FR3093544B1 - Pompe à vide turbomoléculaire et procédé de purge - Google Patents

Pompe à vide turbomoléculaire et procédé de purge Download PDF

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Publication number
FR3093544B1
FR3093544B1 FR1902208A FR1902208A FR3093544B1 FR 3093544 B1 FR3093544 B1 FR 3093544B1 FR 1902208 A FR1902208 A FR 1902208A FR 1902208 A FR1902208 A FR 1902208A FR 3093544 B1 FR3093544 B1 FR 3093544B1
Authority
FR
France
Prior art keywords
purge gas
vacuum pump
turbomolecular vacuum
injection
purge process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1902208A
Other languages
English (en)
Other versions
FR3093544A1 (fr
Inventor
Nicolas Varennes
Antoine Dengreville
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1902208A priority Critical patent/FR3093544B1/fr
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Priority to JP2021552554A priority patent/JP2022522883A/ja
Priority to DE112020001075.9T priority patent/DE112020001075T5/de
Priority to PCT/EP2020/054556 priority patent/WO2020178042A1/fr
Priority to KR1020217027117A priority patent/KR20210134315A/ko
Priority to CN202080017639.4A priority patent/CN113518863A/zh
Priority to TW109106027A priority patent/TW202040008A/zh
Publication of FR3093544A1 publication Critical patent/FR3093544A1/fr
Application granted granted Critical
Publication of FR3093544B1 publication Critical patent/FR3093544B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Pompe à vide turbomoléculaire La présente invention a pour objet une pompe à vide turbomoléculaire (1) comportant : un dispositif d’injection de gaz de purge (21) comprenant au moins un canal (20) ménagé dans le stator (2) et débouchant entre le rotor (3) et le stator (2), pour injecter un gaz de purge dans le chemin de passage des gaz pompés, en aval d’au moins un étage de pales (9) du rotor (3), le dispositif d’injection de gaz de purge (21) étant configuré pour que le débit du gaz de purge injecté soit inférieur à un seuil déterminé afin que la différence entre la pression à l’aspiration (6) sans injection du gaz de purge et avec injection d’un gaz de purge, soit inférieure à 0,066 Pa. L’invention concerne également un procédé de purge d’une pompe à vide turbomoléculaire (1). (figure 2)
FR1902208A 2019-03-05 2019-03-05 Pompe à vide turbomoléculaire et procédé de purge Active FR3093544B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR1902208A FR3093544B1 (fr) 2019-03-05 2019-03-05 Pompe à vide turbomoléculaire et procédé de purge
DE112020001075.9T DE112020001075T5 (de) 2019-03-05 2020-02-20 Turbomolekularvakuumpumpe und Spülverfahren
PCT/EP2020/054556 WO2020178042A1 (fr) 2019-03-05 2020-02-20 Pompe à vide turbomoléculaire et procédé de purge
KR1020217027117A KR20210134315A (ko) 2019-03-05 2020-02-20 터보분자 진공 펌프 및 터보분자 진공 펌프의 퍼지 방법
JP2021552554A JP2022522883A (ja) 2019-03-05 2020-02-20 ターボ分子真空ポンプおよびそのパージ方法
CN202080017639.4A CN113518863A (zh) 2019-03-05 2020-02-20 涡轮分子真空泵和净化方法
TW109106027A TW202040008A (zh) 2019-03-05 2020-02-25 渦輪分子真空幫浦及沖淨方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1902208A FR3093544B1 (fr) 2019-03-05 2019-03-05 Pompe à vide turbomoléculaire et procédé de purge
FR1902208 2019-03-05

Publications (2)

Publication Number Publication Date
FR3093544A1 FR3093544A1 (fr) 2020-09-11
FR3093544B1 true FR3093544B1 (fr) 2021-03-12

Family

ID=66776629

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1902208A Active FR3093544B1 (fr) 2019-03-05 2019-03-05 Pompe à vide turbomoléculaire et procédé de purge

Country Status (7)

Country Link
JP (1) JP2022522883A (fr)
KR (1) KR20210134315A (fr)
CN (1) CN113518863A (fr)
DE (1) DE112020001075T5 (fr)
FR (1) FR3093544B1 (fr)
TW (1) TW202040008A (fr)
WO (1) WO2020178042A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113586392A (zh) * 2021-09-10 2021-11-02 北京中科科仪股份有限公司 一种真空泵
JP2023180545A (ja) * 2022-06-09 2023-12-21 エドワーズ株式会社 真空ポンプ、及び真空排気システム

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6143297A (ja) * 1984-08-06 1986-03-01 Osaka Shinku Kiki Seisakusho:Kk 分子ポンプのガスパ−ジ装置
JPH0459393U (fr) * 1990-09-29 1992-05-21
JP3201348B2 (ja) * 1998-05-25 2001-08-20 株式会社島津製作所 ターボ分子ポンプ
FR2783883B1 (fr) * 1998-09-10 2000-11-10 Cit Alcatel Procede et dispositif pour eviter les depots dans une pompe turbomoleculaire a palier magnetique ou gazeux
JP4156830B2 (ja) * 2001-12-13 2008-09-24 エドワーズ株式会社 真空ポンプ
FR2845737B1 (fr) * 2002-10-11 2005-01-14 Cit Alcatel Pompe turbomoleculaire a jupe composite
FR2859250B1 (fr) * 2003-08-29 2005-11-11 Cit Alcatel Pompe a vide
JP5190214B2 (ja) * 2007-03-29 2013-04-24 東京エレクトロン株式会社 ターボ分子ポンプ、基板処理装置、及びターボ分子ポンプの堆積物付着抑制方法
JP2009275578A (ja) * 2008-05-14 2009-11-26 Shimadzu Corp 磁気軸受式ターボ分子ポンプおよび真空システム
JP2014037809A (ja) * 2012-08-17 2014-02-27 Shimadzu Corp 真空ポンプおよび真空ポンプの運転方法
JP6735526B2 (ja) * 2013-08-30 2020-08-05 エドワーズ株式会社 真空ポンプ
GB2535703B (en) * 2015-02-23 2019-09-18 Edwards Ltd Gas supply apparatus

Also Published As

Publication number Publication date
WO2020178042A1 (fr) 2020-09-10
FR3093544A1 (fr) 2020-09-11
CN113518863A (zh) 2021-10-19
DE112020001075T5 (de) 2022-01-05
JP2022522883A (ja) 2022-04-20
TW202040008A (zh) 2020-11-01
KR20210134315A (ko) 2021-11-09

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