JPH0220901U - - Google Patents
Info
- Publication number
- JPH0220901U JPH0220901U JP9827088U JP9827088U JPH0220901U JP H0220901 U JPH0220901 U JP H0220901U JP 9827088 U JP9827088 U JP 9827088U JP 9827088 U JP9827088 U JP 9827088U JP H0220901 U JPH0220901 U JP H0220901U
- Authority
- JP
- Japan
- Prior art keywords
- gas flow
- trap
- passing
- trap device
- vacuum container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Description
第１図は本考案の一実施例の構成図、第２図は
本考案の別例の構成図である。第３図は従来例の
構成図である。
１……減圧容器（反応器）、２……吸引装置（
真空ポンプ）、３……トラツプ装置（コールドト
ラツプ）。
FIG. 1 is a block diagram of one embodiment of the present invention, and FIG. 2 is a block diagram of another embodiment of the present invention. FIG. 3 is a configuration diagram of a conventional example. 1...Reduced pressure container (reactor), 2...Suction device (
vacuum pump), 3...trap device (cold trap).
Claims (1)
との間に、トラツプ装置が設けられているガス流
装置において、 上記トラツプ装置は、ガス流が該トラツプ装置
を通過する場合と否とを切換え自在に構成したこ
とを特徴とする トラツプ装置を有するガス流装置。[Claims for Utility Model Registration] In a gas flow device in which a trap device is provided between a vacuum container and a suction device that reduces the pressure inside the vacuum container, the trap device is configured such that the gas flow passes through the trap device. A gas flow device having a trap device, characterized in that the gas flow device is configured to freely switch between passing and not passing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9827088U JPH0220901U (en) | 1988-07-25 | 1988-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9827088U JPH0220901U (en) | 1988-07-25 | 1988-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0220901U true JPH0220901U (en) | 1990-02-13 |
Family
ID=31324385
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9827088U Pending JPH0220901U (en) | 1988-07-25 | 1988-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220901U (en) |
-
1988
- 1988-07-25 JP JP9827088U patent/JPH0220901U/ja active Pending