JPH0411271U - - Google Patents
Info
- Publication number
- JPH0411271U JPH0411271U JP5205190U JP5205190U JPH0411271U JP H0411271 U JPH0411271 U JP H0411271U JP 5205190 U JP5205190 U JP 5205190U JP 5205190 U JP5205190 U JP 5205190U JP H0411271 U JPH0411271 U JP H0411271U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- variable capacity
- gate valve
- vacuum
- processing chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第１図は本考案の一実施例を示す基本構成を示
す正面図、第２図は同前平面図、第３図Ａ，Ｂは
該実施例で使用される仕切弁の１例を示す断面図
、第４図は従来例の説明図である。
８は真空処理室、１３は仕切弁、１４は容量可
変弁、１５は真空ポンプを示す。
Fig. 1 is a front view showing the basic configuration of an embodiment of the present invention, Fig. 2 is a plan view of the same, and Figs. 3 A and B are cross sections showing an example of a gate valve used in the embodiment. FIG. 4 is an explanatory diagram of a conventional example. 8 is a vacuum processing chamber, 13 is a gate valve, 14 is a variable capacity valve, and 15 is a vacuum pump.
Claims (1)
屈曲した流路を有する可変容量弁を連設し、該可
変容量弁に真空ポンプを取付けたことを特徴とす
る真空排気装置。 1. A vacuum evacuation device comprising: a gate valve directly attached to a vacuum processing chamber; a variable capacity valve having a curved flow path connected to the gate valve; and a vacuum pump attached to the variable capacity valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5205190U JPH0411271U (en) | 1990-05-18 | 1990-05-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5205190U JPH0411271U (en) | 1990-05-18 | 1990-05-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0411271U true JPH0411271U (en) | 1992-01-30 |
Family
ID=31572028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5205190U Pending JPH0411271U (en) | 1990-05-18 | 1990-05-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0411271U (en) |
-
1990
- 1990-05-18 JP JP5205190U patent/JPH0411271U/ja active Pending