JPH0189732U

JPH0189732U -

Info

Publication number: JPH0189732U
Application number: JP18614487U
Authority: JP
Priority date: 1987-12-07
Filing date: 1987-12-07
Publication date: 1989-06-13

Description

[Brief explanation of drawings]

第１図は、本考案に係るウエハ挿入管の縦断面
図である。第２図は、第１図の平面図である。第
３図は、従来例を表わすウエハ挿入管の縦断面図
である。第４図は、第３図の平面図である。符号の説明、１……ウエハ挿入管、２……ウエ
ハ支持装置（ボート）、３……支柱、４……ウエ
ハ、５……ガス流入用の開口（ガス流入口）、６
……ガス流出用の開口（ガス流出口）、７……チ
ユーブ（外管）、８……内管、９……ガス導入口
、１０……ガス導出口、１１……ガス流通路、１
１ａ……ガス導入路、１１ｂ……ガス導出路、１
２……仕切部材、Ａ，Ａ′……ガス流の流れ方向
。 FIG. 1 is a longitudinal sectional view of a wafer insertion tube according to the present invention. FIG. 2 is a plan view of FIG. 1. FIG. 3 is a longitudinal sectional view of a wafer insertion tube representing a conventional example. FIG. 4 is a plan view of FIG. 3. Explanation of symbols, 1...Wafer insertion tube, 2...Wafer support device (boat), 3...Strut, 4...Wafer, 5...Opening for gas inflow (gas inlet), 6
...Opening for gas outflow (gas outlet), 7...Tube (outer tube), 8...Inner tube, 9...Gas inlet, 10...Gas outlet, 11...Gas flow path, 1
1a... Gas introduction path, 11b... Gas outlet path, 1
2...Partition member, A, A'...Flow direction of gas flow.

Claims

[Scope of utility model registration request]

It has an opening for gas inflow on either the top or bottom and an opening for gas outflow on the other side,
In a wafer insertion tube that surrounds a wafer support device that holds a wafer approximately horizontally, the wafer insertion tube has a double tube structure consisting of an outer tube and an inner tube, and the gas is supplied to either the upper or lower portion of the outer tube. An opening for inflow is provided on the other side, an opening for gas outflow is provided on the other side, and an opening for gas introduction and an opening for gas outflow are provided at predetermined locations on the opposing wall surfaces of the inner tube, and the outer tube and the inner tube are A partition member is provided that blocks the space defined between the gas inlet passageway having the gas inflow opening and the gas outlet passageway having the gas outflow opening. Wafer insertion tube.