DE59200347D1 - Trockenlaufende zweiwellenvakuumpumpe. - Google Patents

Trockenlaufende zweiwellenvakuumpumpe.

Info

Publication number
DE59200347D1
DE59200347D1 DE59200347T DE59200347T DE59200347D1 DE 59200347 D1 DE59200347 D1 DE 59200347D1 DE 59200347 T DE59200347 T DE 59200347T DE 59200347 T DE59200347 T DE 59200347T DE 59200347 D1 DE59200347 D1 DE 59200347D1
Authority
DE
Germany
Prior art keywords
dry
vacuum pump
shaft vacuum
shaft
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59200347T
Other languages
English (en)
Inventor
Hartmut Kriehn
Lothar Brenner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Deutschland Holding GmbH
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Application granted granted Critical
Publication of DE59200347D1 publication Critical patent/DE59200347D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
DE59200347T 1991-02-01 1992-01-31 Trockenlaufende zweiwellenvakuumpumpe. Expired - Fee Related DE59200347D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP91101331 1991-02-01
PCT/EP1992/000211 WO1992014060A1 (de) 1991-02-01 1992-01-31 Trockenlaufende zweiwellenvakuumpumpe

Publications (1)

Publication Number Publication Date
DE59200347D1 true DE59200347D1 (de) 1994-09-08

Family

ID=8206357

Family Applications (1)

Application Number Title Priority Date Filing Date
DE59200347T Expired - Fee Related DE59200347D1 (de) 1991-02-01 1992-01-31 Trockenlaufende zweiwellenvakuumpumpe.

Country Status (5)

Country Link
US (1) US5364245A (de)
EP (1) EP0569455B1 (de)
JP (1) JPH06505076A (de)
DE (1) DE59200347D1 (de)
WO (1) WO1992014060A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4233142A1 (de) * 1992-10-02 1994-04-07 Leybold Ag Verfahren zum Betrieb einer Klauenvakuumpumpe und für die Durchführung dieses Betriebsverfahrens geeignete Klauenvakuumpumpe
JP3432679B2 (ja) * 1996-06-03 2003-08-04 株式会社荏原製作所 容積式真空ポンプ
DE19800825A1 (de) * 1998-01-02 1999-07-08 Schacht Friedrich Trockenverdichtende Schraubenspindelpumpe
DE29807796U1 (de) * 1998-04-30 1999-09-09 GHH-RAND Schraubenkompressoren GmbH & Co. KG, 46145 Oberhausen Dichtungsanordnung für einen Wellenzapfen eines trockenlaufenden Rotationsschraubenverdichters
US6318959B1 (en) * 1998-12-22 2001-11-20 Unozawa-Gumi Iron Works, Ltd. Multi-stage rotary vacuum pump used for high temperature gas
JP2002257070A (ja) * 2001-02-28 2002-09-11 Toyota Industries Corp 真空ポンプにおける軸封構造
JP4061850B2 (ja) * 2001-02-28 2008-03-19 株式会社豊田自動織機 真空ポンプにおける軸封構造
JP2002257244A (ja) * 2001-02-28 2002-09-11 Toyota Industries Corp 真空ポンプにおける軸封構造
JP4617615B2 (ja) † 2001-07-05 2011-01-26 株式会社豊田自動織機 真空ポンプにおける油洩れ防止構造
CN100400881C (zh) * 2002-08-23 2008-07-09 株式会社丰田自动织机 具有轴密封结构的真空泵
US7533685B2 (en) 2005-01-28 2009-05-19 Agilent Technologies, Inc. Lubricant collection apparatus
DE102005015212A1 (de) * 2005-04-02 2006-10-05 Leybold Vacuum Gmbh Wellendichtung
JP4673136B2 (ja) * 2005-06-09 2011-04-20 株式会社日立産機システム スクリュー圧縮機
DE102008010427B4 (de) * 2008-02-21 2010-05-12 Sartorius Stedim Biotech Gmbh Bioreaktor
EP3053653B1 (de) 2015-02-06 2017-11-22 Alfa Laval Corporate AB Zentrifugenseparator für Plattenstapel
CN110159549B (zh) * 2019-06-19 2024-01-02 格力博(江苏)股份有限公司 泵组件及高压清洗设备

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3575477A (en) * 1969-10-23 1971-04-20 Edward M Newsome Seal
DE3312117A1 (de) * 1983-04-02 1984-10-04 Leybold-Heraeus GmbH, 5000 Köln Zweiwellen-vakuumpumpe mit innerer verdichtung
JPS62243982A (ja) * 1986-04-14 1987-10-24 Hitachi Ltd ２段型真空ポンプ装置およびその運転方法
EP0290662B1 (de) * 1987-05-15 1993-03-31 Leybold Aktiengesellschaft Zweiwellenvakuumpumpe mit Schöpfraum
DE3786917D1 (de) * 1987-05-15 1993-09-09 Leybold Ag Ein- oder mehrstufige zweiwellenvakuumpumpe.
FR2638788B1 (fr) * 1988-11-07 1994-01-28 Alcatel Cit Pompe a vide du type roots multietage
US5356275A (en) * 1991-03-04 1994-10-18 Leybold Aktiengesellschaft Device for supplying a multi-stage dry-running vacuum pump with inert gas

Also Published As

Publication number Publication date
US5364245A (en) 1994-11-15
JPH06505076A (ja) 1994-06-09
WO1992014060A1 (de) 1992-08-20
EP0569455B1 (de) 1994-08-03
EP0569455A1 (de) 1993-11-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AG, 63450

8327 Change in the person/name/address of the patent owner

Owner name: UNAXIS DEUTSCHLAND HOLDING GMBH, 63450 HANAU, DE

8339 Ceased/non-payment of the annual fee