EP0401741A1 - Two stage primary dry pump - Google Patents

Two stage primary dry pump Download PDF

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Publication number
EP0401741A1
EP0401741A1 EP90110602A EP90110602A EP0401741A1 EP 0401741 A1 EP0401741 A1 EP 0401741A1 EP 90110602 A EP90110602 A EP 90110602A EP 90110602 A EP90110602 A EP 90110602A EP 0401741 A1 EP0401741 A1 EP 0401741A1
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EP
European Patent Office
Prior art keywords
pump
screw
drive
stage
screw pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP90110602A
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German (de)
French (fr)
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EP0401741B1 (en
Inventor
Jean-Marie Crinquette
Jacques Long
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Alcatel CIT SA
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Alcatel CIT SA
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Publication date
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Priority to AT90110602T priority Critical patent/ATE86364T1/en
Publication of EP0401741A1 publication Critical patent/EP0401741A1/en
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Publication of EP0401741B1 publication Critical patent/EP0401741B1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running

Definitions

  • the present invention relates to a two-stage dry primary pump.
  • a dry vane pump avoids, compared to an oil lubricated vane pump, the migration of oil vapor in the enclosure to be pumped, but the main drawback lies in the existence of a high dry friction causing rapid wear and accelerated degradation of pump performance.
  • dry primary screw pumps consisting of a single stage. These pumps are capable, under steady conditions, of sucking a fluid from a limit pressure of the order of 10 ⁇ 2 mbar to atmospheric pressure. Their advantage is the absence of contact between the screws, therefore absence of friction, which makes them very reliable. But in the pump area where the pressure is higher than 10 mbar, they absorb a high power which is mainly dissipated in heat. The part of the screws working in this zone at high pressures (greater than 10 mbar) is then subjected to a significant heating which causes strong asymmetric expansions and incompatible with internal clearances. Increasing the clearance between the two screws would not constitute a satisfactory solution because, under these conditions, the performance would no longer be ensured, in particular the suction flow and the limit pressure.
  • the present invention aims to provide a solution to this problem, therefore to obtain a dry primary pump capable of sucking, in steady state, a fluid from a limit pressure of the order of 10 ⁇ 2 mbar, or even lower. , up to atmospheric pressure, and with a wide range of aspirated flow rates, from 50 m3 / h to several thousand m3 / h.
  • the invention consists in limiting the discharge pressure of the screw pump, in order to limit its heating, and in adding a second stage constituted by a viscous and / or turbulent drive pump, making it possible to transfer the energy to the second stage. of compression degraded in heat.
  • the screw pump no longer has a screw part working at high pressures and undergoing large expansions.
  • the average free path of the molecules is relatively high, and this pump can then operate with greater internal clearances.
  • the present invention thus relates to a two-stage dry primary pump, characterized in that it comprises, in a single common stator, on the low pressure side, a screw pump, and, on the high pressure side, a drive pump, a conduit. connection ensuring communication between the screw pump and the drive pump.
  • the connecting duct is in communication with the suction side of the screw pump, therefore the suction side of the primary pump, by means of a by-pass provided with a relief valve.
  • the connecting duct is in communication with the discharge side of the drive pump, therefore the discharge side of the primary pump, by means of a bypass provided with a relief valve.
  • the primary pump comprises these two embodiments.
  • the speed of rotation of each stage may be different.
  • a single motor can run the screw pump and the drive pump simultaneously, or two motors can independently drive the screw pump and the drive pump. The latter solution makes it possible in particular to independently vary the rotation speeds, therefore the pumping speeds, in applications where pressure regulation is necessary.
  • the motor or motors can be conventional motors or vacuum rotors.
  • the primary pump comprises a frame 1 constituting a stator, a suction inlet 4, a discharge outlet 5, a low pressure stage constituted by a dry screw pump 10, and a high pressure stage constituted by a drive pump 20.
  • the frame 1 may include cooling channels 2, which allow, by circulation of a liquid (water, oil, ...) to ensure thermal stabilization of the assembly. The heat exchange with the ambient environment takes place by natural or forced convection.
  • the pump 10 comprises two conjugated screws 11, 12, mounted respectively on two shafts 13, 14 and synchronized in drive by two pinions 41, 44, the pinion 41 being driven by an electric motor 50.
  • the two pinions 41, 44 are installed in an oil box 3 secured to the chassis 1 and sealed against the suction inlet 4 by two seals 48, 49.
  • the two shafts 13, 14 rotate in two bearings respectively 42, 43 and 45, 46.
  • L 'shaft 13 rotates in another bearing 47 located at the other end, at the connection conduit.
  • the pump 20 is a viscous and / or turbulent drive pump, that is to say a pump in which the pumping effect is obtained by friction from a rotor / stator assembly 21 comprising one or more helical grooves variable pitch, whose profile varies between suction and discharge, and rotating at high speed.
  • the pump 20 shown is cylindrical but, of course, it can be in the form of a disc or a cone for example.
  • the shaft 22 of the pump 20 is mechanically linked to the shaft 14 of the screw 12, so that the motor 50 alone drives the pumps 10 and 20.
  • the shaft 22 rotates in a level 23.
  • the primary pump comprises two by-passes 60, 70 each equipped with a relief valve 61, 71 to ensure the distribution of the flow in the transient phases.
  • the bypass 60 allows the excess gas pumped by the low pressure stage to be recirculated to the suction side 4, and the bypass 70 allows recirculation of excess gas to the discharge side 5.
  • valves 61 and 71 can be controlled or automatic, and close under the action of a spring 62, 72 (as shown) or close under the effect of their own weight. But they are, in all cases, closed when there is compatibility between the flow discharged by the low pressure stage and the flow sucked by the high pressure stage.
  • the pump 20 is driven separately by an electric motor 80, and, in this case, the shaft 22 of this pump 20 is no longer linked to the shaft 14 of the screw 12, but to the electric motor 80.
  • FIG. 2 makes it possible to have a speed of rotation of the pump 20 different from that of the screw pump 10.
  • the speed of rotation of the pump 20 can then be easily adapted to the flow rate and to the discharge pressure of the pump 10.
  • the volume flow treated is low, as a consequence of the high compression rate obtained in the first stage.
  • the overpressure created on the discharge of the low-pressure stage causes the valves 61, 71 to open.
  • valve 71 closes, the valve 61 remaining open.
  • valve 61 closes and the primary pump operates in steady state.

Abstract

Pump characterised in that it comprises in a single common stator a screw pump (10) on the low pressure side, an entrainment pump (20) on the high pressure side, a connecting pipe (30) providing the connection between the screw pump (10) and the entrainment pump (20). <IMAGE>

Description

La présente invention concerne une pompe primaire sèche à deux étages.The present invention relates to a two-stage dry primary pump.

On connaît des pompes primaires sèches à deux étages, chaque étage étant constitué généralement d'une pompe à palettes. Une pompe à palettes sèche évite, par rapport à une pompe à palettes lubrifiée à l'huile, la migration de vapeur d'huile dans l'enceinte à pomper, mais le principal inconvénient réside dans l'existence d'un frottement sec important entraînant une usure rapide et la dégradation accélérée des performances de la pompe.Two-stage dry primary pumps are known, each stage generally consisting of a vane pump. A dry vane pump avoids, compared to an oil lubricated vane pump, the migration of oil vapor in the enclosure to be pumped, but the main drawback lies in the existence of a high dry friction causing rapid wear and accelerated degradation of pump performance.

On connaît aussi des pompes primaires sèches, à vis, constituées d'un seul étage. Ces pompes sont capables, en régime permanent, d'aspirer un fluide depuis une pression limite de l'ordre de 10⁻² mbar jusqu'à la pression atmosphérique. Leur avantage est l'absence de contact entre les vis, donc absence de frottement, ce qui les rend très fiables. Mais dans la zone de la pompe où la pression est supérieure à 10 mbar, elles absorbent une puissance élevée qui est principalement dissipée en chaleur. La partie des vis travaillant dans cette zone à des pressions élevées (supérieures à 10 mbar) est alors soumise à un échauffement important qui provoque de fortes dilatations assymétriques et incompatibles avec les jeux internes. L'augmentation du jeu entre les deux vis ne constituerait pas une solution satisfaisante car, dans ces conditions, les performances ne seraient plus assurées, en particulier le débit aspiré et la pression limite.Also known are dry primary screw pumps consisting of a single stage. These pumps are capable, under steady conditions, of sucking a fluid from a limit pressure of the order of 10⁻² mbar to atmospheric pressure. Their advantage is the absence of contact between the screws, therefore absence of friction, which makes them very reliable. But in the pump area where the pressure is higher than 10 mbar, they absorb a high power which is mainly dissipated in heat. The part of the screws working in this zone at high pressures (greater than 10 mbar) is then subjected to a significant heating which causes strong asymmetric expansions and incompatible with internal clearances. Increasing the clearance between the two screws would not constitute a satisfactory solution because, under these conditions, the performance would no longer be ensured, in particular the suction flow and the limit pressure.

La présente invention a pour but d'apporter une solution à ce problème, donc d'obtenir une pompe primaire sèche capable d'aspirer, en régime permanent, un fluide depuis une pression limite de l'ordre de 10⁻² mbar, voire inférieure, jusqu'à la pression atmosphérique, et présentant une large gamme de débits aspirés, de 50 m³/h à plusieurs milliers de m³/h.The present invention aims to provide a solution to this problem, therefore to obtain a dry primary pump capable of sucking, in steady state, a fluid from a limit pressure of the order of 10⁻² mbar, or even lower. , up to atmospheric pressure, and with a wide range of aspirated flow rates, from 50 m³ / h to several thousand m³ / h.

L'invention consiste à limiter la pression de refoulement de la pompe à vis, afin de limiter son échauffement, et à rajouter un second étage constitué par une pompe à entraînement visqueux et/ou turbulent, permettant de reporter dans le second étage l'énergie de compression dégradée en chaleur. Ainsi, la pompe à vis n'a plus de partie de vis travaillant à des pressions élevées et subissant de fortes dilatations. De plus, dans la gamme de pression d'utilisation de cette pompe à vis (10⁻² mbar - 10 mbar), le libre parcours moyen des molécules est relativement élevé, et cette pompe peut alors fonctionner avec des jeux internes plus importants. Ces jeux internes importants permettent de limiter le coût de la pompe à vis et ainsi le coût global de la pompe primaire.The invention consists in limiting the discharge pressure of the screw pump, in order to limit its heating, and in adding a second stage constituted by a viscous and / or turbulent drive pump, making it possible to transfer the energy to the second stage. of compression degraded in heat. Thus, the screw pump no longer has a screw part working at high pressures and undergoing large expansions. In addition, in the operating pressure range of this screw pump (10⁻² mbar - 10 mbar), the average free path of the molecules is relatively high, and this pump can then operate with greater internal clearances. These large internal clearances make it possible to limit the cost of the screw pump and thus the overall cost of the primary pump.

La présente invention a ainsi pour objet une pompe primaire sèche à deux étages, caractérisée en ce qu'elle comporte dans un unique stator commun, côté basse pression, une pompe à vis, et, côté haute pression, une pompe à entraînement, un conduit de liaison assurant la communication entre la pompe à vis et la pompe à entraînement.The present invention thus relates to a two-stage dry primary pump, characterized in that it comprises, in a single common stator, on the low pressure side, a screw pump, and, on the high pressure side, a drive pump, a conduit. connection ensuring communication between the screw pump and the drive pump.

Selon un premier mode de réalisation, le conduit de liaison est en communication avec le côté aspiration de la pompe à vis, donc côté aspiration de la pompe primaire, par l'intermédiaire d'un by-pass muni d'une soupape de décharge.According to a first embodiment, the connecting duct is in communication with the suction side of the screw pump, therefore the suction side of the primary pump, by means of a by-pass provided with a relief valve.

Selon un deuxième mode de réalisation, le conduit de liaison est en communication avec le côté refoulement de la pompe à entraînement, donc côté refoulement de la pompe primaire, par l'intermédiaire d'un by-pass muni d'une soupape de décharge.According to a second embodiment, the connecting duct is in communication with the discharge side of the drive pump, therefore the discharge side of the primary pump, by means of a bypass provided with a relief valve.

D'une manière préférentielle, la pompe primaire comporte ces deux modes de réalisation.Preferably, the primary pump comprises these two embodiments.

Suivant la géométrie, les dimensions, les jeux, le volume de l'enceinte à pomper et le temps de descente en pression, la vitesse de rotation de chaque étage peut être différente. Un seul moteur peut simultanément faire tourner la pompe à vis et la pompe à entraînement, ou deux moteurs peuvent entraîner indépendamment la pompe à vis et la pompe à entraînement. Cette dernière solution permet en particulier de faire varier indépendamment les vitesses de rotation, donc les vitesses de pompage, dans les applications où une régulation de pression est nécessaire.Depending on the geometry, the dimensions, the clearances, the volume of the enclosure to be pumped and the pressure descent time, the speed of rotation of each stage may be different. A single motor can run the screw pump and the drive pump simultaneously, or two motors can independently drive the screw pump and the drive pump. The latter solution makes it possible in particular to independently vary the rotation speeds, therefore the pumping speeds, in applications where pressure regulation is necessary.

Le ou les moteurs peuvent être des moteurs classiques ou à rotors sous vide.The motor or motors can be conventional motors or vacuum rotors.

Il est décrit ci-après, à titre d'exemple et en référence aux deux figures annexées, une pompe selon l'invention.

  • La figure 1 représente une pompe munie d'un seul moteur.
  • La figure 2 représente la même pompe munie de deux moteurs.
A pump according to the invention is described below, by way of example and with reference to the two appended figures.
  • Figure 1 shows a pump with a single motor.
  • Figure 2 shows the same pump with two motors.

Dans la figure 1, la pompe primaire comporte un bâti 1 constituant un stator, une entrée d'aspiration 4, une sortie de refoulement 5, un étage basse pression constitué d'une pompe à vis sèche 10, et un étage haute pression constitué par une pompe à entraînement 20. Le bâti 1 peut comporter des canaux de refroidissement 2, qui permettent, par circulation d'un liquide (eau, huile,...) d'assurer la stabilisation thermique de l'ensemble. L'échange thermique avec le milieu ambiant s'effectue par convection naturelle ou forcée.In FIG. 1, the primary pump comprises a frame 1 constituting a stator, a suction inlet 4, a discharge outlet 5, a low pressure stage constituted by a dry screw pump 10, and a high pressure stage constituted by a drive pump 20. The frame 1 may include cooling channels 2, which allow, by circulation of a liquid (water, oil, ...) to ensure thermal stabilization of the assembly. The heat exchange with the ambient environment takes place by natural or forced convection.

La pompe 10 comporte deux vis 11, 12 conjuguées, montées respectivement sur deux arbres 13, 14 et synchronisées en entraînement par deux pignons 41, 44, le pignon 41 étant entraîné par un moteur électrique 50. Les deux pignons 41, 44 sont installés dans une boîte à huile 3 solidaire du châssis 1 et rendue étanche vis à vis de l'entrée d'aspiration 4 par deux joints 48, 49. Les deux arbres 13, 14 tournent dans deux paliers respectivement 42, 43 et 45, 46. L'arbre 13 tourne dans un autre palier 47 situé à l'autre extrémité, au niveau du conduit de liaison.The pump 10 comprises two conjugated screws 11, 12, mounted respectively on two shafts 13, 14 and synchronized in drive by two pinions 41, 44, the pinion 41 being driven by an electric motor 50. The two pinions 41, 44 are installed in an oil box 3 secured to the chassis 1 and sealed against the suction inlet 4 by two seals 48, 49. The two shafts 13, 14 rotate in two bearings respectively 42, 43 and 45, 46. L 'shaft 13 rotates in another bearing 47 located at the other end, at the connection conduit.

La pompe 20 est une pompe à entraînement visqueux et/ou turbulent, c'est-à-dire une pompe dans laquelle l'effet de pompage est obtenu par frottement à partir d'un ensemble rotor/stator 21 comportant une ou plusieurs gorges hélicoïdales à pas variable, dont le profil varie entre l'aspiration et le refoulement, et tournant à grande vitesse. La pompe 20 représentée est cylindrique mais, bien entendu, elle peut être sous forme d'un disque ou d'un cône par exemple.The pump 20 is a viscous and / or turbulent drive pump, that is to say a pump in which the pumping effect is obtained by friction from a rotor / stator assembly 21 comprising one or more helical grooves variable pitch, whose profile varies between suction and discharge, and rotating at high speed. The pump 20 shown is cylindrical but, of course, it can be in the form of a disc or a cone for example.

Dans cette figure 1, l'arbre 22 de la pompe 20 est lié mécani­quement à l'arbre 14 de la vis 12, de telle sorte que le moteur 50 entraîne à lui seul les pompes 10 et 20. L'arbre 22 tourne dans un palier 23.In this figure 1, the shaft 22 of the pump 20 is mechanically linked to the shaft 14 of the screw 12, so that the motor 50 alone drives the pumps 10 and 20. The shaft 22 rotates in a level 23.

La pompe primaire comporte deux by-pass 60, 70 équipés chacun d'une soupape de décharge 61, 71 pour assurer la répartition du flux dans les phases transitoires.The primary pump comprises two by-passes 60, 70 each equipped with a relief valve 61, 71 to ensure the distribution of the flow in the transient phases.

Le by-pass 60 permet de recirculer l'excédent de gaz pompé par l'étage basse pression vers le côté aspiration 4, et le by-pass 70 permet de recirculer l'excédent de gaz vers le côté refoulement 5.The bypass 60 allows the excess gas pumped by the low pressure stage to be recirculated to the suction side 4, and the bypass 70 allows recirculation of excess gas to the discharge side 5.

Les soupapes 61 et 71 peuvent être pilotées ou automatiques, et se fermer sous l'action d'un ressort 62, 72 (comme représenté) ou se fermer sous l'effet de leur propre poids. Mais elles sont, dans tous les cas, fermées lorsqu'il y a compatibilité entre le débit refoulé par l'étage basse pression et le débit aspiré par l'étage haute pression.The valves 61 and 71 can be controlled or automatic, and close under the action of a spring 62, 72 (as shown) or close under the effect of their own weight. But they are, in all cases, closed when there is compatibility between the flow discharged by the low pressure stage and the flow sucked by the high pressure stage.

Dans la figure 2, la pompe 20 est entraînée séparément par un moteur électrique 80, et, dans ce cas, l'arbre 22 de cette pompe 20 n'est plus lié à l'arbre 14 de la vis 12, mais au moteur électrique 80.In FIG. 2, the pump 20 is driven separately by an electric motor 80, and, in this case, the shaft 22 of this pump 20 is no longer linked to the shaft 14 of the screw 12, but to the electric motor 80.

Cette disposition de la figure 2 permet d'avoir une vitesse de rotation de la pompe 20 différente de celle de la pompe à vis 10. La vitesse de rotation de la pompe 20 peut alors être facilement adaptée au débit et à la pression de refoulement de la pompe 10. En effet, dans ce type de pompe à entraînement, le débit volumique traité est faible, en conséquence du taux de compression élevé obtenu dans le premier étage.This arrangement of FIG. 2 makes it possible to have a speed of rotation of the pump 20 different from that of the screw pump 10. The speed of rotation of the pump 20 can then be easily adapted to the flow rate and to the discharge pressure of the pump 10. In fact, in this type of drive pump, the volume flow treated is low, as a consequence of the high compression rate obtained in the first stage.

Une telle pompe primaire fonctionne de la manière suivante :Such a primary pump works as follows:

Au démarrage, lors du vidage d'une enceinte, la surpression créée au refoulement de l'étage basse pression entraîne l'ouverture des soupapes 61, 71.At start-up, during the emptying of an enclosure, the overpressure created on the discharge of the low-pressure stage causes the valves 61, 71 to open.

Dès que le débit aspiré par l'étage haute pression devient suffisant, la soupape 71 se ferme, la soupape 61 restant ouverte.As soon as the flow aspirated by the high pressure stage becomes sufficient, the valve 71 closes, the valve 61 remaining open.

Dès qu'il y a adaptation entre le débit de l'étage basse pression et le débit aspiré par l'étage haute pression, la soupape 61 se ferme et la pompe primaire fonctionne en régime permanent.As soon as there is adaptation between the flow of the low pressure stage and the flow sucked by the high pressure stage, the valve 61 closes and the primary pump operates in steady state.

Claims (6)

1/ Pompe primaire sèche à deux étages, caractérisée en ce qu'elle comporte dans un unique stator commun, côté basse pression, une pompe à vis (10), et côté haute pression, une pompe à entraînement (20), un conduit de liaison (30) assurant la communication entre la pompe à vis (10) et la pompe à entraînement (20).1 / Two-stage dry primary pump, characterized in that it comprises, in a single common stator, on the low pressure side, a screw pump (10), and on the high pressure side, a drive pump (20), a link (30) ensuring communication between the screw pump (10) and the drive pump (20). 2/ Pompe selon la revendication 1, caractérisée en ce que le conduit de liaison (30) est en communication avec le côté aspiration de la pompe à vis par l'intermédiaire d'un by-pass (60) muni d'une soupape de décharge (61).2 / Pump according to claim 1, characterized in that the connecting duct (30) is in communication with the suction side of the screw pump by means of a bypass (60) provided with a valve discharge (61). 3/ Pompe selon l'une des revendications 1 ou 2, caractérisée en ce que le conduit de liaison (30) est en communication avec le côté refoulement de la pompe à entraînement (20) par l'intermédiaire d'un by-pass (70) muni d'une soupape de décharge (71).3 / Pump according to one of claims 1 or 2, characterized in that the connecting pipe (30) is in communication with the discharge side of the drive pump (20) by means of a bypass ( 70) provided with a relief valve (71). 4/ Pompe selon l'une des revendications 1 à 3, caractérisée en ce qu'elle comporte un seul moteur (50) entraînant la pompe à vis (10) et la pompe à entraînement (20).4 / Pump according to one of claims 1 to 3, characterized in that it comprises a single motor (50) driving the screw pump (10) and the drive pump (20). 5/ Pompe selon l'une des revendications 1 à 3, caractérisée en ce qu'elle comporte deux moteurs distincts (50, 80) entraînant l'un la pompe à vis et l'autre la pompe à entraînement.5 / Pump according to one of claims 1 to 3, characterized in that it comprises two separate motors (50, 80) one driving the screw pump and the other the drive pump. 6/ Pompe selon l'une des revendications précédentes, caractérisée en ce qu'elle comporte des canaux de refroidissement (2).6 / Pump according to one of the preceding claims, characterized in that it comprises cooling channels (2).
EP90110602A 1989-06-05 1990-06-05 Two stage primary dry pump Expired - Lifetime EP0401741B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT90110602T ATE86364T1 (en) 1989-06-05 1990-06-05 TWO-STAGE DRY PRIMARY PUMP.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8907392A FR2647853A1 (en) 1989-06-05 1989-06-05 DRY PRIMARY PUMP WITH TWO FLOORS
FR8907392 1989-06-05

Publications (2)

Publication Number Publication Date
EP0401741A1 true EP0401741A1 (en) 1990-12-12
EP0401741B1 EP0401741B1 (en) 1993-03-03

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP90110602A Expired - Lifetime EP0401741B1 (en) 1989-06-05 1990-06-05 Two stage primary dry pump

Country Status (8)

Country Link
US (1) US5040949A (en)
EP (1) EP0401741B1 (en)
JP (1) JPH0333492A (en)
AT (1) ATE86364T1 (en)
DE (1) DE69000990T2 (en)
ES (1) ES2039997T3 (en)
FR (1) FR2647853A1 (en)
RU (1) RU1771514C (en)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0585911A1 (en) * 1992-09-03 1994-03-09 Matsushita Electric Industrial Co., Ltd. Two stage primary dry pump
US5445502A (en) * 1992-01-23 1995-08-29 Matsushita Electric Industrial Co., Ltd. Vacuum pump having parallel kinetic pump inlet section
EP0730093A1 (en) * 1995-02-28 1996-09-04 Iwata Air Compressor Mfg. Co.,Ltd. Control of a two-stage vacuum pump
EP0798463A2 (en) * 1996-03-29 1997-10-01 Anest Iwata Corporation Oil-free scroll vacuum pump
EP0898083A2 (en) * 1997-08-15 1999-02-24 The BOC Group plc Vacuum pumping system
EP0857876A3 (en) * 1997-02-05 1999-07-07 Pfeiffer Vacuum GmbH Method and apparatus to control the suction capacitiy of vacuum pumps
WO2005033028A1 (en) 2003-10-08 2005-04-14 Draka Fibre Technology B.V. Method for manufacturing optical fibres and their preforms
WO2014001090A1 (en) * 2012-06-28 2014-01-03 Sterling Industry Consult Gmbh Method and pump arrangement for evacuating a chamber
CN103867436A (en) * 2008-07-22 2014-06-18 厄利孔莱博尔德真空技术有限责任公司 Vacuum pump in particular roots type pump
AU2014407987B2 (en) * 2014-10-02 2019-10-31 Ateliers Busch Sa Pumping system for generating a vacuum and method for pumping by means of this pumping system
EP3198148B1 (en) * 2014-09-26 2020-02-26 Ateliers Busch S.A. Vacuum-generating pumping system and pumping method using this pumping system
IT201800009944A1 (en) 2018-10-31 2020-05-01 Nova Rotors Srl "VOLUMETRIC PUMP"
GB2583949A (en) * 2019-05-15 2020-11-18 Edwards Ltd A vacuum pump comprising a relief valve and a method of assembly of the relief valve

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JPH05209589A (en) * 1992-01-31 1993-08-20 Matsushita Electric Ind Co Ltd Hydraulic rotating device
JPH05272478A (en) * 1992-01-31 1993-10-19 Matsushita Electric Ind Co Ltd Vacuum pump
US5888053A (en) * 1995-02-10 1999-03-30 Ebara Corporation Pump having first and second outer casing members
EP1070848B1 (en) * 1999-07-19 2004-04-14 Sterling Fluid Systems (Germany) GmbH Positive displacement machine for compressible fluids
DE10114585A1 (en) * 2001-03-24 2002-09-26 Pfeiffer Vacuum Gmbh vacuum pump
DE20110360U1 (en) * 2001-06-22 2002-10-31 Ghh Rand Schraubenkompressoren Two-stage screw compressor
DE10142567A1 (en) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbo molecular pump
US6589023B2 (en) 2001-10-09 2003-07-08 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
ITMI20020263A1 (en) * 2002-02-12 2003-08-12 Alfatech Srl PUMP FOR THE TRANSPORT OF MELTED MASSES OF POLYMERS AND ELASTOMERS
JP2003343469A (en) * 2002-03-20 2003-12-03 Toyota Industries Corp Vacuum pump
GB0223769D0 (en) * 2002-10-14 2002-11-20 Boc Group Plc A pump
GB0416385D0 (en) * 2004-07-22 2004-08-25 Boc Group Plc Gas abatement
DE102010019402A1 (en) * 2010-05-04 2011-11-10 Oerlikon Leybold Vacuum Gmbh Screw vacuum pump
US20150078927A1 (en) * 2013-09-13 2015-03-19 Agilent Technologies, Inc. Multi-Stage Pump Having Reverse Bypass Circuit
DE202014005279U1 (en) * 2014-06-26 2015-10-05 Oerlikon Leybold Vacuum Gmbh Vacuum system
DE102016100957A1 (en) * 2016-01-20 2017-07-20 FRISTAM Pumpen Schaumburg GmbH displacement
GB201701000D0 (en) 2017-01-20 2017-03-08 Edwards Ltd Multi-stage vacuum booster pump coupling
GB201700998D0 (en) * 2017-01-20 2017-03-08 Edwards Ltd Multi-stage vacuum booster pump coupling
CN111520321B (en) * 2020-05-15 2022-09-13 大连宏亚泵业有限公司 Mechanical seal chemical pump and use method thereof
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Cited By (22)

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Publication number Priority date Publication date Assignee Title
US5445502A (en) * 1992-01-23 1995-08-29 Matsushita Electric Industrial Co., Ltd. Vacuum pump having parallel kinetic pump inlet section
US5951266A (en) * 1992-09-03 1999-09-14 Matsushita Electric Industrial Co., Ltd. Evacuating apparatus having interengaging rotors with threads having a decreasing pitch at the exhaust side
US5709537A (en) * 1992-09-03 1998-01-20 Matsushita Electric Industrial Co., Ltd. Evacuating apparatus
EP0585911A1 (en) * 1992-09-03 1994-03-09 Matsushita Electric Industrial Co., Ltd. Two stage primary dry pump
US5564907A (en) * 1992-09-03 1996-10-15 Matsushita Electric Industrial Co., Ltd. Evacuating apparatus
US5961297A (en) * 1995-02-28 1999-10-05 Iwata Air Compressor Mfg. Co., Ltd. Oil-free two stage scroll vacuum pump and method for controlling the same pump
EP1101943A3 (en) * 1995-02-28 2001-07-25 Anest Iwata Corporation Control of a two-stage vacuum pump
EP0730093A1 (en) * 1995-02-28 1996-09-04 Iwata Air Compressor Mfg. Co.,Ltd. Control of a two-stage vacuum pump
EP0798463A3 (en) * 1996-03-29 1998-02-25 Anest Iwata Corporation Oil-free scroll vacuum pump
EP0798463A2 (en) * 1996-03-29 1997-10-01 Anest Iwata Corporation Oil-free scroll vacuum pump
US6030181A (en) * 1997-02-05 2000-02-29 Pfeiffer Vacuum Gmbh Vacuum apparatus and a method of controlling a suction speed thereof
EP0857876A3 (en) * 1997-02-05 1999-07-07 Pfeiffer Vacuum GmbH Method and apparatus to control the suction capacitiy of vacuum pumps
EP0898083A2 (en) * 1997-08-15 1999-02-24 The BOC Group plc Vacuum pumping system
EP0898083A3 (en) * 1997-08-15 1999-07-07 The BOC Group plc Vacuum pumping system
WO2005033028A1 (en) 2003-10-08 2005-04-14 Draka Fibre Technology B.V. Method for manufacturing optical fibres and their preforms
CN103867436A (en) * 2008-07-22 2014-06-18 厄利孔莱博尔德真空技术有限责任公司 Vacuum pump in particular roots type pump
WO2014001090A1 (en) * 2012-06-28 2014-01-03 Sterling Industry Consult Gmbh Method and pump arrangement for evacuating a chamber
EP3198148B1 (en) * 2014-09-26 2020-02-26 Ateliers Busch S.A. Vacuum-generating pumping system and pumping method using this pumping system
AU2014407987B2 (en) * 2014-10-02 2019-10-31 Ateliers Busch Sa Pumping system for generating a vacuum and method for pumping by means of this pumping system
EP3201469B1 (en) * 2014-10-02 2020-03-25 Ateliers Busch S.A. Pumping system for generating a vacuum and method for pumping by means of this pumping system
IT201800009944A1 (en) 2018-10-31 2020-05-01 Nova Rotors Srl "VOLUMETRIC PUMP"
GB2583949A (en) * 2019-05-15 2020-11-18 Edwards Ltd A vacuum pump comprising a relief valve and a method of assembly of the relief valve

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US5040949A (en) 1991-08-20
EP0401741B1 (en) 1993-03-03
ATE86364T1 (en) 1993-03-15
FR2647853A1 (en) 1990-12-07
DE69000990T2 (en) 1993-06-09
RU1771514C (en) 1992-10-23
ES2039997T3 (en) 1993-10-01
JPH0333492A (en) 1991-02-13
DE69000990D1 (en) 1993-04-08

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