TW202040008A - 渦輪分子真空幫浦及沖淨方法 - Google Patents

渦輪分子真空幫浦及沖淨方法 Download PDF

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Publication number
TW202040008A
TW202040008A TW109106027A TW109106027A TW202040008A TW 202040008 A TW202040008 A TW 202040008A TW 109106027 A TW109106027 A TW 109106027A TW 109106027 A TW109106027 A TW 109106027A TW 202040008 A TW202040008 A TW 202040008A
Authority
TW
Taiwan
Prior art keywords
vacuum pump
flushing gas
turbomolecular vacuum
turbomolecular
stage
Prior art date
Application number
TW109106027A
Other languages
English (en)
Chinese (zh)
Inventor
尼可拉斯 薇妮絲
安東尼 登格維爾
Original Assignee
法商普發真空公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 法商普發真空公司 filed Critical 法商普發真空公司
Publication of TW202040008A publication Critical patent/TW202040008A/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
TW109106027A 2019-03-05 2020-02-25 渦輪分子真空幫浦及沖淨方法 TW202040008A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1902208 2019-03-05
FR1902208A FR3093544B1 (fr) 2019-03-05 2019-03-05 Pompe à vide turbomoléculaire et procédé de purge

Publications (1)

Publication Number Publication Date
TW202040008A true TW202040008A (zh) 2020-11-01

Family

ID=66776629

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109106027A TW202040008A (zh) 2019-03-05 2020-02-25 渦輪分子真空幫浦及沖淨方法

Country Status (7)

Country Link
JP (1) JP2022522883A (fr)
KR (1) KR20210134315A (fr)
CN (1) CN113518863A (fr)
DE (1) DE112020001075T5 (fr)
FR (1) FR3093544B1 (fr)
TW (1) TW202040008A (fr)
WO (1) WO2020178042A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113586392A (zh) * 2021-09-10 2021-11-02 北京中科科仪股份有限公司 一种真空泵

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023180545A (ja) * 2022-06-09 2023-12-21 エドワーズ株式会社 真空ポンプ、及び真空排気システム

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6143297A (ja) * 1984-08-06 1986-03-01 Osaka Shinku Kiki Seisakusho:Kk 分子ポンプのガスパ−ジ装置
JPH0459393U (fr) * 1990-09-29 1992-05-21
JP3201348B2 (ja) * 1998-05-25 2001-08-20 株式会社島津製作所 ターボ分子ポンプ
FR2783883B1 (fr) * 1998-09-10 2000-11-10 Cit Alcatel Procede et dispositif pour eviter les depots dans une pompe turbomoleculaire a palier magnetique ou gazeux
JP4156830B2 (ja) * 2001-12-13 2008-09-24 エドワーズ株式会社 真空ポンプ
FR2845737B1 (fr) * 2002-10-11 2005-01-14 Cit Alcatel Pompe turbomoleculaire a jupe composite
FR2859250B1 (fr) * 2003-08-29 2005-11-11 Cit Alcatel Pompe a vide
JP5190214B2 (ja) * 2007-03-29 2013-04-24 東京エレクトロン株式会社 ターボ分子ポンプ、基板処理装置、及びターボ分子ポンプの堆積物付着抑制方法
JP2009275578A (ja) * 2008-05-14 2009-11-26 Shimadzu Corp 磁気軸受式ターボ分子ポンプおよび真空システム
JP2014037809A (ja) * 2012-08-17 2014-02-27 Shimadzu Corp 真空ポンプおよび真空ポンプの運転方法
JP6735526B2 (ja) * 2013-08-30 2020-08-05 エドワーズ株式会社 真空ポンプ
GB2535703B (en) * 2015-02-23 2019-09-18 Edwards Ltd Gas supply apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113586392A (zh) * 2021-09-10 2021-11-02 北京中科科仪股份有限公司 一种真空泵

Also Published As

Publication number Publication date
KR20210134315A (ko) 2021-11-09
JP2022522883A (ja) 2022-04-20
CN113518863A (zh) 2021-10-19
FR3093544B1 (fr) 2021-03-12
FR3093544A1 (fr) 2020-09-11
DE112020001075T5 (de) 2022-01-05
WO2020178042A1 (fr) 2020-09-10

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