JP2022522883A - ターボ分子真空ポンプおよびそのパージ方法 - Google Patents

ターボ分子真空ポンプおよびそのパージ方法 Download PDF

Info

Publication number
JP2022522883A
JP2022522883A JP2021552554A JP2021552554A JP2022522883A JP 2022522883 A JP2022522883 A JP 2022522883A JP 2021552554 A JP2021552554 A JP 2021552554A JP 2021552554 A JP2021552554 A JP 2021552554A JP 2022522883 A JP2022522883 A JP 2022522883A
Authority
JP
Japan
Prior art keywords
purge gas
vacuum pump
turbo molecular
stage
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021552554A
Other languages
English (en)
Japanese (ja)
Inventor
ヴァレンヌ ニコラ
デングレヴィル アントワーヌ
Original Assignee
ファイファー バキユーム
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ファイファー バキユーム filed Critical ファイファー バキユーム
Publication of JP2022522883A publication Critical patent/JP2022522883A/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2021552554A 2019-03-05 2020-02-20 ターボ分子真空ポンプおよびそのパージ方法 Pending JP2022522883A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1902208A FR3093544B1 (fr) 2019-03-05 2019-03-05 Pompe à vide turbomoléculaire et procédé de purge
FR1902208 2019-03-05
PCT/EP2020/054556 WO2020178042A1 (fr) 2019-03-05 2020-02-20 Pompe à vide turbomoléculaire et procédé de purge

Publications (1)

Publication Number Publication Date
JP2022522883A true JP2022522883A (ja) 2022-04-20

Family

ID=66776629

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021552554A Pending JP2022522883A (ja) 2019-03-05 2020-02-20 ターボ分子真空ポンプおよびそのパージ方法

Country Status (7)

Country Link
JP (1) JP2022522883A (fr)
KR (1) KR20210134315A (fr)
CN (1) CN113518863A (fr)
DE (1) DE112020001075T5 (fr)
FR (1) FR3093544B1 (fr)
TW (1) TW202040008A (fr)
WO (1) WO2020178042A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023238804A1 (fr) * 2022-06-09 2023-12-14 エドワーズ株式会社 Pompe à vide et système d'évacuation à vide

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113586392A (zh) * 2021-09-10 2021-11-02 北京中科科仪股份有限公司 一种真空泵

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0459393U (fr) * 1990-09-29 1992-05-21
JP2014037809A (ja) * 2012-08-17 2014-02-27 Shimadzu Corp 真空ポンプおよび真空ポンプの運転方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6143297A (ja) * 1984-08-06 1986-03-01 Osaka Shinku Kiki Seisakusho:Kk 分子ポンプのガスパ−ジ装置
JP3201348B2 (ja) * 1998-05-25 2001-08-20 株式会社島津製作所 ターボ分子ポンプ
FR2783883B1 (fr) * 1998-09-10 2000-11-10 Cit Alcatel Procede et dispositif pour eviter les depots dans une pompe turbomoleculaire a palier magnetique ou gazeux
JP4156830B2 (ja) * 2001-12-13 2008-09-24 エドワーズ株式会社 真空ポンプ
FR2845737B1 (fr) * 2002-10-11 2005-01-14 Cit Alcatel Pompe turbomoleculaire a jupe composite
FR2859250B1 (fr) * 2003-08-29 2005-11-11 Cit Alcatel Pompe a vide
JP5190214B2 (ja) * 2007-03-29 2013-04-24 東京エレクトロン株式会社 ターボ分子ポンプ、基板処理装置、及びターボ分子ポンプの堆積物付着抑制方法
JP2009275578A (ja) * 2008-05-14 2009-11-26 Shimadzu Corp 磁気軸受式ターボ分子ポンプおよび真空システム
JP6735526B2 (ja) * 2013-08-30 2020-08-05 エドワーズ株式会社 真空ポンプ
GB2535703B (en) * 2015-02-23 2019-09-18 Edwards Ltd Gas supply apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0459393U (fr) * 1990-09-29 1992-05-21
JP2014037809A (ja) * 2012-08-17 2014-02-27 Shimadzu Corp 真空ポンプおよび真空ポンプの運転方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023238804A1 (fr) * 2022-06-09 2023-12-14 エドワーズ株式会社 Pompe à vide et système d'évacuation à vide

Also Published As

Publication number Publication date
DE112020001075T5 (de) 2022-01-05
FR3093544B1 (fr) 2021-03-12
FR3093544A1 (fr) 2020-09-11
KR20210134315A (ko) 2021-11-09
WO2020178042A1 (fr) 2020-09-10
TW202040008A (zh) 2020-11-01
CN113518863A (zh) 2021-10-19

Similar Documents

Publication Publication Date Title
TWI445885B (zh) 分子拖拉泵送機構
JPWO2010001656A1 (ja) ガスタービンの冷却空気供給構造およびガスタービン
JP2022522883A (ja) ターボ分子真空ポンプおよびそのパージ方法
JP4173637B2 (ja) ステータとロータを備えた摩擦真空ポンプ
JP6432110B2 (ja) ガスタービン
KR20000062974A (ko) 터보 분자 펌프
EP3058182B1 (fr) Contrôle de jeu d'étanchéité dans des turbomachines
US10273967B2 (en) Compressor shroud comprising a sealing element provided with a structure for entraining and diverting discharge air
TW201837310A (zh) 泵抽單元及其用途
JP2015520327A (ja) 遠心圧縮機のインペラの冷却
KR20060125813A (ko) 진공 펌프
JP6414401B2 (ja) ターボ分子ポンプ
JP2010038137A (ja) ターボ分子ポンプ
JP6390098B2 (ja) 真空ポンプ
JP2008528852A (ja) 真空側路形圧縮機
US11143191B2 (en) Drag pump and a set of vacuum pumps including a drag pump
JP2023513322A (ja) 湾曲したロータブレード及びステータブレードを有する軸流真空ポンプ
KR20220035090A (ko) 펌프 유닛
US20230042886A1 (en) Vacuum pump, vacuum pump set for evacuating a semiconductor processing chamber and method of evacuating a semiconductor processing chamber
TW202028612A (zh) 多級渦輪分子泵
JP4249946B2 (ja) 改良型真空ポンプ
WO2021140330A1 (fr) Pompe à vide
JP2022120669A (ja) モータポンプ及びモータポンプの製造方法
WO2023078782A1 (fr) Pompe à vide turbomoléculaire et procédé de nettoyage associé
JPH0539798A (ja) セラミツクス製真空ポンプ

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20211104

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20220912

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20230712

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20230718

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20240227