JPH01157285U - - Google Patents
Info
- Publication number
- JPH01157285U JPH01157285U JP5320188U JP5320188U JPH01157285U JP H01157285 U JPH01157285 U JP H01157285U JP 5320188 U JP5320188 U JP 5320188U JP 5320188 U JP5320188 U JP 5320188U JP H01157285 U JPH01157285 U JP H01157285U
- Authority
- JP
- Japan
- Prior art keywords
- gas valve
- control device
- vacuum pump
- controlling
- dry vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010790 dilution Methods 0.000 claims description 2
- 239000012895 dilution Substances 0.000 claims description 2
- 238000010926 purge Methods 0.000 claims description 2
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5320188U JPH01157285U (fr) | 1988-04-19 | 1988-04-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5320188U JPH01157285U (fr) | 1988-04-19 | 1988-04-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01157285U true JPH01157285U (fr) | 1989-10-30 |
Family
ID=31279193
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5320188U Pending JPH01157285U (fr) | 1988-04-19 | 1988-04-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01157285U (fr) |
-
1988
- 1988-04-19 JP JP5320188U patent/JPH01157285U/ja active Pending