JPS6372373U - - Google Patents
Info
- Publication number
- JPS6372373U JPS6372373U JP16725386U JP16725386U JPS6372373U JP S6372373 U JPS6372373 U JP S6372373U JP 16725386 U JP16725386 U JP 16725386U JP 16725386 U JP16725386 U JP 16725386U JP S6372373 U JPS6372373 U JP S6372373U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- cavity
- casing
- inlet
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Details Of Valves (AREA)
- Sliding Valves (AREA)
Description
第１図はこの考案の一実施例のフイルタ内蔵バ
ルブの縦断面図である、第２図は従来の配管系の
構成図である。
１１……ケーシング、１２……空洞部、１３…
…導入口、１４……排出口、１５……弁、１６…
…弁座、１７……（入力側）フイルタ。
FIG. 1 is a longitudinal cross-sectional view of a valve with a built-in filter according to an embodiment of this invention, and FIG. 2 is a configuration diagram of a conventional piping system. 11...Casing, 12...Cavity part, 13...
...Inlet, 14...Outlet, 15...Valve, 16...
...Valve seat, 17... (input side) filter.
Claims (1)
ングと、 前記ケーシング内の空洞部に退入自在に配設さ
れて前記空洞部を２分する弁と、 少なくとも前記導入口と弁との間に配設された
フイルタとを具備してなるフイルタ内蔵バルブ。[Claims for Utility Model Registration] A casing having a cavity, an inlet, and an outlet; a valve disposed retractably into the cavity in the casing to divide the cavity into two; and at least the inlet. A valve with a built-in filter, which includes a filter disposed between the port and the valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16725386U JPS6372373U (en) | 1986-10-30 | 1986-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16725386U JPS6372373U (en) | 1986-10-30 | 1986-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6372373U true JPS6372373U (en) | 1988-05-14 |
Family
ID=31099013
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16725386U Pending JPS6372373U (en) | 1986-10-30 | 1986-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6372373U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001129386A (en) * | 1999-08-24 | 2001-05-15 | Tokyo Electron Ltd | Gas treating device and valve assemblage used for this device |
| US7828016B2 (en) | 1999-08-24 | 2010-11-09 | Tokyo Electron Limited | Gas processing apparatus, gas processing method and integrated valve unit for gas processing apparatus |
-
1986
- 1986-10-30 JP JP16725386U patent/JPS6372373U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001129386A (en) * | 1999-08-24 | 2001-05-15 | Tokyo Electron Ltd | Gas treating device and valve assemblage used for this device |
| JP4570748B2 (en) * | 1999-08-24 | 2010-10-27 | 東京エレクトロン株式会社 | Gas processing apparatus and collective valve used therefor |
| US7828016B2 (en) | 1999-08-24 | 2010-11-09 | Tokyo Electron Limited | Gas processing apparatus, gas processing method and integrated valve unit for gas processing apparatus |