JPH02131142U - - Google Patents
Info
- Publication number
- JPH02131142U JPH02131142U JP3891089U JP3891089U JPH02131142U JP H02131142 U JPH02131142 U JP H02131142U JP 3891089 U JP3891089 U JP 3891089U JP 3891089 U JP3891089 U JP 3891089U JP H02131142 U JPH02131142 U JP H02131142U
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- piping
- air flow
- ceiling
- visualization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012800 visualization Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Ventilation (AREA)
Description
第１図はこの考案のクリーンルームの断面図、
第２図は第１図クリーンルームのＸ−Ｘ′線位置
より見た下面図である。
１……クリーンルームの天井部、２……グレー
チング床部、３……ＨＥＰＡフイルター、４……
気流可視化装置、５……配管、６……配管（多孔
）、７……クリーンベンチ、８……可視化ガス。
Figure 1 is a cross-sectional view of the clean room of this invention.
FIG. 2 is a bottom view of the clean room shown in FIG. 1 as viewed from the line X-X'. 1... Clean room ceiling, 2... Grating floor, 3... HEPA filter, 4...
Air flow visualization device, 5... Piping, 6... Piping (porous), 7... Clean bench, 8... Visualization gas.
Claims (1)
おいて、 気流可視化装置より天井部およびその近傍へ導
かれ、可視化ガスを流出させる多孔を設けた配管
を配設したことを特徴とするクリーンルーム。[Scope of Claim for Utility Model Registration] In a clean room used in the semiconductor manufacturing process, piping is provided with porous holes through which visualization gas is guided from an air flow visualization device to the ceiling and its vicinity. clean room.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3891089U JPH02131142U (en) | 1989-03-31 | 1989-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3891089U JPH02131142U (en) | 1989-03-31 | 1989-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02131142U true JPH02131142U (en) | 1990-10-31 |
Family
ID=31547340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3891089U Pending JPH02131142U (en) | 1989-03-31 | 1989-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02131142U (en) |
-
1989
- 1989-03-31 JP JP3891089U patent/JPH02131142U/ja active Pending