JPS6447994U - - Google Patents

Info

Publication number
JPS6447994U
JPS6447994U JP14168887U JP14168887U JPS6447994U JP S6447994 U JPS6447994 U JP S6447994U JP 14168887 U JP14168887 U JP 14168887U JP 14168887 U JP14168887 U JP 14168887U JP S6447994 U JPS6447994 U JP S6447994U
Authority
JP
Japan
Prior art keywords
vacuum pump
turbo vacuum
gas
pump
release valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14168887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14168887U priority Critical patent/JPS6447994U/ja
Publication of JPS6447994U publication Critical patent/JPS6447994U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP14168887U 1987-09-18 1987-09-18 Pending JPS6447994U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14168887U JPS6447994U (fr) 1987-09-18 1987-09-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14168887U JPS6447994U (fr) 1987-09-18 1987-09-18

Publications (1)

Publication Number Publication Date
JPS6447994U true JPS6447994U (fr) 1989-03-24

Family

ID=31406978

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14168887U Pending JPS6447994U (fr) 1987-09-18 1987-09-18

Country Status (1)

Country Link
JP (1) JPS6447994U (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02259297A (ja) * 1989-03-30 1990-10-22 Shimadzu Corp 真空ポンプ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60116895A (ja) * 1983-11-30 1985-06-24 Hitachi Ltd 真空ポンプ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60116895A (ja) * 1983-11-30 1985-06-24 Hitachi Ltd 真空ポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02259297A (ja) * 1989-03-30 1990-10-22 Shimadzu Corp 真空ポンプ

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