ATE325274T1 - Vakuumpumpe - Google Patents
VakuumpumpeInfo
- Publication number
- ATE325274T1 ATE325274T1 AT04292018T AT04292018T ATE325274T1 AT E325274 T1 ATE325274 T1 AT E325274T1 AT 04292018 T AT04292018 T AT 04292018T AT 04292018 T AT04292018 T AT 04292018T AT E325274 T1 ATE325274 T1 AT E325274T1
- Authority
- AT
- Austria
- Prior art keywords
- rotor
- vacuum pump
- motor
- molecular
- shaft
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Electrophonic Musical Instruments (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0310282A FR2859250B1 (fr) | 2003-08-29 | 2003-08-29 | Pompe a vide |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE325274T1 true ATE325274T1 (de) | 2006-06-15 |
Family
ID=34089871
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT04292018T ATE325274T1 (de) | 2003-08-29 | 2004-08-09 | Vakuumpumpe |
Country Status (6)
Country | Link |
---|---|
US (1) | US7160081B2 (de) |
EP (1) | EP1510697B1 (de) |
JP (1) | JP2005076631A (de) |
AT (1) | ATE325274T1 (de) |
DE (1) | DE602004000798T2 (de) |
FR (1) | FR2859250B1 (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0229356D0 (en) * | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping arrangement |
DE10353034A1 (de) * | 2003-11-13 | 2005-06-09 | Leybold Vakuum Gmbh | Mehrstufige Reibungsvakuumpumpe |
GB0329839D0 (en) * | 2003-12-23 | 2004-01-28 | Boc Group Plc | Vacuum pump |
US20090081022A1 (en) * | 2007-09-21 | 2009-03-26 | Honeywell International Inc. | Radially Staged Microscale Turbomolecular Pump |
DE102008024764A1 (de) * | 2008-05-23 | 2009-11-26 | Oerlikon Leybold Vacuum Gmbh | Mehrstufige Vakuumpumpe |
DE102008036623A1 (de) * | 2008-08-06 | 2010-02-11 | Oerlikon Leybold Vacuum Gmbh | Verwendung eines Wälzlagers zur Lagerung rotierender Bauteile in Vakuumeinirchtungen sowie Vakuumeinrichtung |
US8070419B2 (en) * | 2008-12-24 | 2011-12-06 | Agilent Technologies, Inc. | Spiral pumping stage and vacuum pump incorporating such pumping stage |
US8152442B2 (en) * | 2008-12-24 | 2012-04-10 | Agilent Technologies, Inc. | Centripetal pumping stage and vacuum pump incorporating such pumping stage |
DE102009021642B4 (de) * | 2009-05-16 | 2021-07-22 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
JP5785494B2 (ja) * | 2009-08-28 | 2015-09-30 | エドワーズ株式会社 | 真空ポンプ及び真空ポンプに使用される部材 |
DE202011002809U1 (de) * | 2011-02-17 | 2012-06-12 | Oerlikon Leybold Vacuum Gmbh | Statorelement sowie Hochvakuumpumpe |
KR101704053B1 (ko) * | 2011-09-06 | 2017-02-07 | 현대자동차주식회사 | 진공펌프 통합형 주행 안정성 제어 장치 |
CN103195724B (zh) * | 2012-01-04 | 2015-05-27 | 李晨 | 立式鼠笼分子泵 |
EP2809949A4 (de) | 2012-02-03 | 2015-12-09 | Invacare Corp | Pumpvorrichtung |
US20150377239A1 (en) * | 2013-02-15 | 2015-12-31 | Edwards Limited | Vacuum pump |
DE102013203421A1 (de) * | 2013-02-28 | 2014-08-28 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE102014112553A1 (de) * | 2014-09-01 | 2016-03-03 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
GB201715151D0 (en) * | 2017-09-20 | 2017-11-01 | Edwards Ltd | A drag pump and a set of vacuum pumps including a drag pump |
FR3093544B1 (fr) * | 2019-03-05 | 2021-03-12 | Pfeiffer Vacuum | Pompe à vide turbomoléculaire et procédé de purge |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9810872D0 (en) * | 1998-05-20 | 1998-07-22 | Boc Group Plc | Improved vacuum pump |
JP3130890B2 (ja) * | 1999-02-25 | 2001-01-31 | セイコー精機株式会社 | 磁気軸受装置及び磁気軸受制御装置 |
JP2002138987A (ja) * | 2000-10-31 | 2002-05-17 | Seiko Instruments Inc | 真空ポンプ |
JP3961273B2 (ja) * | 2001-12-04 | 2007-08-22 | Bocエドワーズ株式会社 | 真空ポンプ |
-
2003
- 2003-08-29 FR FR0310282A patent/FR2859250B1/fr not_active Expired - Fee Related
-
2004
- 2004-08-09 EP EP04292018A patent/EP1510697B1/de not_active Expired - Lifetime
- 2004-08-09 AT AT04292018T patent/ATE325274T1/de not_active IP Right Cessation
- 2004-08-09 DE DE602004000798T patent/DE602004000798T2/de not_active Expired - Fee Related
- 2004-08-17 US US10/919,447 patent/US7160081B2/en not_active Expired - Fee Related
- 2004-08-18 JP JP2004238204A patent/JP2005076631A/ja not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
EP1510697B1 (de) | 2006-05-03 |
DE602004000798T2 (de) | 2007-08-16 |
US7160081B2 (en) | 2007-01-09 |
EP1510697A1 (de) | 2005-03-02 |
FR2859250A1 (fr) | 2005-03-04 |
DE602004000798D1 (de) | 2006-06-08 |
JP2005076631A (ja) | 2005-03-24 |
FR2859250B1 (fr) | 2005-11-11 |
US20050047904A1 (en) | 2005-03-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
ATE325274T1 (de) | Vakuumpumpe | |
ATE354027T1 (de) | Zentrifugalturbine für atemhilfevorrichtungen | |
EP1217219A3 (de) | Direktangetriebene Verdichtereinheit | |
NO20035398L (no) | Kompressorenhet omfattende en sentrifugalkompressor og en elektrisk motor | |
GB2376505B (en) | Improvements in screw compressors | |
EP1041289A3 (de) | Direktangetriebene Verdichtereinheit | |
ATE483914T1 (de) | Schraubenverdichter | |
ATE377150T1 (de) | Exzenterschneckenpumpe mit integriertem antrieb | |
DE50301345D1 (de) | Elektronisch kommutierter innenläufermotor | |
DE60313493D1 (de) | Vakuumpumpe | |
ATE530473T1 (de) | Trommelmotor | |
EP1167773A3 (de) | Turbomolekulapumpe | |
DE602004001156D1 (de) | Verdichtereinheit mit unterstützter Kühlung | |
DE50312528D1 (de) | Kreiselpumpe | |
DK1347178T3 (da) | Rengöringsvenlig centrifugalpumpe | |
DE50013185D1 (de) | Turbomolekularpumpe | |
DE50307609D1 (de) | Pumpe mit einen antriebsmotor durchsetzender pumpenwelle | |
ATE305566T1 (de) | Innenzahnradpumpe mit einem verzahnten hohlrad und einem damit kämmenden laufrad | |
DE50202923D1 (de) | Nasslaufkreiselpumpenaggregat | |
DE69915076D1 (de) | Rotationsanlage mit antriebsmotor | |
MX2022010432A (es) | Compresor de gas integrado. | |
ATE364793T1 (de) | Radialgebläse | |
Gill | Spinning into control. | |
UA69913A (en) | Tightened compressor | |
LV12548A (en) | Turbo-pump |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |