JPS6028090U - Structure of air shower room in clean room - Google Patents

Structure of air shower room in clean room

Info

Publication number
JPS6028090U
JPS6028090U JP12029583U JP12029583U JPS6028090U JP S6028090 U JPS6028090 U JP S6028090U JP 12029583 U JP12029583 U JP 12029583U JP 12029583 U JP12029583 U JP 12029583U JP S6028090 U JPS6028090 U JP S6028090U
Authority
JP
Japan
Prior art keywords
room
air
air shower
clean
shower room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12029583U
Other languages
Japanese (ja)
Other versions
JPH0228350Y2 (en
Inventor
利晃 西岡
克美 一橋
和男 竹内
Original Assignee
株式会社大林組
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社大林組 filed Critical 株式会社大林組
Priority to JP12029583U priority Critical patent/JPS6028090U/en
Publication of JPS6028090U publication Critical patent/JPS6028090U/en
Application granted granted Critical
Publication of JPH0228350Y2 publication Critical patent/JPH0228350Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Ventilation (AREA)
  • Devices For Use In Laboratory Experiments (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来のエアシャワー室を示した断面図で、第２
図が本考案のエアシャワー室を示した断面図である。 １・・・クリーンルーム、２・・・フィルター、３・・
・送風機、４・・・給気ダクト、５・・・排気ダクト、
６・・・吹出口、７・・・床グレーチング、８・・・エ
アシャワー室、９・・・リリーフダンパー。Figure 1 is a sectional view showing a conventional air shower room.
The figure is a sectional view showing the air shower room of the present invention. 1...Clean room, 2...Filter, 3...
・Blower, 4...Air supply duct, 5...Exhaust duct,
6... Air outlet, 7... Floor grating, 8... Air shower room, 9... Relief damper.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] クリーンルーム１におけるリリーフダンパー９とエアシ
ャワー室８を給気ダクト４で直結するとともに外部に面
するところに排気ダクト５を設け、クリーンルーム１の
清浄空気をリリーフダンパー９を介して給気ダクト４で
導き、エアシャワー室８の余剰空気をクリーンルーム１
とエアシャワー室８の圧力差を利用して排気ダクト５で
外部に排出するようにしたことを特徴とするクリーンル
ームにおけるエアシャワー室の構造。A relief damper 9 and an air shower room 8 in the clean room 1 are directly connected by an air supply duct 4, and an exhaust duct 5 is provided facing the outside, and clean air from the clean room 1 is guided through the air supply duct 4 through the relief damper 9. , excess air from air shower room 8 is transferred to clean room 1.
The structure of an air shower room in a clean room is characterized in that the pressure difference between the air shower room and the air shower room 8 is used to discharge the air to the outside through an exhaust duct 5.
JP12029583U 1983-08-03 1983-08-03 Structure of air shower room in clean room Granted JPS6028090U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12029583U JPS6028090U (en) 1983-08-03 1983-08-03 Structure of air shower room in clean room

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12029583U JPS6028090U (en) 1983-08-03 1983-08-03 Structure of air shower room in clean room

Publications (2)

Publication Number Publication Date
JPS6028090U true JPS6028090U (en) 1985-02-25
JPH0228350Y2 JPH0228350Y2 (en) 1990-07-30

Family

ID=30275760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12029583U Granted JPS6028090U (en) 1983-08-03 1983-08-03 Structure of air shower room in clean room

Country Status (1)

Country Link
JP (1) JPS6028090U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015021622A (en) * 2013-07-16 2015-02-02 ダイキン工業株式会社 Dehumidification system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5755581U (en) * 1980-09-12 1982-04-01

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5755581B2 (en) * 1974-10-02 1982-11-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5755581U (en) * 1980-09-12 1982-04-01

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015021622A (en) * 2013-07-16 2015-02-02 ダイキン工業株式会社 Dehumidification system

Also Published As

Publication number Publication date
JPH0228350Y2 (en) 1990-07-30

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