JPH0459393U - - Google Patents
Info
- Publication number
- JPH0459393U JPH0459393U JP10231790U JP10231790U JPH0459393U JP H0459393 U JPH0459393 U JP H0459393U JP 10231790 U JP10231790 U JP 10231790U JP 10231790 U JP10231790 U JP 10231790U JP H0459393 U JPH0459393 U JP H0459393U
- Authority
- JP
- Japan
- Prior art keywords
- pump
- port
- turbo
- vicinity
- pump mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010926 purge Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims 2
- 239000011261 inert gas Substances 0.000 claims 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10231790U JPH0459393U (fr) | 1990-09-29 | 1990-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10231790U JPH0459393U (fr) | 1990-09-29 | 1990-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0459393U true JPH0459393U (fr) | 1992-05-21 |
Family
ID=31846457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10231790U Pending JPH0459393U (fr) | 1990-09-29 | 1990-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0459393U (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008248754A (ja) * | 2007-03-29 | 2008-10-16 | Tokyo Electron Ltd | ターボ分子ポンプ、基板処理装置、及びターボ分子ポンプの堆積物付着抑制方法 |
| JP2022522883A (ja) * | 2019-03-05 | 2022-04-20 | ファイファー バキユーム | ターボ分子真空ポンプおよびそのパージ方法 |
-
1990
- 1990-09-29 JP JP10231790U patent/JPH0459393U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008248754A (ja) * | 2007-03-29 | 2008-10-16 | Tokyo Electron Ltd | ターボ分子ポンプ、基板処理装置、及びターボ分子ポンプの堆積物付着抑制方法 |
| JP2022522883A (ja) * | 2019-03-05 | 2022-04-20 | ファイファー バキユーム | ターボ分子真空ポンプおよびそのパージ方法 |
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