JPS6364767U - - Google Patents
Info
- Publication number
- JPS6364767U JPS6364767U JP15910486U JP15910486U JPS6364767U JP S6364767 U JPS6364767 U JP S6364767U JP 15910486 U JP15910486 U JP 15910486U JP 15910486 U JP15910486 U JP 15910486U JP S6364767 U JPS6364767 U JP S6364767U
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- processing
- porous member
- exhaust device
- evacuating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
Description
第１図はこの考案を適用した真空蒸着装置の実
施例の概略構成図である。第２図は従来の真空蒸
着装置の概略構成図である。
１…処理室、６…排気管、８…排気装置、１６
…多孔部材。
FIG. 1 is a schematic diagram of an embodiment of a vacuum evaporation apparatus to which this invention is applied. FIG. 2 is a schematic diagram of a conventional vacuum evaporation apparatus. 1... Processing chamber, 6... Exhaust pipe, 8... Exhaust device, 16
...Porous member.
Claims (1)
行う排気装置とを有する処理装置において、 前記処理室の内壁から所定間隔をもつて多孔部
材を配設し、この多孔部材を介して処理室と排気
装置とを連結したことを特徴とする処理装置。[Claims for Utility Model Registration] A processing device having a vacuum or reduced pressure processing chamber and an exhaust device for evacuating the processing chamber, wherein a porous member is disposed at a predetermined distance from the inner wall of the processing chamber, A processing device characterized in that a processing chamber and an exhaust device are connected through a porous member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15910486U JPS6364767U (en) | 1986-10-16 | 1986-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15910486U JPS6364767U (en) | 1986-10-16 | 1986-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6364767U true JPS6364767U (en) | 1988-04-28 |
Family
ID=31083222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15910486U Pending JPS6364767U (en) | 1986-10-16 | 1986-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6364767U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107567653A (en) * | 2015-05-15 | 2018-01-09 | 应用材料公司 | Load lock chamber, the vacuum flush system with load lock chamber and the method for evacuating load lock chamber |
-
1986
- 1986-10-16 JP JP15910486U patent/JPS6364767U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107567653A (en) * | 2015-05-15 | 2018-01-09 | 应用材料公司 | Load lock chamber, the vacuum flush system with load lock chamber and the method for evacuating load lock chamber |
| KR20180008720A (en) * | 2015-05-15 | 2018-01-24 | 어플라이드 머티어리얼스, 인코포레이티드 | Load lock chambers, vacuum processing systems with load lock chambers, and methods for vacuum evacuating load lock chambers |
| JP2018515932A (en) * | 2015-05-15 | 2018-06-14 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | Load lock chamber, vacuum processing system having load lock chamber, and method for exhausting load lock chamber |
| CN107567653B (en) * | 2015-05-15 | 2021-08-06 | 应用材料公司 | Load lock chamber, vacuum processing system and method of evacuating a load lock chamber |