JPH036298U - - Google Patents
Info
- Publication number
- JPH036298U JPH036298U JP6787589U JP6787589U JPH036298U JP H036298 U JPH036298 U JP H036298U JP 6787589 U JP6787589 U JP 6787589U JP 6787589 U JP6787589 U JP 6787589U JP H036298 U JPH036298 U JP H036298U
- Authority
- JP
- Japan
- Prior art keywords
- surge tank
- vacuum
- furnace
- furnace body
- pressurized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000035485 pulse pressure Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
- Furnace Details (AREA)
Description
第1図は本考案の一実施例を示すパルス圧力制
御炉のガス系統図、第2図はその動作を示すタイ
ムチヤートである。
10……炉本体、20……加圧サージタンク、
30……真空サージタンク、40……ガス吸引手
段。
FIG. 1 is a gas system diagram of a pulse pressure controlled furnace showing one embodiment of the present invention, and FIG. 2 is a time chart showing its operation. 10... Furnace body, 20... Pressurized surge tank,
30... Vacuum surge tank, 40... Gas suction means.
Claims (1)
た加圧サージタンクと、該加圧サージタンクに処
理ガスを加圧充填するガス充填手段と、前記炉本
体に連結された真空サージタンクと、該真空サー
ジタンクを真空引きするガス吸引手段とを備えて
いることを特徴とするパルス圧力制御炉。 A furnace body consisting of a vacuum furnace, a pressurized surge tank connected to the furnace body, a gas filling means for filling the pressurized surge tank with processing gas under pressure, and a vacuum surge tank connected to the furnace body. 1. A pulse pressure controlled furnace comprising: gas suction means for evacuating the vacuum surge tank.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6787589U JPH0645835Y2 (en) | 1989-06-09 | 1989-06-09 | Pulse pressure control furnace |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6787589U JPH0645835Y2 (en) | 1989-06-09 | 1989-06-09 | Pulse pressure control furnace |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH036298U true JPH036298U (en) | 1991-01-22 |
JPH0645835Y2 JPH0645835Y2 (en) | 1994-11-24 |
Family
ID=31601840
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6787589U Expired - Lifetime JPH0645835Y2 (en) | 1989-06-09 | 1989-06-09 | Pulse pressure control furnace |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0645835Y2 (en) |
-
1989
- 1989-06-09 JP JP6787589U patent/JPH0645835Y2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0645835Y2 (en) | 1994-11-24 |