JPS62180935U - - Google Patents
Info
- Publication number
- JPS62180935U JPS62180935U JP1986069467U JP6946786U JPS62180935U JP S62180935 U JPS62180935 U JP S62180935U JP 1986069467 U JP1986069467 U JP 1986069467U JP 6946786 U JP6946786 U JP 6946786U JP S62180935 U JPS62180935 U JP S62180935U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- utility
- exhaust system
- registration request
- device characterized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010926 purge Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は本考案の一実施例の構成図、第２図は
従来の真空装置の構成図である。
符号の説明、１：反応室、２：電極、３：被処
理物、４：真空ポンプ、５：リークバルブ、６：
異物、７：多段フイルター。
FIG. 1 is a block diagram of an embodiment of the present invention, and FIG. 2 is a block diagram of a conventional vacuum apparatus. Explanation of symbols, 1: reaction chamber, 2: electrode, 3: object to be treated, 4: vacuum pump, 5: leak valve, 6:
Foreign matter, 7: Multistage filter.
Claims (1)
機構から反応室に致る部分に、順次面積が大きく
なる多段フイルターを設置したことを特徴とする
真空装置。 A vacuum device characterized in that a multi-stage filter whose area increases successively is installed in a portion from a vacuum exhaust system to a reaction chamber or a portion from a purge mechanism to a reaction chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986069467U JPS62180935U (en) | 1986-05-08 | 1986-05-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986069467U JPS62180935U (en) | 1986-05-08 | 1986-05-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62180935U true JPS62180935U (en) | 1987-11-17 |
Family
ID=30910226
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986069467U Pending JPS62180935U (en) | 1986-05-08 | 1986-05-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62180935U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0613135U (en) * | 1992-07-24 | 1994-02-18 | 日新電機株式会社 | Multi-plate type fluid introduction box |
-
1986
- 1986-05-08 JP JP1986069467U patent/JPS62180935U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0613135U (en) * | 1992-07-24 | 1994-02-18 | 日新電機株式会社 | Multi-plate type fluid introduction box |
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