JPS6447994U - - Google Patents
Info
- Publication number
- JPS6447994U JPS6447994U JP14168887U JP14168887U JPS6447994U JP S6447994 U JPS6447994 U JP S6447994U JP 14168887 U JP14168887 U JP 14168887U JP 14168887 U JP14168887 U JP 14168887U JP S6447994 U JPS6447994 U JP S6447994U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- turbo vacuum
- gas
- pump
- release valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 6
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案のターボ式真空ポンプの一実施
例を示す系統図、第２図はその作用説明図、第３
図は真空装置内が所要の真空圧になるまでの真空
引き時間を本考案の場合と従来の場合とについて
示す説明図、第４図は従来のターボ式真空ポンプ
の系統図、第５図はその作用説明図である。
３…ターボ式真空ポンプ、４…大気放出弁、５
…吸気口、６…排気口。
Fig. 1 is a system diagram showing an embodiment of the turbo vacuum pump of the present invention, Fig. 2 is an explanatory diagram of its operation, and Fig. 3 is a system diagram showing an embodiment of the turbo vacuum pump of the present invention.
The figure is an explanatory diagram showing the evacuation time required for the inside of the vacuum device to reach the required vacuum pressure in the case of the present invention and in the conventional case. Fig. 4 is a system diagram of a conventional turbo vacuum pump. Fig. 5 is It is an explanatory diagram of its action. 3...Turbo vacuum pump, 4...Atmospheric release valve, 5
...Intake port, 6...Exhaust port.
Claims (1)
排出するターボ式真空ポンプにおいて、ポンプの
中間圧力段に連通した大気放出弁を具えているこ
とを特徴としたターボ式真空ポンプ。 A turbo vacuum pump that increases the pressure of gas sucked in from an intake port and discharges the gas from an exhaust port, the turbo vacuum pump being characterized by being equipped with an atmosphere release valve that communicates with an intermediate pressure stage of the pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14168887U JPS6447994U (en) | 1987-09-18 | 1987-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14168887U JPS6447994U (en) | 1987-09-18 | 1987-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6447994U true JPS6447994U (en) | 1989-03-24 |
Family
ID=31406978
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14168887U Pending JPS6447994U (en) | 1987-09-18 | 1987-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6447994U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02259297A (en) * | 1989-03-30 | 1990-10-22 | Shimadzu Corp | Vacuum pump |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60116895A (en) * | 1983-11-30 | 1985-06-24 | Hitachi Ltd | Vacuum pump |
-
1987
- 1987-09-18 JP JP14168887U patent/JPS6447994U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60116895A (en) * | 1983-11-30 | 1985-06-24 | Hitachi Ltd | Vacuum pump |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02259297A (en) * | 1989-03-30 | 1990-10-22 | Shimadzu Corp | Vacuum pump |
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