JPS62197782U - - Google Patents
Info
- Publication number
- JPS62197782U JPS62197782U JP8662686U JP8662686U JPS62197782U JP S62197782 U JPS62197782 U JP S62197782U JP 8662686 U JP8662686 U JP 8662686U JP 8662686 U JP8662686 U JP 8662686U JP S62197782 U JPS62197782 U JP S62197782U
- Authority
- JP
- Japan
- Prior art keywords
- reactive gas
- dry pump
- power source
- pump
- drive power
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Description
図は本考案の一実施例である反応性ガスの真空
排気装置を示す構成図である。
１……処理室、７……ターボ分子ポンプ、９，
１０……ドライポンプ。
The figure is a configuration diagram showing a reactive gas evacuation device which is an embodiment of the present invention. 1...processing chamber, 7...turbo molecular pump, 9,
10...Dry pump.
Claims (1)
口に、機械式の主真空ポンプを接続し、該主真空
ポンプにドライポンプを接続して成ることを特徴
とする反応性ガスの真空排気装置。 ２ 前記ドライポンプの駆動電源を前記装置の駆
動電源と分け、前記装置の運転と無関係に前記ド
ライポンプを運転可能にした実用新案登録請求の
範囲第１項の反応性ガスの真空排気装置。[Scope of Claim for Utility Model Registration] 1. A device is characterized in that a mechanical main vacuum pump is connected to the exhaust port of a device that introduces and processes a reactive gas, and a dry pump is connected to the main vacuum pump. Reactive gas evacuation equipment. 2. The reactive gas evacuation device according to claim 1, which is a registered utility model, in which the drive power source for the dry pump is separated from the drive power source for the device, so that the dry pump can be operated independently of the operation of the device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8662686U JPS62197782U (en) | 1986-06-09 | 1986-06-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8662686U JPS62197782U (en) | 1986-06-09 | 1986-06-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62197782U true JPS62197782U (en) | 1987-12-16 |
Family
ID=30943106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8662686U Pending JPS62197782U (en) | 1986-06-09 | 1986-06-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62197782U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4595152B2 (en) * | 2000-02-01 | 2010-12-08 | パナソニック株式会社 | Vacuum exhaust apparatus and method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58110874A (en) * | 1981-12-25 | 1983-07-01 | Fujitsu Ltd | Chemical reaction gas exhausting device |
-
1986
- 1986-06-09 JP JP8662686U patent/JPS62197782U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58110874A (en) * | 1981-12-25 | 1983-07-01 | Fujitsu Ltd | Chemical reaction gas exhausting device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4595152B2 (en) * | 2000-02-01 | 2010-12-08 | パナソニック株式会社 | Vacuum exhaust apparatus and method |
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