JPH036298U - - Google Patents

Info

Publication number
JPH036298U
JPH036298U JP6787589U JP6787589U JPH036298U JP H036298 U JPH036298 U JP H036298U JP 6787589 U JP6787589 U JP 6787589U JP 6787589 U JP6787589 U JP 6787589U JP H036298 U JPH036298 U JP H036298U
Authority
JP
Japan
Prior art keywords
surge tank
vacuum
furnace
furnace body
pressurized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6787589U
Other languages
Japanese (ja)
Other versions
JPH0645835Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6787589U priority Critical patent/JPH0645835Y2/en
Publication of JPH036298U publication Critical patent/JPH036298U/ja
Application granted granted Critical
Publication of JPH0645835Y2 publication Critical patent/JPH0645835Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Furnace Details (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案の一実施例を示すパルス圧力制
御炉のガス系統図、第2図はその動作を示すタイ
ムチヤートである。 10……炉本体、20……加圧サージタンク、
30……真空サージタンク、40……ガス吸引手
段。
FIG. 1 is a gas system diagram of a pulse pressure controlled furnace showing one embodiment of the present invention, and FIG. 2 is a time chart showing its operation. 10... Furnace body, 20... Pressurized surge tank,
30... Vacuum surge tank, 40... Gas suction means.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空炉よりなる炉本体と、該炉本体に連結され
た加圧サージタンクと、該加圧サージタンクに処
理ガスを加圧充填するガス充填手段と、前記炉本
体に連結された真空サージタンクと、該真空サー
ジタンクを真空引きするガス吸引手段とを備えて
いることを特徴とするパルス圧力制御炉。
A furnace body consisting of a vacuum furnace, a pressurized surge tank connected to the furnace body, a gas filling means for filling the pressurized surge tank with processing gas under pressure, and a vacuum surge tank connected to the furnace body. 1. A pulse pressure controlled furnace comprising: gas suction means for evacuating the vacuum surge tank.
JP6787589U 1989-06-09 1989-06-09 Pulse pressure control furnace Expired - Lifetime JPH0645835Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6787589U JPH0645835Y2 (en) 1989-06-09 1989-06-09 Pulse pressure control furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6787589U JPH0645835Y2 (en) 1989-06-09 1989-06-09 Pulse pressure control furnace

Publications (2)

Publication Number Publication Date
JPH036298U true JPH036298U (en) 1991-01-22
JPH0645835Y2 JPH0645835Y2 (en) 1994-11-24

Family

ID=31601840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6787589U Expired - Lifetime JPH0645835Y2 (en) 1989-06-09 1989-06-09 Pulse pressure control furnace

Country Status (1)

Country Link
JP (1) JPH0645835Y2 (en)

Also Published As

Publication number Publication date
JPH0645835Y2 (en) 1994-11-24

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