JPS63125192U - - Google Patents
Info
- Publication number
- JPS63125192U JPS63125192U JP1644787U JP1644787U JPS63125192U JP S63125192 U JPS63125192 U JP S63125192U JP 1644787 U JP1644787 U JP 1644787U JP 1644787 U JP1644787 U JP 1644787U JP S63125192 U JPS63125192 U JP S63125192U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- exhaust system
- intake pipe
- rotary pump
- oil rotary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011261 inert gas Substances 0.000 claims 2
- 239000007789 gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は、本考案の実施例の排気装置の概略の
系統図。第２図はその前身の排気装置の概略の系
統図。
１……真空容器、１３……排気管、２……排気
バルブ、３……吸気管、４……第１のバルブ、５
……ガス容器、６……第２のバルブ、７……圧力
計、８……レギユレータ、９……油回転ポンプ、
１０……ガスボンベ。
FIG. 1 is a schematic system diagram of an exhaust system according to an embodiment of the present invention. Figure 2 is a schematic system diagram of its predecessor exhaust system. DESCRIPTION OF SYMBOLS 1... Vacuum container, 13... Exhaust pipe, 2... Exhaust valve, 3... Intake pipe, 4... First valve, 5
... Gas container, 6 ... Second valve, 7 ... Pressure gauge, 8 ... Regulator, 9 ... Oil rotary pump,
10...Gas cylinder.
Claims (1)
回転ポンプを停止させたのち該油回転ポンプの吸
気管内を大気圧の不活性ガスを導入するに当たつ
て、該吸気管に対して、第１のバルブと、圧力調
整のための一定容量のガス容器と、第２のバルブ
と、レギユレータと、不活性ガスボンベとをこの
順に直列にして接続したことを特徴とする排気装
置。 (2) 該吸気管に接続される第１のバルブが常時
閉の遅延開放電磁バルブであり、第２のバルブが
通常の電磁バルブである、実用新案登録請求の範
囲第１項記載の排気装置。[Scope of Claim for Utility Model Registration] (1) In an exhaust system having an oil rotary pump, when introducing an inert gas at atmospheric pressure into the intake pipe of the oil rotary pump after the oil rotary pump is stopped, A first valve, a gas container with a constant capacity for pressure adjustment, a second valve, a regulator, and an inert gas cylinder are connected in series to the intake pipe in this order. exhaust system. (2) The exhaust system according to claim 1, wherein the first valve connected to the intake pipe is a normally closed delayed-open solenoid valve, and the second valve is a normal solenoid valve. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1644787U JPS63125192U (en) | 1987-02-06 | 1987-02-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1644787U JPS63125192U (en) | 1987-02-06 | 1987-02-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63125192U true JPS63125192U (en) | 1988-08-16 |
Family
ID=30808311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1644787U Pending JPS63125192U (en) | 1987-02-06 | 1987-02-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63125192U (en) |
-
1987
- 1987-02-06 JP JP1644787U patent/JPS63125192U/ja active Pending