EP0798463A3 - Oil-free scroll vacuum pump - Google Patents

Oil-free scroll vacuum pump Download PDF

Info

Publication number
EP0798463A3
EP0798463A3 EP97105399A EP97105399A EP0798463A3 EP 0798463 A3 EP0798463 A3 EP 0798463A3 EP 97105399 A EP97105399 A EP 97105399A EP 97105399 A EP97105399 A EP 97105399A EP 0798463 A3 EP0798463 A3 EP 0798463A3
Authority
EP
European Patent Office
Prior art keywords
revolving
stationary
laps
scroll
scrolls
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP97105399A
Other languages
German (de)
French (fr)
Other versions
EP0798463A2 (en
Inventor
Masaru Tsuchiya
Shuji Haga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anest Iwata Corp
Original Assignee
Anest Iwata Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP10419296A external-priority patent/JP3884101B2/en
Priority claimed from JP10343196A external-priority patent/JP3815747B2/en
Application filed by Anest Iwata Corp filed Critical Anest Iwata Corp
Publication of EP0798463A2 publication Critical patent/EP0798463A2/en
Publication of EP0798463A3 publication Critical patent/EP0798463A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F04C18/0223—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving with symmetrical double wraps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Rotary Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

A double-lap oil-free scroll vacuum pump is disclosed, which comprises a revolving scroll 3 with revolving laps 26 and 27 provided on both sides of a disc, stationary scrolls provided on their surfaces 4b, 5b facing each surface 3d, 3e of said disc with stationary laps 6, 7 in engagement with the revolving laps 26, 27, said revolving laps 26, 27 being arranged in frictional contact with said surfaces 4b, 5b of the stationary scrolls, and a rotationary drive shaft 11 penetrating the stationary and revolving scrolls and eccentrically fitted in the disc of the revolving scroll 3, wherein the rotational drive shaft 11 drives the revolving scroll 3 to cause discharge of compressed gas from a last compression chamber. A housing 19 is mounted on the outer sides of the stationary scrolls, and accommodates a drive source of the rotational drive shaft 11. Discharge passages 4d and 5d are provided for discharging compressed gas from the sides of the surfaces 3d and 3e of the revolving scroll 3. The discharge passages 4d and 5d extend outwardly from the housing 19.
EP97105399A 1996-03-29 1997-04-01 Oil-free scroll vacuum pump Withdrawn EP0798463A3 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP10419296A JP3884101B2 (en) 1996-03-29 1996-03-29 Oil-free scroll vacuum pump
JP104192/96 1996-03-29
JP10343196A JP3815747B2 (en) 1996-03-29 1996-03-29 Oil-free vacuum pump
JP103431/96 1996-03-29

Publications (2)

Publication Number Publication Date
EP0798463A2 EP0798463A2 (en) 1997-10-01
EP0798463A3 true EP0798463A3 (en) 1998-02-25

Family

ID=26444067

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97105399A Withdrawn EP0798463A3 (en) 1996-03-29 1997-04-01 Oil-free scroll vacuum pump

Country Status (1)

Country Link
EP (1) EP0798463A3 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103573627A (en) * 2012-08-07 2014-02-12 思科涡旋科技(杭州)有限公司 Multilevel floating vortex vacuum pumps and usage method thereof
DE102014117400A1 (en) 2014-11-27 2016-06-02 Pfeiffer Vacuum Gmbh Scroll vacuum pump
EP3508727B1 (en) 2015-10-06 2020-05-13 Pfeiffer Vacuum Gmbh Scroll pump and method for operating a scroll pump
CN109185127B (en) * 2018-07-28 2020-04-28 西安交通大学 Cooling structure of oil-free scroll compressor
EP3754200B1 (en) * 2019-10-07 2021-12-08 Pfeiffer Vacuum Gmbh Scroll vacuum pump and assembly method
JP7220692B2 (en) * 2019-10-07 2023-02-10 プファイファー・ヴァキューム・ゲーエムベーハー Vacuum pump, scroll pump and manufacturing method thereof
CN111486093A (en) * 2020-05-09 2020-08-04 江阴华西节能技术有限公司 Dry type vacuum main machine for pharmaceutical industry
DE102020134469A1 (en) 2020-12-21 2022-06-23 OET GmbH Scroll compressor for generating oil-free compressed air

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1121079A (en) * 1955-02-03 1956-07-20 Volumetric turbine
DE3721611A1 (en) * 1987-06-30 1989-01-19 Alcatel Hochvakuumtechnik Gmbh MECHANICAL VACUUM PUMP WITH A SPRING-LOADED CHECK VALVE
EP0401741A1 (en) * 1989-06-05 1990-12-12 Alcatel Cit Two stage primary dry pump
DE4129897A1 (en) * 1991-09-09 1993-03-11 Koterewa Katharina Control for interlinking of multistage vacuum pumps - has connection channel between pump stages with stroke valve, coupled to discharge valve
EP0578890A1 (en) * 1992-07-13 1994-01-19 Copeland Corporation Scroll compressor with discharge diffuser
EP0579888A1 (en) * 1992-07-20 1994-01-26 AGINFOR AG für industrielle Forschung Rotating scroll pump
DE4341716C1 (en) * 1993-12-03 1995-03-09 Mannesmann Ag Air-cooled vane compressor
EP0687815A2 (en) * 1994-06-17 1995-12-20 Asuka Japan Co., Ltd. Scroll type fluid machine
EP0777053A1 (en) * 1995-11-30 1997-06-04 Anest Iwata Corporation Scroll fluid machine

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1121079A (en) * 1955-02-03 1956-07-20 Volumetric turbine
DE3721611A1 (en) * 1987-06-30 1989-01-19 Alcatel Hochvakuumtechnik Gmbh MECHANICAL VACUUM PUMP WITH A SPRING-LOADED CHECK VALVE
EP0401741A1 (en) * 1989-06-05 1990-12-12 Alcatel Cit Two stage primary dry pump
DE4129897A1 (en) * 1991-09-09 1993-03-11 Koterewa Katharina Control for interlinking of multistage vacuum pumps - has connection channel between pump stages with stroke valve, coupled to discharge valve
EP0578890A1 (en) * 1992-07-13 1994-01-19 Copeland Corporation Scroll compressor with discharge diffuser
EP0579888A1 (en) * 1992-07-20 1994-01-26 AGINFOR AG für industrielle Forschung Rotating scroll pump
DE4341716C1 (en) * 1993-12-03 1995-03-09 Mannesmann Ag Air-cooled vane compressor
EP0687815A2 (en) * 1994-06-17 1995-12-20 Asuka Japan Co., Ltd. Scroll type fluid machine
EP0777053A1 (en) * 1995-11-30 1997-06-04 Anest Iwata Corporation Scroll fluid machine

Also Published As

Publication number Publication date
EP0798463A2 (en) 1997-10-01

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