JPS62144540U - - Google Patents
Info
- Publication number
- JPS62144540U JPS62144540U JP3036386U JP3036386U JPS62144540U JP S62144540 U JPS62144540 U JP S62144540U JP 3036386 U JP3036386 U JP 3036386U JP 3036386 U JP3036386 U JP 3036386U JP S62144540 U JPS62144540 U JP S62144540U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- vacuum
- container
- pressure
- vacuum container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Description
第１図はこの考案の一実施例による真空リーク
装置の構成図、第２図は従来の構成図である。
図において、１は真空容器、２はリークバルブ
、３はガスボンベ、４は導入管、５は圧力調整容
器、６は圧力調整バルブである。なお、各図中の
同一符号は同一または相当部分を示す。
FIG. 1 is a block diagram of a vacuum leak device according to an embodiment of this invention, and FIG. 2 is a block diagram of a conventional vacuum leak device. In the figure, 1 is a vacuum container, 2 is a leak valve, 3 is a gas cylinder, 4 is an introduction pipe, 5 is a pressure adjustment container, and 6 is a pressure adjustment valve. Note that the same reference numerals in each figure indicate the same or corresponding parts.
Claims (1)
器をリークする際に導入する乾燥ガスを内部に有
するガスボンベと、前記乾燥ガスを導入する管の
途中に前記導入ガスの圧力と前記真空容器内の圧
力を調整する容積可変な容器を備えて前記導入ガ
スの流入速度を調節することを特徴とする真空リ
ーク装置。 (2) 導入ガスの圧力と前記真空容器内の圧力を
調整する容器が通常時、容積が最小で、前記ガス
導入時にガス圧により容積が増大することを特徴
とする実用新案登録請求の範囲第１項記載の真空
リーク装置。[Claims for Utility Model Registration] (1) A vacuum container maintained at a high vacuum, a gas cylinder containing dry gas inside to be introduced when the vacuum container is leaked, and a A vacuum leak device characterized by comprising a variable volume container that adjusts the pressure of the introduced gas and the pressure inside the vacuum container to adjust the inflow speed of the introduced gas. (2) Utility model registration claim 1, characterized in that the container for adjusting the pressure of the introduced gas and the pressure inside the vacuum container normally has a minimum volume, and when the gas is introduced, the volume increases due to the gas pressure. Vacuum leak device according to item 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3036386U JPS62144540U (en) | 1986-03-03 | 1986-03-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3036386U JPS62144540U (en) | 1986-03-03 | 1986-03-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62144540U true JPS62144540U (en) | 1987-09-11 |
Family
ID=30835096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3036386U Pending JPS62144540U (en) | 1986-03-03 | 1986-03-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62144540U (en) |
-
1986
- 1986-03-03 JP JP3036386U patent/JPS62144540U/ja active Pending
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