JPH0459393U - - Google Patents

Info

Publication number
JPH0459393U
JPH0459393U JP10231790U JP10231790U JPH0459393U JP H0459393 U JPH0459393 U JP H0459393U JP 10231790 U JP10231790 U JP 10231790U JP 10231790 U JP10231790 U JP 10231790U JP H0459393 U JPH0459393 U JP H0459393U
Authority
JP
Japan
Prior art keywords
pump
port
turbo
vicinity
pump mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10231790U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10231790U priority Critical patent/JPH0459393U/ja
Publication of JPH0459393U publication Critical patent/JPH0459393U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP10231790U 1990-09-29 1990-09-29 Pending JPH0459393U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10231790U JPH0459393U (fr) 1990-09-29 1990-09-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10231790U JPH0459393U (fr) 1990-09-29 1990-09-29

Publications (1)

Publication Number Publication Date
JPH0459393U true JPH0459393U (fr) 1992-05-21

Family

ID=31846457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10231790U Pending JPH0459393U (fr) 1990-09-29 1990-09-29

Country Status (1)

Country Link
JP (1) JPH0459393U (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008248754A (ja) * 2007-03-29 2008-10-16 Tokyo Electron Ltd ターボ分子ポンプ、基板処理装置、及びターボ分子ポンプの堆積物付着抑制方法
JP2022522883A (ja) * 2019-03-05 2022-04-20 ファイファー バキユーム ターボ分子真空ポンプおよびそのパージ方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008248754A (ja) * 2007-03-29 2008-10-16 Tokyo Electron Ltd ターボ分子ポンプ、基板処理装置、及びターボ分子ポンプの堆積物付着抑制方法
JP2022522883A (ja) * 2019-03-05 2022-04-20 ファイファー バキユーム ターボ分子真空ポンプおよびそのパージ方法

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