ES2039997T3 - Bomba primaria seca de dos fases. - Google Patents
Bomba primaria seca de dos fases.Info
- Publication number
- ES2039997T3 ES2039997T3 ES199090110602T ES90110602T ES2039997T3 ES 2039997 T3 ES2039997 T3 ES 2039997T3 ES 199090110602 T ES199090110602 T ES 199090110602T ES 90110602 T ES90110602 T ES 90110602T ES 2039997 T3 ES2039997 T3 ES 2039997T3
- Authority
- ES
- Spain
- Prior art keywords
- pump
- primary pump
- phase dry
- dry primary
- pressure side
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Rotary Pumps (AREA)
- Details And Applications Of Rotary Liquid Pumps (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Details Of Reciprocating Pumps (AREA)
Abstract
BOMBA PRIMARIA SECA DE DOS FASES, CARACTERIZADA PORQUE CONSTA EN UN UNICO ESTATOR COMUN, POR EL LADO DE BAJA PRESION, DE UNA BOMBA DE TORNILLO (10), Y POR EL LADO DE ALTA PRESION, UNA BOMBA DE ARRASTRE (20), UN CONDUCTO DE ENLACE (30) QUE PROPORCIONA LA COMUNICACION ENTRE LA BOMBA DE TORNILLO (10) Y LA BOMBA DE ARRASTRE (20).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8907392A FR2647853A1 (fr) | 1989-06-05 | 1989-06-05 | Pompe primaire seche a deux etages |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2039997T3 true ES2039997T3 (es) | 1993-10-01 |
Family
ID=9382363
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES199090110602T Expired - Lifetime ES2039997T3 (es) | 1989-06-05 | 1990-06-05 | Bomba primaria seca de dos fases. |
Country Status (8)
Country | Link |
---|---|
US (1) | US5040949A (es) |
EP (1) | EP0401741B1 (es) |
JP (1) | JPH0333492A (es) |
AT (1) | ATE86364T1 (es) |
DE (1) | DE69000990T2 (es) |
ES (1) | ES2039997T3 (es) |
FR (1) | FR2647853A1 (es) |
RU (1) | RU1771514C (es) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0420899A1 (de) * | 1988-06-24 | 1991-04-10 | Siemens Aktiengesellschaft | Mehrstufiges vakuumpumpenaggregat |
JPH05195957A (ja) * | 1992-01-23 | 1993-08-06 | Matsushita Electric Ind Co Ltd | 真空ポンプ |
JPH05272478A (ja) * | 1992-01-31 | 1993-10-19 | Matsushita Electric Ind Co Ltd | 真空ポンプ |
JPH05209589A (ja) * | 1992-01-31 | 1993-08-20 | Matsushita Electric Ind Co Ltd | 流体回転装置 |
KR100190310B1 (ko) * | 1992-09-03 | 1999-06-01 | 모리시따 요오이찌 | 진공배기장치 |
US5888053A (en) * | 1995-02-10 | 1999-03-30 | Ebara Corporation | Pump having first and second outer casing members |
DE69623516T2 (de) * | 1995-02-28 | 2003-05-15 | Anest Iwata Corp | Kontrollsystem für zweistufige Vakuumpumpe |
EP0798463A3 (en) * | 1996-03-29 | 1998-02-25 | Anest Iwata Corporation | Oil-free scroll vacuum pump |
DE19704234B4 (de) | 1997-02-05 | 2006-05-11 | Pfeiffer Vacuum Gmbh | Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen |
GB9717400D0 (en) | 1997-08-15 | 1997-10-22 | Boc Group Plc | Vacuum pumping systems |
EP1070848B1 (de) * | 1999-07-19 | 2004-04-14 | Sterling Fluid Systems (Germany) GmbH | Verdrängermaschine für kompressible Medien |
DE10114585A1 (de) * | 2001-03-24 | 2002-09-26 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE20110360U1 (de) | 2001-06-22 | 2002-10-31 | Ghh Rand Schraubenkompressoren | Zweistufiger Schraubenkompressor |
DE10142567A1 (de) * | 2001-08-30 | 2003-03-20 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpe |
US6589023B2 (en) | 2001-10-09 | 2003-07-08 | Applied Materials, Inc. | Device and method for reducing vacuum pump energy consumption |
ITMI20020263A1 (it) * | 2002-02-12 | 2003-08-12 | Alfatech Srl | Pompa per il trasporto di masse fuse di polimeri ed elastomeri |
JP2003343469A (ja) * | 2002-03-20 | 2003-12-03 | Toyota Industries Corp | 真空ポンプ |
GB0223769D0 (en) * | 2002-10-14 | 2002-11-20 | Boc Group Plc | A pump |
NL1024480C2 (nl) | 2003-10-08 | 2005-04-11 | Draka Fibre Technology Bv | Werkwijze ter vervaardiging van een voorvorm voor optische vezels, alsmede werkwijze ter vervaardiging van optische vezels. |
GB0416385D0 (en) * | 2004-07-22 | 2004-08-25 | Boc Group Plc | Gas abatement |
US8740578B2 (en) * | 2008-07-22 | 2014-06-03 | Oerlikon Leybold Vacuum Gmbh | Vacuum pump in particular roots type pump |
DE102010019402A1 (de) * | 2010-05-04 | 2011-11-10 | Oerlikon Leybold Vacuum Gmbh | Schrauben-Vakuumpumpe |
US11215180B2 (en) | 2012-06-28 | 2022-01-04 | Sterling Industry Consult Gmbh | Method and pump arrangement for evacuating a chamber |
US20150078927A1 (en) * | 2013-09-13 | 2015-03-19 | Agilent Technologies, Inc. | Multi-Stage Pump Having Reverse Bypass Circuit |
DE202014005279U1 (de) * | 2014-06-26 | 2015-10-05 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpen-System |
RU2670640C9 (ru) * | 2014-09-26 | 2018-12-04 | Ателье Буш Са | Насосная система для создания вакуума и способ откачивания с использованием данной насосной системы |
ES2785202T3 (es) * | 2014-10-02 | 2020-10-06 | Ateliers Busch S A | Sistema de bombeo para generar un vacío y procedimiento de bombeo por medio de este sistema de bombeo |
DE102016100957A1 (de) * | 2016-01-20 | 2017-07-20 | FRISTAM Pumpen Schaumburg GmbH | Verdrängerpumpe |
GB201700998D0 (en) * | 2017-01-20 | 2017-03-08 | Edwards Ltd | Multi-stage vacuum booster pump coupling |
GB201701000D0 (en) | 2017-01-20 | 2017-03-08 | Edwards Ltd | Multi-stage vacuum booster pump coupling |
IT201800009944A1 (it) | 2018-10-31 | 2020-05-01 | Nova Rotors Srl | "pompa volumetrica" |
GB2583949A (en) * | 2019-05-15 | 2020-11-18 | Edwards Ltd | A vacuum pump comprising a relief valve and a method of assembly of the relief valve |
CN111520321B (zh) * | 2020-05-15 | 2022-09-13 | 大连宏亚泵业有限公司 | 一种机械密封化工泵及其使用方法 |
GB2606224B (en) * | 2021-04-30 | 2024-01-31 | Edwards Ltd | Stator for a vacuum pump |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2903248A (en) * | 1956-12-10 | 1959-09-08 | Leander H Walker | System of mixing liquiform ingredients |
US3642384A (en) * | 1969-11-19 | 1972-02-15 | Henry Huse | Multistage vacuum pumping system |
GB1517156A (en) * | 1974-06-21 | 1978-07-12 | Svenska Rotor Maskiner Ab | Screw compressor including means for varying the capacity thereof |
JPS5267810A (en) * | 1975-12-03 | 1977-06-04 | Aisin Seiki Co Ltd | High vacuum pump |
JPS62243982A (ja) * | 1986-04-14 | 1987-10-24 | Hitachi Ltd | 2段型真空ポンプ装置およびその運転方法 |
JPH0784871B2 (ja) * | 1986-06-12 | 1995-09-13 | 株式会社日立製作所 | 真空排気装置 |
US4781553A (en) * | 1987-07-24 | 1988-11-01 | Kabushiki Kaisha Kobe Seiko Sho | Screw vacuum pump with lubricated bearings and a plurality of shaft sealing means |
-
1989
- 1989-06-05 FR FR8907392A patent/FR2647853A1/fr active Pending
-
1990
- 1990-06-01 US US07/531,726 patent/US5040949A/en not_active Expired - Fee Related
- 1990-06-04 RU SU904830083A patent/RU1771514C/ru active
- 1990-06-04 JP JP2146044A patent/JPH0333492A/ja active Pending
- 1990-06-05 DE DE9090110602T patent/DE69000990T2/de not_active Expired - Fee Related
- 1990-06-05 ES ES199090110602T patent/ES2039997T3/es not_active Expired - Lifetime
- 1990-06-05 EP EP90110602A patent/EP0401741B1/fr not_active Expired - Lifetime
- 1990-06-05 AT AT90110602T patent/ATE86364T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
RU1771514C (ru) | 1992-10-23 |
DE69000990T2 (de) | 1993-06-09 |
US5040949A (en) | 1991-08-20 |
EP0401741B1 (fr) | 1993-03-03 |
EP0401741A1 (fr) | 1990-12-12 |
FR2647853A1 (fr) | 1990-12-07 |
ATE86364T1 (de) | 1993-03-15 |
DE69000990D1 (de) | 1993-04-08 |
JPH0333492A (ja) | 1991-02-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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