117400A1 (de) 2014-11-27 2016-06-02 Pfeiffer Vacuum Gmbh Spiralvakuumpumpe
EP3508727B1 (de) 2015-10-06 2020-05-13 Pfeiffer Vacuum Gmbh Scrollpumpe und verfahren zum betreiben einer scrollpumpe
CN109185127B (zh) * 2018-07-28 2020-04-28 西安交通大学 一种无油涡旋压缩机的冷却结构
JP7220692B2 (ja) * 2019-10-07 2023-02-10 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ、スクロールポンプ及びその製造方法
EP3647599B1 (de) * 2019-10-07 2021-12-22 Pfeiffer Vacuum Gmbh Vakuumpumpe, scrollpumpe und herstellungsverfahren für solche
CN111486093A (zh) * 2020-05-09 2020-08-04 江阴华西节能技术有限公司 一种用于制药行业的干式真空主机
CN112196789A (zh) * 2020-08-24 2021-01-08 河北昊方新能源科技有限公司 一种无油涡旋气泵
DE102020134469A1 (de) 2020-12-21 2022-06-23 OET GmbH Scrollverdichter zur Erzeugung von ölfreier Druckluft

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1121079A (fr) * 1955-02-03 1956-07-20 Turbine volumétrique
DE3721611A1 (de) * 1987-06-30 1989-01-19 Alcatel Hochvakuumtechnik Gmbh Mechanische vakuumpumpe mit einer federbelasteten rueckschlagklappe
EP0401741A1 (de) * 1989-06-05 1990-12-12 Alcatel Cit Zweistufige Trockenprimärpumpe
DE4129897A1 (de) * 1991-09-09 1993-03-11 Koterewa Katharina Vorrichtung zur steuerung des verbundes mehrstufiger vakuumpumpen
EP0578890A1 (de) * 1992-07-13 1994-01-19 Copeland Corporation Spiralverdichter mit Auslassdiffusor
EP0579888A1 (de) * 1992-07-20 1994-01-26 AGINFOR AG für industrielle Forschung Rotierende Spiralpumpe
DE4341716C1 (de) * 1993-12-03 1995-03-09 Mannesmann Ag Luftgekühlter Flügelzellenverdichter
EP0687815A2 (de) * 1994-06-17 1995-12-20 Asuka Japan Co., Ltd. Spiralverdrängermaschine
EP0777053A1 (de) * 1995-11-30 1997-06-04 Anest Iwata Corporation Spiralmaschine

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1121079A (fr) * 1955-02-03 1956-07-20 Turbine volumétrique
DE3721611A1 (de) * 1987-06-30 1989-01-19 Alcatel Hochvakuumtechnik Gmbh Mechanische vakuumpumpe mit einer federbelasteten rueckschlagklappe
EP0401741A1 (de) * 1989-06-05 1990-12-12 Alcatel Cit Zweistufige Trockenprimärpumpe
DE4129897A1 (de) * 1991-09-09 1993-03-11 Koterewa Katharina Vorrichtung zur steuerung des verbundes mehrstufiger vakuumpumpen
EP0578890A1 (de) * 1992-07-13 1994-01-19 Copeland Corporation Spiralverdichter mit Auslassdiffusor
EP0579888A1 (de) * 1992-07-20 1994-01-26 AGINFOR AG für industrielle Forschung Rotierende Spiralpumpe
DE4341716C1 (de) * 1993-12-03 1995-03-09 Mannesmann Ag Luftgekühlter Flügelzellenverdichter
EP0687815A2 (de) * 1994-06-17 1995-12-20 Asuka Japan Co., Ltd. Spiralverdrängermaschine
EP0777053A1 (de) * 1995-11-30 1997-06-04 Anest Iwata Corporation Spiralmaschine

Also Published As

Publication number Publication date
EP0798463A2 (de) 1997-10-01

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